Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
| Line 35: | Line 35: | ||
* Electrical cabinet | * Electrical cabinet | ||
== Process information == | == Process information [[Image:section under construction.jpg|70px]] == | ||
*[[/Silicon cutting and milling|Silicon cutting and milling]] | *[[/Silicon cutting and milling|Silicon cutting and milling]] | ||
| Line 42: | Line 42: | ||
*[[/Nickel cutting and milling|Nickel cutting and milling]] (for [[Specific Process Knowledge/Back-end processing/Polymer Injection Molder|Polymer Injection Molder]]) | *[[/Nickel cutting and milling|Nickel cutting and milling]] (for [[Specific Process Knowledge/Back-end processing/Polymer Injection Molder|Polymer Injection Molder]]) | ||
*[[../Mask making|Mask making]] | *[[../Mask making|Mask making]] | ||
=== Laser Processing details === | |||
{| {{table}} | |||
| align="left" valign="top" style="background:LightGray"|''' Material''' | |||
| align="left" valign="top" style="background:LightGray"|''' Optics''' | |||
| align="left" valign="top" style="background:#DCDCDC;"|''' Intensity''' | |||
| align="left" valign="top" style="background:LightGray"|''' Writing speed''' | |||
| align="left" valign="top" style="background:LightGray"|''' Parameter file''' | |||
|- style="background:LightGray" valign="top" | |||
| Silicon | |||
| Red (1064nm/255mm) | |||
| 100% | |||
| ?? mm/s | |||
| [[silicon cutting.par]] | |||
|- style="background:LightGray" valign="top" | |||
| Silicon with SiliconNitride | |||
| Red (1064nm/255mm) | |||
| 100% | |||
| ?? mm/s | |||
| [[silicon-SiN cutting.par]] | |||
|- style="background:LightGray" valign="top" | |||
| Borofloat glass | |||
| Red (1064nm/255mm) | |||
| 100% | |||
| ?? mm/s | |||
| [[borofloat cutting.par]] | |||
|- style="background:LightGray" valign="top" | |||
| Nickel | |||
| Red (1064nm/255mm) | |||
| 100% | |||
| ?? mm/s | |||
| [[nickel cutting red.par]] | |||
|- style="background:LightGray" valign="top" | |||
| Nickel | |||
| Green (532nm/255mm) | |||
| 100% | |||
| ?? mm/s | |||
| [[nickel cutting green.par]] | |||
|- style="background:LightGray" valign="top" | |||
| Mask making | |||
| Blue (355nm/103mm) | |||
| 20% | |||
| ?? mm/s | |||
| [[mask making.par]] | |||
|- | |||
|} | |||
Revision as of 11:58, 9 December 2013
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Laser Micromachining Tool 
The Laser Micromachining Tool is a microSTRUCT vario from the company 3D-Micromac AG.
It is currently only for internal use by Danchip personel for training. It will be public available for certain processes in October 2013.
The system is able to produce micro structures in different kinds of materials like metals, ceramics, composite materials, etc.
The machine is located in the basement of building 346 under the cleanroom.
The user manual(s), user APV(s), technical information and contact information can be found in LabManager:
The Laser Micromachining Tool in LabManager
It is equipped with 2 high power lasers:
- a 50W picosecond laser that can emit light at 3 wavelengths: 355nm, 532nm and 1064nm and a
- a 100W nanosecond laser with a wavelength of 1064nm.
It consist of these main parts:
- Upper service way
- Manual front door
- Operating panel
- Machine's feet (adjustable)
- Left service way
- Electrical cabinet
Process information
- Silicon cutting and milling
- Borofloat glass cutting and milling
- Quartz cutting and milling
- Nickel cutting and milling (for Polymer Injection Molder)
- Mask making
Laser Processing details
| Material | Optics | Intensity | Writing speed | Parameter file |
| Silicon | Red (1064nm/255mm) | 100% | ?? mm/s | silicon cutting.par |
| Silicon with SiliconNitride | Red (1064nm/255mm) | 100% | ?? mm/s | silicon-SiN cutting.par |
| Borofloat glass | Red (1064nm/255mm) | 100% | ?? mm/s | borofloat cutting.par |
| Nickel | Red (1064nm/255mm) | 100% | ?? mm/s | nickel cutting red.par |
| Nickel | Green (532nm/255mm) | 100% | ?? mm/s | nickel cutting green.par |
| Mask making | Blue (355nm/103mm) | 20% | ?? mm/s | mask making.par |