Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions
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The furnace A4 phosphorus predep(N-predep) can be used to predeposit silicon wafers with phosphor. The silicon wafers are positioned in a quarts boat. Phosphor is predeposited in the silicon wafers. | The furnace A4 phosphorus predep(N-predep) can be used to predeposit silicon wafers with phosphor. The silicon wafers are positioned in a quarts boat. Phosphor is predeposited in the silicon wafers. | ||
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==Test of Phosphorus Predep furnace== | ==Test of Phosphorus Predep furnace== | ||