Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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| style="background:LightGrey; color:black"|Exposure light/filters | | style="background:LightGrey; color:black"|Exposure light/filters | ||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
* Near UV | * Near UV(350-450nm) | ||
* Deep UV | * Mid UV (260-320nm) | ||
* Deep UV(220-260nm) | |||
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