Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Thermal evaporation of Cr in Thermal evaporator: Difference between revisions
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== '''Thermal evaporation of Chromium''' == | == '''Thermal evaporation of Chromium''' == | ||
Chromium can be thermally evaporated in the Thermal Evaporator (NANO 36 THERMAL EVAPORATOR SYSTEM). At DTU Nanolab, we use dedicated 4" long chrome plated tungsten rods (supplier: KJLC). During power ramp up, the material warms up and sublimates. Unlike deposition of Al and Ag, where simple crucibles are used with point-source evaporation from bottom to the substrate, the Deposition of chromium proceeds in all directions. To prevent the deposition on the side-walls and the bottom of the chamber a specific protecting shield is mounted beneath the tungsten rod. | Chromium can be thermally evaporated in the [[Specific_Process_Knowledge/Thin_film_deposition/thermalevaporator|Thermal Evaporator]] (NANO 36 THERMAL EVAPORATOR SYSTEM). At DTU Nanolab, we use dedicated 4" long chrome plated tungsten rods (supplier: KJLC). During power ramp up, the material warms up and sublimates. Unlike deposition of Al and Ag, where simple crucibles are used with point-source evaporation from bottom to the substrate, the Deposition of chromium proceeds in all directions. To prevent the deposition on the side-walls and the bottom of the chamber a specific protecting shield is mounted beneath the tungsten rod. | ||
<gallery caption="" widths="600px" heights="400px" perrow="2"> | <gallery caption="" widths="600px" heights="400px" perrow="2"> | ||