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| Line 346: |
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| |} | | |} |
| <br clear="all" /> | | <br clear="all" /> |
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| ==BPSG: RI vs. B/P ==
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| B2H6 flow and PH3 flow was varied to map the RI of different B2H6/PH3 ratios. <br>
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| ''Work done by BGHE@danchip in fall 2013'' <br>
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| {| border="1" cellspacing="0" cellpadding="7"
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| |-
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| |Recipe name
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| |SiH4 flow [sccm]
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| |N<sub>2</sub>O flow [sccm]
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| |N2 flow [sccm]
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| |B2H6 flow [sccm]
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| |PH3 flow [sccm]
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| |Pressure [mTorr]
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| |Power [W]
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| |Description
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| |-
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| |1PBSG
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| |17
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| |1600
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| |0
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| |See below
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| |See below
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| |500
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| |800LF
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| |BPSG glass for waveguide cladding layer
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| |}
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| LF=Low Frequency
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|
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| {| border="1" style="text-align: center; width: 400px; height: 150px;"
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| |-
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| |Run number
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| |PH3 flow
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| |B2H6 flow
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| |B2H6/PH3
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| |RI
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| |Thickness
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| |-
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| |A1
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| |40 sccm
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| |135 sccm
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| |3.38
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| |1.4582
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| |3.28 µm
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| |-
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| |A2
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| |55 sccm
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| |115 sccm
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| |2.09
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| |1.4615
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| |3.13 µm
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| |-
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| |A3
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| |45 sccm
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| |130 sccm
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| |2.89
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| |1.4590
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| |3.13 µm
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| |-
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| |A4
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| |35 sccm
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| |140 sccm
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| |4.0
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| |1.4572
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| |3.22 µm
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| |-
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| |A5
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| |50 sccm
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| |120 sccm
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| |2.4
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| |1.4602
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| |3.14 µm
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| |-
| |
| |}
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| [[File:PECVD2_RI_vs_B-P_graph.jpg]]
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|
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| =Recipes on PECVD3 for deposition of doped oxide= | | =Recipes on PECVD3 for deposition of doped oxide= |
