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Specific Process Knowledge/Etch/Etching of Platinum: Difference between revisions

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[[Category: Equipment|Etch Wet Platinum]]
[[Category: Etch (Wet) bath|Platinum]]


==Etching of Platinum==
==Etching of Platinum==
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!Etch rate range
!Etch rate range
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*~?nm/min
*~ 1 - 10 nm/min (not tested yet)
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*~30nm/min (not tested yet)  
*~30nm/min (not tested yet)  
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