Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinan33-2: Difference between revisions
Created page with "== The Sinano3.3 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.3''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl<sub>3</sub> 5 sccm, HB..." |
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<!-- Ok, jmli 20170627 --> | |||
<!--Checked for updates on 24/8-2021. ok/ jmli--> | |||
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== The Sinano3.3 recipe == | == The Sinano3.3 recipe == | ||
<!-- revised 1/6-2015 by jmli --> | |||
<!--Checked for updates on 10/7-2019 - ok/jmli --> | |||
{| border="2" cellpadding="2" cellspacing="1" | {| border="2" cellpadding="2" cellspacing="1" | ||
|+ '''Recipe Sinano3.3''' | |+ '''Recipe Sinano3.3''' | ||