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Specific Process Knowledge/Lithography/UVExposure/aligner MA6-2: Difference between revisions

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'''Intensity accept limit:'''<br>
'''Intensity accept limit:'''<br>
The intensity should be corrected if the average intensity (from the 5 measurement points) deviates more than ±5% from nominal value. The nominal value for the Aligner: MA6-2 is 11 mW/cm2, which means that the accept range is 10.45 - 11.55 mW/cm2
The intensity should be corrected if the average intensity (from the 5 measurement points) deviates more than ±5% from nominal value. The nominal value for the Aligner: MA6-2 is 11 mW/cm<sup>2</sup>, which means that the accept range is 10.45 - 11.55 mW/cm<sup>2</sup>.


'''Uniformity accept limit:'''<br>
'''Uniformity accept limit:'''<br>
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*[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=339 The QC procedure for Aligner: MA6-2] - '''requires login'''<br>
*[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=339 The QC procedure for Aligner: MA6-2] - '''requires login'''<br>
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=339 The newest QC data for Aligner: MA6-2] - '''requires login'''
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=339 The newest QC data for Aligner: MA6-2] - '''requires login'''
<!--
{| border="1" cellspacing="2" cellpadding="2" colspan="3"
|bgcolor="#98FB98" |'''Quality Control (QC) for Aligner: MA6-2'''
|-
|
*[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=339 The QC procedure for Aligner: MA6-2] - '''requires login'''<br>
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=339 The newest QC data for Aligner: MA6-2] - '''requires login'''
{| {{table}}
| align="center" |
{| border="1" cellspacing="1" cellpadding="2"  align="center" style="width:300px"
! QC Recipe:
! Manual intensity measurement
|-
|Measurement area
|100 mm
|-
|Number of measurements
|5
|-
|}
| align="center" valign="top"|
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:400px"
!QC limits
!Aligner: MA6-2
|-
|Nominal intensity
|11 mW/cm<sup>2</sup> @ 365 nm
|-
|Intensity deviation from nominal
|≤5%
|-
|Intensity non-uniformity
|≤2%
|-
|}
|-
|}
Power supply and/or lamp will be adjusted if intensity is outside the limit.
|}
-->
<br clear="all" />
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