Specific Process Knowledge/Lithography/UVExposure/aligner MA6-2: Difference between revisions
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==Alignment== | ==Alignment== | ||
'''Top Side Alignment:''' | '''Top Side Alignment:''' | ||
*TSA microscope standard objectives: | *TSA microscope standard objectives: 5x, and 10x (20x available) | ||
*TSA microscope special objectives: 11. | *TSA microscope special objectives: 11.25x offset for smaller separation | ||
*Minimum distance between TSA microscope objectives: 33 mm | *Minimum distance between TSA microscope objectives: 33 mm for standard objectives and 8 mm for the special objectives | ||
**Alignment of smaller separations is possible using the "scan microscope" function | **Alignment of even smaller separations is possible using the "scan microscope" function | ||
*Maximum distance between TSA microscope objectives: 160 mm | *Maximum distance between TSA microscope objectives: 160 mm | ||
*TSA microscope travel range: X | *TSA microscope travel range: X ±25 mm; Y +20/-75 mm (towards the flat) | ||
''' | |||
'''Back Side Alignment:''' | |||
*Minimum distance between BSA microscope objectives: 15 mm | *Minimum distance between BSA microscope objectives: 15 mm | ||
*Maximum distance between BSA microscope objectives: 100 mm | *Maximum distance between BSA microscope objectives: 100 mm | ||
*BSA microscope travel range: X + | *BSA microscope travel range: X +50/-16 mm; Y +50/-20 mm (towards the flat) | ||
*BSA chuck view ranges: | *BSA chuck view ranges: | ||
** | **50 mm: X ±8-22 mm; Y ±0-6 mm | ||
** | **100 mm: X ±14-46 mm; Y ±0-10 mm | ||
** | **150 mm: X ±14-69 mm; Y ±0-10 mm | ||
'''Microscope field of view (W x H, splitfield):''' | '''Microscope field of view (W x H, splitfield):''' | ||
*TSA 5X | *TSA 5X: | ||
**Oculars: 1. | **Oculars: 1.3 mm x 2.6 mm (Ø2.6 mm full field) | ||
**Camera: | **Camera: 350 µm x 500 µm (700 µm x 500 µm full field) | ||
*TSA 10X | *TSA 10X: | ||
**Oculars: 0. | **Oculars: 0.6 mm x 1.3 mm (Ø1.3 mm full field) | ||
**Camera: | **Camera: 150 µm x 250 µm (350 µm x 250 µm full field) | ||
*TSA special | *TSA special: | ||
**Oculars: 0. | **Oculars: 0.55 mm x 1.1 mm (Ø1.1 mm full field) | ||
**Camera: | **Camera: 150 µm x 200 µm (300 µm x 200 µm full field) | ||
*BSA camera | *BSA camera: | ||
**Low: 1. | **Low: 1.5 mm x 2 mm (3 mm x 2 mm full field) | ||
**High: | **High: 450 µm x 650 µm (950 µm x 650 µm full field) | ||
==Quality Control (QC)== | ==Quality Control (QC)== | ||
The purpose of the QC process is to check the intensity and uniformity of the exposure light in the Aligner: MA6-2, using a UV optometer. The optometer is placed at 5 fixed positions in the exposure area on a dedicated QC chuck, and the intensity of the light is measured. | |||
The 5 intensity measurements are then used to calculate the average intensity as well as the peak uniformity error: <math>PUE[%] = \frac{max-min}{max+min} \sdot 100</math>. | |||
'''Intensity accept limit:'''<br> | |||
The intensity should be corrected if the average intensity (from the 5 measurement points) deviates more than ±5% from nominal value. The nominal value for the Aligner: MA6-2 is 11 mW/cm<sup>2</sup>, which means that the accept range is 10.45 - 11.55 mW/cm<sup>2</sup>. | |||
'''Uniformity accept limit:'''<br> | |||
The uniformity should be adjusted if the peak uniformity error is greater than 2%. | |||
'''Documentation:'''<br> | |||
*[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=339 The QC procedure for Aligner: MA6-2] - '''requires login'''<br> | *[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=339 The QC procedure for Aligner: MA6-2] - '''requires login'''<br> | ||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=339 The newest QC data for Aligner: MA6-2] - '''requires login''' | *[https://labmanager.dtu.dk/view_binary.php?type=data&mach=339 The newest QC data for Aligner: MA6-2] - '''requires login''' | ||