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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,671 edits
 
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Line 19: Line 19:
==AZ 5214E==
==AZ 5214E==
===Resolution===
===Resolution===
'''Resolution at optimal processing conditions for different exposure equipment:'''
'''Resolution at optimal processing conditions for 1.5µm AZ 5214E using different exposure equipment:'''
{| class="wikitable"
{| class="wikitable"
|+
|+
!Exposure equipment
!Exposure equipment
!Dose
!Dose [mJ/cm<sup>2</sup>]
!Contact/Defoc
!Contact/Defoc
!Resolution
!Resolution [µm]
!Comment
!Comment
|-
|-
Line 31: Line 31:
|100
|100
|Vacuum
|Vacuum
|1µm
|1
|
|
|-
|-
Line 37: Line 37:
|100
|100
|Vacuum
|Vacuum
|1.25µm
|1.25
|Probably over-exposed
|Probably over-exposed
|-
|-
Line 43: Line 43:
|90
|90
|2
|2
|1.25µm
|1.25
|
|
|}
|}
Line 313: Line 313:
* Table with optimal parameters and resolution for different aligners
* Table with optimal parameters and resolution for different aligners
* SEM pictures
* SEM pictures
'''Resolution at optimal processing conditions for 1.5µm AZ MiR 701 using different exposure equipment:'''
{| class="wikitable"
|+
!Exposure equipment
!Dose [mJ/cm<sup>2</sup>]
!Contact/Defoc
!Resolution [µm]
!Comment
|-
|Aligner: MA6-2
|220
|Vacuum
|1
|
|-
|Aligner: Maskless 02 (MLA2)
|275
|2
|1
|
|}
<br clear="all" />


===Resist profile (sidewall angle and linewidth)===
===Resist profile (sidewall angle and linewidth)===
*SEM pictures to support graphs?
*SEM pictures to support graphs?


[[Image:MiR_Linewidth vs dose.jpg|left|500px|thumb|Width of 2µm line vs. exposure dose for 1.5µm AZ MiR 701. <br>Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. <br>Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2).]]
'''Result of image analysis of SEM images of 2µm triplets:'''


[[Image:MiR_Sidewall vs dose.jpg|left|500px|thumb|Sidewall angle vs. exposure dose for 1.5µm AZ MiR 701. <br>Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. <br>Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2).]]
{| cellpadding="2" style="border: 2px solid darkgray;" align="left"
! width="510" | 


[[Image:MiR_Profile vs defoc.jpg|left|500px|thumb|Linewidth and sidewall angle vs. defocus value  for 1.5µm AZ MiR 701 exposed in Aligner: Maskless 02 (MLA2) using dose 275mJ/cm<sup>2</sup>. <br>Blue circles: Width of 2µm line. Orange Squares: Sidewall angle.]]
|+
|- border="0" align="center"
|[[Image:MiR_Linewidth vs dose.jpg|500px]]
|[[Image:MiR_Sidewall vs dose.jpg|500px]]


|- align="center"
| colspan="2" | Width of 2µm line and sidewall angle vs. exposure dose for 1.5µm AZ MiR 701. <br>Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. <br>Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2). 
|}
<br clear="all" />
'''Result of image analysis of SEM images of 2µm triplets:'''
{| cellpadding="2" style="border: 2px solid darkgray;" align="left"
! width="510" |
|+
|- border="0" align="center"
|[[Image:MiR_Profile vs defoc.jpg|500px]]
|- align="center"
| Linewidth and sidewall angle vs. defocus value  for 1.5µm AZ MiR 701 exposed in Aligner: Maskless 02 (MLA2) using dose 95mJ/cm<sup>2</sup>. <br>Blue circles: Width of 2µm line. <br>Orange Squares: Sidewall angle.
|}
<br clear="all" />
<br clear="all" />


Line 329: Line 372:
* Table with optimal parameters and resolution for different aligners
* Table with optimal parameters and resolution for different aligners
* SEM pictures
* SEM pictures
'''Resolution at optimal processing conditions for 2µm AZ nLOF 2020 using different exposure equipment:'''
{| class="wikitable"
|+
!Exposure equipment
!Dose [mJ/cm<sup>2</sup>]
!Contact/Defoc
!Resolution [µm]
!Comment
|-
|Aligner: MA6-2
|154
|Vacuum
|1
|
|-
|Aligner: Maskless 01 (MLA1)
|220
| -4
|2
|
|-
|Aligner: Maskless 02 (MLA2)
|450
|0
|1.25
|
|}
<br clear="all" />


===Resist profile (sidewall angle and linewidth)===
===Resist profile (sidewall angle and linewidth)===
*SEM pictures to support graphs?
*SEM pictures to support graphs?


[[Image:nLOF_Linewidth vs dose.jpg|left|500px|thumb|Width of 2µm line vs. exposure dose for 2µm AZ nLOF 2020. <br>Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. <br>Orange Squares: Exposed on Aligner: Maskless 01 (MLA1) using defoc -4 (QC defoc=-2). <br>Grey triangles: Exposed on Aligner: Maskless 02 (MLA2) using defoc 0 (QC defoc=2).]]
'''Result of image analysis of SEM images of 2µm triplets:'''
 
{| cellpadding="2" style="border: 2px solid darkgray;" align="left"
! width="510" | 


[[Image:nLOF_Sidewall vs dose.jpg|left|500px|thumb|Sidewall angle vs. exposure dose for 2µm AZ nLOF 2020. <br>Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. <br>Orange Squares: Exposed on Aligner: Maskless 01 (MLA1) using defoc -4 (QC defoc=-2). <br>Grey triangles: Exposed on Aligner: Maskless 02 (MLA2) using defoc 0 (QC defoc=2).]]
|+
|- border="0" align="center"
|[[Image:nLOF_Linewidth vs dose.jpg|500px]]
|[[Image:nLOF_Sidewall vs dose.jpg|500px]]


[[Image:nLOF_MLA1_Profile vs defoc.jpg|left|500px|thumb|Linewidth and sidewall angle vs. defocus value  for 2µm AZ nLOF exposed in Aligner: Maskless 01 (MLA1) using dose 220mJ/cm<sup>2</sup>. <br>Blue circles: Width of 2µm line. Orange Squares: Sidewall angle.]]
|- align="center"
| colspan="2" | Sidewall angle vs. exposure dose for 2µm AZ nLOF 2020. <br>Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. <br>Orange Squares: Exposed on Aligner: Maskless 01 (MLA1) using defoc -4 (QC defoc=-2). <br>Grey triangles: Exposed on Aligner: Maskless 02 (MLA2) using defoc 0 (QC defoc=2).
|}
<br clear="all" />


[[Image:nLOF_MLA2_Profile vs defoc.jpg|left|500px|thumb|Linewidth and sidewall angle vs. defocus value  for 2µm AZ nLOF exposed in Aligner: Maskless 02 (MLA2) using dose 450mJ/cm<sup>2</sup>. <br>Blue circles: Width of 2µm line. Orange Squares: Sidewall angle.]]
'''Result of image analysis of SEM images of 2µm triplets:'''


{| cellpadding="2" style="border: 2px solid darkgray;" align="left"
! width="510" | 
|+
|- border="0" align="center"
|[[Image:nLOF_MLA1_Profile vs defoc.jpg|500px]]
|[[Image:nLOF_MLA2_Profile vs defoc.jpg|500px]]
|- align="center"
| colspan="2" | Linewidth and sidewall angle vs. defocus value  for 2µm AZ nLOF <br>exposed in Aligner: Maskless 01 (MLA1) using dose 220mJ/cm<sup>2</sup> and Aligner: Maskless 02 (MLA2) using dose 450mJ/cm<sup>2</sup>, respectively. <br>Blue circles: Width of 2µm line. Orange Squares: Sidewall angle.
|}
<br clear="all" />
<br clear="all" />
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