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Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions

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! Deposition rate
! Deposition rate
|0.5-5 Å/s
|1-5 Å/s
|1 Å/s (can be adjusted to around 5 Å/s)
|1 Å/s (can be adjusted to around 5 Å/s)
|Depends on process parameters, 1-10 Å/s  
|Depends on process parameters, 1-10 Å/s  
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