Specific Process Knowledge/Characterization/Tencor P17: Difference between revisions
| Line 8: | Line 8: | ||
<br> | <br> | ||
= Tencor P17 (Stylus Profiler) = | = Tencor P17 (Stylus Profiler) = | ||
[[image:KLA-Tencor P17 profiler.jpg|275x275px|right|thumb|Front of the P17 profiler located in cleanroom F-2.]] | |||
The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the [[Specific Process Knowledge/Characterization/Dektak XTA|Dektak XTA]] profiling surfaces with structures in the micro- and submicrometer range as well as for measuring [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress]]. Both of these tools are inside the cleanroom. | The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the [[Specific Process Knowledge/Characterization/Dektak XTA|Dektak XTA]] profiling surfaces with structures in the micro- and submicrometer range as well as for measuring [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress]]. Both of these tools are inside the cleanroom. | ||
| Line 27: | Line 30: | ||
<br> | <br> | ||
===Performance and Process Parameters=== | ===Performance and Process Parameters=== | ||
{| border="2" cellspacing="0" cellpadding="10" | {| border="2" cellspacing="0" cellpadding="10" | ||