Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300: Difference between revisions
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<!-- give the link to the equipment info page in LabManager: --> | <!-- give the link to the equipment info page in LabManager: --> | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=267 IBE/IBSD Ionfab 300+ in LabManager] | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=267 IBE/IBSD Ionfab 300+ in LabManager] | ||
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=Process information= | =Process information= | ||
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**[[/IBE Au etch#IBE Au etch with Ti mask|Au etch with Ti as masking material]] | **[[/IBE Au etch#IBE Au etch with Ti mask|Au etch with Ti as masking material]] | ||
**[[/IBE blazed gratings|Etching of blazed gratings]] | **[[/IBE blazed gratings|Etching of blazed gratings]] | ||
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==Deposition== | ==Deposition== | ||
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**[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/IBSD of SiO2|Deposition of SiO2]] | **[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/IBSD of SiO2|Deposition of SiO2]] | ||
**[[/IBSD of Si|Deposition of Si]] | **[[/IBSD of Si|Deposition of Si]] | ||
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==An overview of the performance of IBE/IBSD Ionfab 300 and some process related parameters== | ==An overview of the performance of IBE/IBSD Ionfab 300 and some process related parameters== | ||