Specific Process Knowledge/Thin film deposition/Deposition of Chromium: Difference between revisions
| (2 intermediate revisions by one other user not shown) | |||
| Line 5: | Line 5: | ||
== Studies of Cr deposition processes == | == Studies of Cr deposition processes == | ||
[[/ | [[/Roughness of Chromium|Roughness of Chromium]] - ''Roughness and Uniformity of Cr layers deposited with different methods and settings'' | ||
[[/Sputtering of Cr in Sputter System (Lesker)|Sputtering of Cr in Sputter system (Lesker)]] - ''Settings and deposition rates'' | [[/Sputtering of Cr in Sputter System (Lesker)|Sputtering of Cr in Sputter system (Lesker)]] - ''Settings and deposition rates'' | ||