Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
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== Deposition of Aluminium == | == Deposition of Aluminium == | ||
Aluminium can be deposited by e-beam evaporation, sputtering and thermal evaporation. In the chart | Aluminium can be deposited by e-beam evaporation, sputtering and thermal evaporation. In the chart below we compare the different methods and available equipment. | ||
==Sputtering of Aluminium== | ==Sputtering of Aluminium== | ||