Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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In 2010 DTU Nanolab acquired DRIE-Pegasus 1. As a state-of-the-art etch tool with excellent performance and great flexibility, it grew immensely popular and by 2015 it was apparent that we needed yet another tool to cope with the demand. Therefore, in 2016 Pegasus 2 was acquired from a closed-down lab and installed next to Pegasus 1. | In 2010 DTU Nanolab acquired DRIE-Pegasus 1. As a state-of-the-art etch tool with excellent performance and great flexibility, it grew immensely popular and by 2015 it was apparent that we needed yet another tool to cope with the demand. Therefore, in 2016 Pegasus 2 was acquired from a closed-down lab and installed next to Pegasus 1. | ||