Specific Process Knowledge/Back-end processing: Difference between revisions
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! '''Note! Packlab | ! '''Note! The SupportLab (former Packlab) has been established and tools are currently relocated.''' | ||
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Please note that the training on machines requires the "Introduction course for Nanolab facilities (not cleanroom)" with specialization to "Access to building 347". Please ask our staff for more information. | |||
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Below you can see a list of equipment for back-end processing that is available at DTU Nanolab. | Below you can see a list of equipment for back-end processing that is available at DTU Nanolab. | ||
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* Chip/die mounting | * Chip/die mounting | ||
**[[/Die Bonder|Die Bonder (eutectic metal)]] | **[[/Die Bonder|Die Bonder (eutectic metal)]] | ||
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*Wire bonding | *Wire bonding | ||
**[[/Wire Bonder|TPT Wire Bonder]] | **[[/Wire Bonder|TPT Wire Bonder]] | ||
**[[/Wire Bonder#Ball Wire Bonder K&S 4524|Ball Wire Bonder]] | **[[/Wire Bonder#Ball Wire Bonder K&S 4524|Ball Wire Bonder]] | ||
*Wafer | <br> | ||
*Wafer Dicing and Machining | |||
**[[/Polisher CMP|Polisher CMP - located in the cleanroom]] | **[[/Polisher CMP|Polisher CMP - located in the cleanroom]] | ||
**[[/Polishing machine|Polisher/Lapper machine]] | **[[/Polishing machine|Polisher/Lapper machine]] | ||
**[[/LatticeAxe|LatticeAxe]] | **[[/LatticeAxe|LatticeAxe]] | ||
**[[/FlipScribe|FlipScribe]] | **[[/FlipScribe|FlipScribe]] | ||
**[[/FlexScribe|FlexScribe]] | **[[/FlexScribe|FlexScribe]] | ||
** | **Wafer Scriber | ||
**[[/Disco Saw|Dicing Saw Disco DAD 321 (old saw)]] | **[[/Disco Saw|Dicing Saw Disco DAD 321 (old saw)]] | ||
**[[/Disco Saw|Dicing Saw Disco DAD 3241 (new saw 2021)]] | **[[/Disco Saw|Dicing Saw Disco DAD 3241 (new saw 2021)]] | ||
**[[/Disco Saw|Wafer cleaner DCS 1441 (post dicing)]] | **[[/Disco Saw|Wafer cleaner DCS 1441 (post dicing)]] | ||
**[[/Laser Micromachining Tool|Laser Micromachining Tool]] | **[[/Laser Micromachining Tool|Laser Micromachining Tool]] | ||
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**[[/ | *Pick & place | ||
**[[/Micro transfer printer|Micro transfer printer]] | |||
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* X-ray inspection system | * X-ray inspection system | ||
**[[/Focal Spot X-ray system|X-ray Focal Spot inspection system]] | **[[/Focal Spot X-ray system|X-ray Focal Spot inspection system]] | ||
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== Choose processing method == | == Choose processing method == | ||
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*[[/Polishing machine|Polisher/Lapper machine]] | *[[/Polishing machine|Polisher/Lapper machine]] | ||
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* | *Diamond Pen (Wafer Scriber) | ||
*[[/LatticeAxe|LatticeAxe]] | *[[/LatticeAxe|LatticeAxe]] | ||
*[[/FlipScribe|FlipScribe]] | *[[/FlipScribe|FlipScribe]] | ||