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In 2010 DTU Nanolab acquired DRIE-Pegasus 1 (at the time called Danchip and DRIE-Pegasus, respectively). As a state-of-the-art etch tool with excellent performance and great flexibility, it grew immensely popular and by 2015 it was apparent that we needed yet another tool to cope with the demand. Therefore, in 2016 Pegasus 2 was acquired from a closed-down lab and installed next to Pegasus 1.
In 2010 DTU Nanolab acquired DRIE-Pegasus 1. As a state-of-the-art etch tool with excellent performance and great flexibility, it grew immensely popular and by 2015 it was apparent that we needed yet another tool to cope with the demand. Therefore, in 2016 Pegasus 2 was acquired from a closed-down lab and installed next to Pegasus 1.


Looking to expand our dry etching capabilities in 2017 we got an irresistible offer on a twin Pegasus system with cassette to cassette vacuum robot from a commercial fab. The twin Pegasus system (called Pegasus 3 and 4) is installed at the old cluster 2 location in cleanroom C1 and will run only 6" wafers. Pegasus 3 is the 6" silicon etch work horse and Pegasus 4 is converted (adding extra process gases) into a 6" dielectric etch tool that will supplement/replace the AOE.  
Looking to expand our dry etching capabilities in 2017 we got an irresistible offer on a twin Pegasus system with cassette to cassette vacuum robot from a commercial fab. The twin Pegasus system (called Pegasus 3 and 4) is installed at the old cluster 2 location in cleanroom C1 and will run only 6" wafers. Pegasus 3 is the 6" silicon etch work horse and Pegasus 4 is converted (adding extra process gases) into a 6" dielectric etch tool that will supplement/replace the AOE.  
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{|
{|
|width="100"| [[file:DRIE-Pegasus.jpg |200px|frameless]]
|width="100"| [[file:DRIE-Pegasus.jpg |100px|frameless]]
| width="200"| [[file:Pegasus 2 operator.jpg |408px|frameless]]
| width="200"| [[file:Pegasus 2 operator.jpg |204px|frameless]]
| width="275"|[[file:Peg3and4 front 2.JPG |584px|frameless]]
| width="275"|[[file:Peg3and4 front 2.JPG |292px|frameless]]
|-
| align="center" | The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1. {{photo1}}
| align="center" | The DRIE-Pegasus 2 operator station and load lock in the DTU Nanolab cleanroom A-1. {{photo1}}
| align="center" | The DRIE-Pegasus3 and DRIE-Pegasus4 operator station and cassette loading stations. {{photo1}}
|-
|}
 
{|
|width="200"| [[file:DRIE-Pegasus.jpg |200px|frameless]]
| width="400"| [[file:Pegasus 2 operator.jpg |408px|frameless]]
| width="550"|[[file:Peg3and4 front 2.JPG |584px|frameless]]
|-  
|-  
| align="center" | The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1. {{photo1}}
| align="center" | The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1. {{photo1}}
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