Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions
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* Metals including alloys and magnetic materials | * Metals including alloys and magnetic materials | ||
* Dielectrica including silica and alumina. | * Dielectrica including silica and alumina. | ||
* | * Semiconductors including silicon | ||
* See tables above and ask staff if there is a material you would like to deposit which you do not see listed. | * See tables above and ask staff if there is a material you would like to deposit which you do not see listed. | ||
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==Maximum Power Calculation== | |||
* <math>PD</math> - Power density (fundamental constant given by a supplier) | |||
* <math>P(W)</math> - Power (W) from power supply | |||
* <math>A(inch^2)</math> - Area of the target | |||
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<math> PD=\frac{P(W)}{A(inch^2)}</math> ⇒ <math>P(W)=PD\cdot A(inch^2)=PD\cdot\frac{\pi d^2}{4}</math> | |||
<ul> | |||
<li><p> <b><span style="color: green">d=2" (2-inch target)</span></b> <math>P(W)=3.14\cdot PD</math> </p></li> | |||
<li><p> <b><span style="color: green">d=3" (3-inch target)</span></b> <math>P(W)=7.065\cdot PD</math> </p></li> | |||
<li><p> <b><span style="color: green">d=4" (4-inch target)</span></b> <math>P(W)=12.56\cdot PD</math> </p></li> | |||
<li><p> <b><span style="color: green">d=6" (6-inch target)</span></b> <math>P(W)=28.26\cdot PD</math> </p></li> | |||
</ul> | |||
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Value of the <math>PD</math> is material dependent and can be found on KJLC homepage | |||