Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions
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'''All links to Kemibrug (SDS) and Labmanager Including APV requires login. | '''All links to Kemibrug (SDS) and Labmanager Including APV requires login. | ||
'''All measurements on this page has been made by Nanolab staff. | '''All measurements on this page has been made by Nanolab staff. | ||
[[Category: Equipment|Etch Wet Aluminium Etch]] | [[Category: Equipment|Etch Wet Aluminium Etch]] | ||
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The first solution is always available ready made in the Aluminium Etch bath. The second solution can be mixed manually or bought pre-mixed and ready for use. Please contact DTU Nanolab if you need to use the Aluminum etch 80-15-3-2 etch mixture. Since it is used only very rarely it will probably have to be ordered when needed. The table below summarizes possibilities and parameter for the two etch mixtures. | The first solution is always available ready made in the Aluminium Etch bath. The second solution can be mixed manually or bought pre-mixed and ready for use. Please contact DTU Nanolab if you need to use the Aluminum etch 80-15-3-2 etch mixture. Since it is used only very rarely it will probably have to be ordered when needed. The table below summarizes possibilities and parameter for the two etch mixtures. | ||
contact Wetchem if change off bath or want to use it in a beaker. | |||
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!Location | !Location | ||
|Bath inside Wet Bench 05 in D-3 | |Bath inside Wet Bench 05 in D-3 | ||
| | |Bath inside Wet Bench 05 in D-3 | ||
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|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!Batch size | !Batch size | ||
|1-25 wafers at a time | |||
|1-25 wafers at a time | |1-25 wafers at a time | ||
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|4" wafers | |4" wafers | ||
6" wafers | 6" wafers | ||
| | |4" wafers | ||
6" wafers | |||
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See the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=381 Cross Contamination Sheet] for Aluminium Etch bath | See the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=381 Cross Contamination Sheet] for Aluminium Etch bath | ||
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See the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=381 Cross Contamination Sheet] for Aluminium Etch bath | |||
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