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__TOC__
__TOC__


=Micro Transfer Printer=
=Micro Transfer Printer=


[[Image:DUV_wafers.jpg|500px|frameless|right|]]
Micro transfer printing is an emerging technique to transfer diverse and non-native components from source substrate to target substrate. Micro transfer printing is best for achieving heterogeneous integration,
 
where micro-components from different sources are picked up by polymer stamp and precisely assembled onto different target substrate such as glass, plastic, ceramic and silicon. This method is known for
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increasing functionality and improving efficiency.
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Micro transfer printer 1003 from Xdisplay was installed in year 2022 and placed in cleanroom F-4.
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<!--
Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=503 Lab Manager] - '''requires login'''
'''[https://www.youtube.com/playlist?list=PLjWVU97LayHAiCabstMfAUeeWyQoQI_cV Training videos]'''
-->


Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=503 LabManager] - '''requires login'''
[[Image:Equipment.jpg|500x500px|thumb|The Micro transfer printer is placed in F-4]]


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[[Image:MTP image.jpg|1000px|thumb|left|Steps involved in pick and print]]
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==Equipment performance and process related parameters==
==Equipment performance and process related parameters==
{|border="1" cellspacing="1" cellpadding="10" style="text-align:left;"  
{|border="1" cellspacing="1" cellpadding="10" style="text-align:left;"  


!style="background:silver; color:black;" width="60"|Purpose
|style="background:WhiteSmoke; color:black" colspan="2"|
Pick and Print


!style="background:silver; color:black;" align="center" width="60"|Purpose
|style="background:LightGrey; color:black"|
|style="background:WhiteSmoke; color:black" colspan="2"|UV exposure
|-
|-
!style="background:silver; color:black;" width="60"|Material handling configuration
|style="background:WhiteSmoke; color:black" colspan="2"|
Manual


!style="background:silver; color:black" align="left" rowspan="5"|Performance
|style="background:LightGrey; color:black"|Exposure mode
|style="background:WhiteSmoke; color:black" colspan="2"|
*Flood exposure
*Proximity exposure with mask possible for 4inch substrate
*Inclined exposure
*Rotating exposure
|-
|-
| style="background:LightGrey; color:black"|Exposure light/filters
!style="background:silver; color:black;" width="60"|Stage max. travel time (X x Y mm)
|style="background:WhiteSmoke; color:black" colspan="2"|
|style="background:WhiteSmoke; color:black" colspan="2"|
* Near UV(350-450nm)
300 x 300
* Mid UV (260-320nm)
* Deep UV(220-260nm)


|-
|-
|style="background:LightGrey; color:black"|Minimum structure size
!style="background:silver; color:black;" width="60" |Source size (mm)
|style="background:WhiteSmoke; color:black" colspan="2"|
|style="background:WhiteSmoke; color:black" colspan="2"|
upto 150


|-
|-
|style="background:LightGrey; color:black"|Mask size
!style="background:silver; color:black;" width="60"|Target size (mm)
|style="background:WhiteSmoke; color:black" colspan="2"|
|style="background:WhiteSmoke; color:black" colspan="2"|
5x5inch optinal
upto 150
 
|-
|-
|style="background:LightGrey; color:black"|Alignment modes
!style="background:silver; color:black;" width="60"|Alignment accuracy (single post stamp)
|style="background:WhiteSmoke; color:black" colspan="2"|
|style="background:WhiteSmoke; color:black" colspan="2"|
No alignment possible
<0.5um


|-
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
!style="background:silver; color:black" align="left" rowspan="3"|Allowed material
|style="background:LightGrey; color:black"|Substrate size
|style="background:WhiteSmoke; color:black" colspan="2"|
Up to 8inch substrates, different shapes
|-
| style="background:LightGrey; color:black"|Allowed materials
|style="background:WhiteSmoke; color:black" colspan="2"|
|style="background:WhiteSmoke; color:black" colspan="2"|
All cleanroom materials
All cleanroom materials
|-
 
|style="background:LightGrey; color:black"|Batch
|style="background:WhiteSmoke; color:black" colspan="2"|
1
|-  
|-  
|}
|}


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