Specific Process Knowledge/Back-end processing/Micro transfer printer: Difference between revisions
No edit summary |
|||
(20 intermediate revisions by 2 users not shown) | |||
Line 4: | Line 4: | ||
[[Category: Equipment|Backend]] | [[Category: Equipment|Backend]] | ||
[[Category: | [[Category: Backend]] | ||
__TOC__ | |||
=Micro Transfer Printer= | |||
Micro transfer printing is an emerging technique to transfer diverse and non-native components from source substrate to target substrate. Micro transfer printing is best for achieving heterogeneous integration, | |||
where micro-components from different sources are picked up by polymer stamp and precisely assembled onto different target substrate such as glass, plastic, ceramic and silicon. This method is known for | |||
increasing functionality and improving efficiency. | |||
Micro transfer printer 1003 from Xdisplay was installed in year 2022 and placed in cleanroom F-4. | |||
Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=503 Lab Manager] - '''requires login''' | |||
[[Image:Equipment.jpg|500x500px|thumb|The Micro transfer printer is placed in F-4]] | |||
[[Image:MTP image.jpg|1000px|thumb|left|Steps involved in pick and print]] | |||
<br clear="all" /> | |||
==Equipment performance and process related parameters== | |||
{|border="1" cellspacing="1" cellpadding="10" style="text-align:left;" | |||
!style="background:silver; color:black;" width="60"|Purpose | |||
|style="background:WhiteSmoke; color:black" colspan="2"| | |||
Pick and Print | |||
= | |- | ||
!style="background:silver; color:black;" width="60"|Material handling configuration | |||
|style="background:WhiteSmoke; color:black" colspan="2"| | |||
Manual | |||
|- | |||
!style="background:silver; color:black;" width="60"|Stage max. travel time (X x Y mm) | |||
|style="background:WhiteSmoke; color:black" colspan="2"| | |||
300 x 300 | |||
|- | |||
!style="background:silver; color:black;" width="60" |Source size (mm) | |||
|style="background:WhiteSmoke; color:black" colspan="2"| | |||
upto 150 | |||
|- | |||
!style="background:silver; color:black;" width="60"|Target size (mm) | |||
|style="background:WhiteSmoke; color:black" colspan="2"| | |||
upto 150 | |||
|- | |||
!style="background:silver; color:black;" width="60"|Alignment accuracy (single post stamp) | |||
|style="background:WhiteSmoke; color:black" colspan="2"| | |||
<0.5um | |||
|- | |||
!style="background:silver; color:black" align="left" rowspan="3"|Allowed material | |||
|style="background:WhiteSmoke; color:black" colspan="2"| | |||
All cleanroom materials | |||
|- | |||
|} | |||
= | <br clear="all" /> |
Latest revision as of 11:46, 8 September 2023
The contents on this page, including all images and pictures, was created by DTU Nanolab staff unless otherwise stated.
Feedback to this page: click here
Micro Transfer Printer
Micro transfer printing is an emerging technique to transfer diverse and non-native components from source substrate to target substrate. Micro transfer printing is best for achieving heterogeneous integration, where micro-components from different sources are picked up by polymer stamp and precisely assembled onto different target substrate such as glass, plastic, ceramic and silicon. This method is known for increasing functionality and improving efficiency.
Micro transfer printer 1003 from Xdisplay was installed in year 2022 and placed in cleanroom F-4.
Equipment info in Lab Manager - requires login
Purpose |
Pick and Print | |
---|---|---|
Material handling configuration |
Manual | |
Stage max. travel time (X x Y mm) |
300 x 300 | |
Source size (mm) |
upto 150 | |
Target size (mm) |
upto 150 | |
Alignment accuracy (single post stamp) |
<0.5um | |
Allowed material |
All cleanroom materials
|