Specific Process Knowledge/Back-end processing/Micro transfer printer: Difference between revisions

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 [[Category: Equipment|Backend]]
-[[Category: Bckend]]
+[[Category: Backend]]
+__TOC__
+=Micro Transfer Printer=
+Micro transfer printing is an emerging technique to transfer diverse and non-native components from source substrate to target substrate. Micro transfer printing is best for achieving heterogeneous integration,
+where micro-components from different sources are picked up by polymer stamp and precisely assembled onto different target substrate such as glass, plastic, ceramic and silicon. This method is known for
+increasing functionality and improving efficiency.
-__TOC__
+Micro transfer printer 1003 from Xdisplay was installed in year 2022 and placed in cleanroom F-4.
+Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=503 Lab Manager] - '''requires login'''
+[[Image:Equipment.jpg|500x500px|thumb|The Micro transfer printer is placed in F-4]]
+[[Image:MTP image.jpg|1000px|thumb|left|Steps involved in pick and print]]
+<br clear="all" />
+==Equipment performance and process related parameters==
+{|border="1" cellspacing="1" cellpadding="10" style="text-align:left;"
+!style="background:silver; color:black;" width="60"|Purpose
+|style="background:WhiteSmoke; color:black" colspan="2"|
+Pick and Print
-=Stylus Profiler: Dektak150=
+|-
+!style="background:silver; color:black;" width="60"|Material handling configuration
+|style="background:WhiteSmoke; color:black" colspan="2"|
+Manual
-[[Image:DUV_wafers.jpg|500px|frameless|right|]]
+|-
+!style="background:silver; color:black;" width="60"|Stage max. travel time (X x Y mm)
+|style="background:WhiteSmoke; color:black" colspan="2"|
+x 300
-TextTextTextTextTextText
+|-
-TextTextText
+!style="background:silver; color:black;" width="60" |Source size (mm)
+|style="background:WhiteSmoke; color:black" colspan="2"|
+upto 150
-TextTextTextTextText
+|-
-TextTextText
+!style="background:silver; color:black;" width="60"|Target size (mm)
+|style="background:WhiteSmoke; color:black" colspan="2"|
+upto 150
+|-
+!style="background:silver; color:black;" width="60"|Alignment accuracy (single post stamp)
+|style="background:WhiteSmoke; color:black" colspan="2"|
+<0.5um
-'''The user manual, technical information and contact information can be found in LabManager:'''
+|-
-[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=457  Stylus profiler:Dektak150 in LabManager]
+!style="background:silver; color:black" align="left" rowspan="3"|Allowed material
+|style="background:WhiteSmoke; color:black" colspan="2"|
+All cleanroom materials
-TextTextTextTextTextText
-TextText
+|-
+|}
-==Equipment performance and process related parameters==
+<br clear="all" />