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| | {{cc-nanolab}} |
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| '''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Sputter_coater click here]''' | | '''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Sputter_coater click here]''' |
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| <i> Unless otherwise stated, this page is written by <b>DTU Nanolab internal</b></i>
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| [[Category: Equipment|Thin film]] | | [[Category: Equipment|Thin film]] |
| [[Category: Thin Film Deposition]] | | [[Category: Thin Film Deposition]] |
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| <!-- = The Hummer Sputter coater =
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| [[image:Hummer.jpg|300x300px|right|thumb|The Hummer sputter coater located in service area Cx1]]
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| The Hummer sputter coater is used to sputter a thin gold layer on different small samples (up to 100 mm wafers).
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| One of the most effective ways to counter the problems with charging on non-conducting samples during SEM investigations is to apply a conducting coating to the surface. The Hummer sputter coater is an instrument that allows you to coat small samples with a gold layer. When securely grounded, i.e. connected electrically with a sample holder using aluminium tape or clamps the gold layer will effectively eliminate all charging problems in the SEM.
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| The Hummer sputter coater is located in servie area Cx1 in the clearoom.
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| '''The user manual and contact information can be found in LabManager:'''
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| [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=143 Hummer sputter coater]
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| ==Process knowledge==
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| *[[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Gold|Deposition of gold]]
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| ==Overview of the performance of the Hummer sputter coater and some process related parameters==
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| {| border="2" cellspacing="0" cellpadding="10"
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| !style="background:silver; color:black;" align="left"|Purpose
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| |style="background:LightGrey; color:black"| ||style="background:WhiteSmoke; color:black"|
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| *Gold sputter coating of different samples mainly before SEM characterization (see purpose)
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| |-
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| !style="background:silver; color:black" align="left" valign="top" rowspan="2"|Performance
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| |style="background:LightGrey; color:black"|Film thickness||style="background:WhiteSmoke; color:black"|
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| *10 Å - ?
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| |-
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| |style="background:LightGrey; color:black"|Deposition rate
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| |style="background:WhiteSmoke; color:black"|
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| *Not measured
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| |-
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| !style="background:silver; color:black" align="left" valign="top" rowspan="2"|Process parameter range
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| |style="background:LightGrey; color:black"|Process Temperature
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| |style="background:WhiteSmoke; color:black"|
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| *Room temperature
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| |style="background:LightGrey; color:black"|Process pressure
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| |style="background:WhiteSmoke; color:black"|
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| *150 mTorr
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| !style="background:silver; color:black" align="left" valign="top" rowspan="3"|Substrates
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| |style="background:LightGrey; color:black"|Batch size
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| |style="background:WhiteSmoke; color:black"|
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| *One 100 mm wafer
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| *Several smaller samples
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| |-
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| | style="background:LightGrey; color:black"|Allowed materials
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| |style="background:WhiteSmoke; color:black"|
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| *All materials allowed in the cleanroom
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| |-
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| |-
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| |}
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| = The Balzer Sputter coater =
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| [[image:20140117_145654.jpg|300x300px|right|thumb|The Hummer sputter located coater in the 346 basement]]
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| The Balzer sputter coater is used to sputter a thin gold layer on different small samples (smaller than 100 mm wafers).
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| One of the most effective ways to counter the problems with charging on non-conducting samples during SEM investigations is to apply a conducting coating to the surface. The Hummer sputter coater is an instrument that allows you to coat small samples with a gold layer. When securely grounded, i.e. connected electrically with a sample holder using aluminium tape or clamps the gold layer will effectively eliminate all charging problems in the SEM.
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| The Balzer sputter coater is located in the 346 basement, room 907 (next to the SEM Jeol) .
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| '''The user manual and contact information can be found in LabManager:'''
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| [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=303 Balzer sputter coater]
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| ==Process knowledge==
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| *[[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Gold|Deposition of gold]]
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| ==Overview of the performance of the Hummer sputter coater and some process related parameters==
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| {| border="2" cellspacing="0" cellpadding="10"
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| |-
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| !style="background:silver; color:black;" align="left"|Purpose
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| |style="background:LightGrey; color:black"| ||style="background:WhiteSmoke; color:black"|
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| *Gold sputter coating of different samples mainly before SEM characterization (see purpose)
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| |-
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| !style="background:silver; color:black" align="left" valign="top" rowspan="2"|Performance
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| |style="background:LightGrey; color:black"|Film thickness||style="background:WhiteSmoke; color:black"|
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| *10 Å - > 25 nm
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| |-
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| |style="background:LightGrey; color:black"|Deposition rate
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| |style="background:WhiteSmoke; color:black"|
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| *Not measured
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| |-
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| !style="background:silver; color:black" align="left" valign="top" rowspan="2"|Process parameter range
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| |style="background:LightGrey; color:black"|Process Temperature
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| |style="background:WhiteSmoke; color:black"|
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| *Room temperature
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| |style="background:LightGrey; color:black"|Process pressure
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| |style="background:WhiteSmoke; color:black"|
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| *5*10<sup> -2</sup> mbar
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| |-
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| !style="background:silver; color:black" align="left" valign="top" rowspan="3"|Substrates
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| |style="background:LightGrey; color:black"|Batch size
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| |style="background:WhiteSmoke; color:black"|
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| *One sample smaller than a 100 mm wafer
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| *Several smaller samples
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| |-
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| | style="background:LightGrey; color:black"|Allowed materials
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| |style="background:WhiteSmoke; color:black"|
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| *All materials allowed in the cleanroom
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| *Samples from outside the cleanroom, including biological samples
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| |-
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| |-
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| |}
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| -->
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| = The Sputter coater 03 (Cressington) = | | = The Sputter coater 03 (Cressington) = |
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| |} | | |} |
| | | <br> |
| | <br> |
| = The Sputter coater 04 (Agar Scientific) = | | = The Sputter coater 04 (Agar Scientific) = |
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