LabAdviser/314/Microscopy 314-307/FIB/Hydra

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This section is written by DTU Nanolab internal if nothing else is stated.

Helios 5 Hydra UX DualBeam

The Helios 5 Hydra UX DualBeam consists of two independent charged particle sources: 1- electrons, 2- plasma ions (choose from Xe, Ar, O or N). FEG-SEM with versatile characterization capabilities. At the time being, this microscope SEM provides highest resolution among all operational SEMs at DTU Nanolab, when operated for high resolution imaging (i.e. using low kV , in-lens detector, and in immersion mode). This microscope is equipped with the following detectors: ETD (secondary electrons), ABS/CBS (backscatter electrons), ICE (secondary ions and electrons) etc. The plasma focused ion beam (PFIB) with inductively coupled plasma source supporting four ion species (Xe, Ar, O, N) provides the possibility of characterization of microstructures by imaging and serial sectioning via sputtering. The microscope is equipped with a nano manipulator for high quality TEM sample preparation and can with the AutoTEM software do automated lift-out procedures with high precision. The combination of PFIB sputtering capabilities, and 2-dimentional imaging facilitates 3-dimentional imaging. With the Maps software, it is possible to make automated mapping of large areas for a higher resolution of the image.

Reading Materials

Focused Ion Beam (FIB) File:FIB-Lecture_2011 By Alice.pdf

Gas Injection System (GIS) File:GIS_summary2013 by Alice.pdf

Technical Notes

Resolution

• Electron beam:
  • At optimum WD: 0.7 nm at 1 kV • 1.0 nm at 500 V (ICD)
  • At coincident point: 0.6 nm at 15 kV • 1.2 nm at 1 kV

• Xe Ion beam resolution at coincident point:
  • <20 nm at 30 kV using preferred statistical method
  • <10 nm at 30 kV using selective edge method

Attachments

- PFIB column with unique inductively coupled plasma (ICP) source supporting four ion species with fast switching capability. Ion species available: Xe, Ar, O, N

- MultiChem Gas Injection System (GIS) (for W, Pt and C both E and I beams.)

- Thermo Scientific EasyLift™ NanoManipulator for precise in situ sample manipulation

- Everhart-Thornley detector (ETD)

- Charged particle detector (ICE) near the end of the ion column for detection of secondary ions (SI) and electrons (SE)

- In-chamber Nav-Cam Sample Navigation Camera

- Integrated plasma cleaner

- In-lens SE/BSE detector (TLD-SE, TLD-BSE)

- In-column SE/BSE detector (ICD)

- Retractable low-voltage Directional Backscattered Detector (DBS), including Angular Backscattered Detector (ABS) and Concentric Backscattered Detector (CBS)

- STEM 3+ detector

To find the basic instructions for operating the instrument, the reader is referred to the labmanager manual.

Important Notes

• Do NOT adjust the Nitrogen regulator!!!
• Always open and close the chamber GENTLY whilst viewing the live CCD image.
• Only home the stage with open door or if in vacuum only with holders that you are 100% sure it is safe to do so.
• Make sure you delete all saved positions before finishing your microscope section.
• When moving between saved positions, BE CAREFUL! If you are unsure move the Z height to the lowest point and lock it so as not to collide with the pole piece. Enable safe stage movement.
• Use the logbook
• NEVER work without a valid link between the Z and the FWD
• Always use GLOVES. Only vacuum-ready samples and holders are allowed inside the chamber.
• DO NOT install ANY software on either the microscope or support PC,.
• Transfer your files at the end of each session. We will be deleting files from the support computer without notice.

Who may operate Helios 5 Hydra UX DualBeam

The rules of who may operate the Helios 5 Hydra UX DualBeam and to what extent they may operate it are:

• Only users who have been trained and approved by DTU Nanolab personnel may operate the instrument. Irregardless of their prior experience any new user with no official DTU Nanolab training or approval cannot operate the instrument, not even under close supervision by experienced users.

• Users may only use the instrument to the extent they have been trained. This means that one should not try to operate the following options/capabilities without explicit training:
  • NanoManipulator (EasyLift needle)
  • Plasma cleaner
  • STEM3+ detector
  • ABS/CBS

Tips

Support PC can be accessed from the microscope PC using the remote desktop app (See Windows taskbar). Alternatively switch input on the left monitor. HDMI is support PC. DP is microscope PC.