Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM: Difference between revisions

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|%PlatenDepLoad=41          |%PlatenDepTune=60          |%PlatenEtchLoad=41                |%PlatenEtchTune=60
|%PlatenDepLoad=41          |%PlatenDepTune=60          |%PlatenEtchLoad=41                |%PlatenEtchTune=60
|Temperature=0
|Temperature=0
|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE/Pegasus-3/DREM/DREM 0.5kW v2.3 | '''10+''']]
|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM/DREM 0.5kW v2.3 | '''10+''']]        
                
}}
|}
 
 
 
 
 
= DREM 0.2kW =
 
{{Template:Peg1RecipeTableVerCColors
|TableHeader=DREM 0.2 kW v2
}}
{{Template:Peg1RecipeTableVerCAddrowColors
|RecipeName=DREM 0.2kW
|PriorProcessSteps=  Clamp Substrate,Pump to base, home platen matching unit, barc1, stab
|Keywords=
|PlatenPosition=U          |PlatenFrequency=HF          |StabilisationTime=          |StartCycleEndCycle=D/E
|DepositionTime=2.8        |EtchTime=2.6               |NumberOfCycles=
|PressureDepDelay=          |PressureDepBoost=          |PressureDepMain=100%
|PressureEtchDelay=        |PressureEtchBoost=          |PressureEtchMain=100%
|C4F8DepDelay=0.3@5        |C4F8DepBoost= 0.5@15        |C4F8DepMain=25
|C4F8EtchDelay=0.3@25      |C4F8EtchBoost=              |C4F8EtchMain=5
|SF6DepDelay=0.3@15        |SF6DepBoost=0.5@10          |SF6DepMain=10
|SF6EtchDelay=1.9@10        |SF6EtchBoost=0.5@20        |SF6EtchMain=20
|O2Dep=                    |O2Etch=                    |ArDep=60                        |ArEtch=60
|WCoilDep=0.25              |WCoilEtch=0.25              |WPlatenDep=1
|WPlatenEtchDelay=0.9@1    |WPlatenEtchBoost=1@20      |WPlatenEtchMain=1
|%CoilDepLoad=40            |%CoilDepTune=50            |%CoilEtchLoad=40                  |%CoilEtchTune=50
|%PlatenDepLoad=38.2        |%PlatenDepTune=53.8        |%PlatenEtchLoad=38.2              |%PlatenEtchTune=53.8
|Temperature=0
|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM0.2kW | '''1''']]
|Link2RecipeRun=[[Main Page/Process Logs/jmli/Pegasus3/DREM/DREM 0.2kW newMFC | '''9''']]
}}
}}
|}
|}
[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM/DREM 0.5kW v2.3 | '''10+''']]

Latest revision as of 08:46, 24 January 2022



The DREM 0.5kW v2.3 recipe is in the standard recipe folder.

DREM 0.5 kW recipes
Recipe General Pressure Gases Generators Matching Tem- pera- ture Results
C4F8 SF6 Ar Coil Platen Coil Platen
Platen Stb S/E Dp Et Cyc Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Runs Keywords
U/D H/L D B M D B M D B M D B M D B M D B M D B M L T L T L T L T
DREM 0.5kW v2.3 Clamp Substrate,Pump to base, home platen matching unit, barc1, stab 10+
U HF D/E 3 2.5 100% 100% 0.3@5 0.5@10 45 0.3@25 5 0.3@20 0.5@10 10 1.9@20 0.5@30 30 75 1.5@75,75 0.5 0.5 1 0.9@1 1@40 1 45 50 45 50 41 60 41 60 0



DREM 0.2kW

DREM 0.2 kW v2
Recipe General Pressure Gases Generators Matching Tem- pera- ture Results
C4F8 SF6 Ar Coil Platen Coil Platen
Platen Stb S/E Dp Et Cyc Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Runs Keywords
U/D H/L D B M D B M D B M D B M D B M D B M D B M L T L T L T L T
DREM 0.2kW Clamp Substrate,Pump to base, home platen matching unit, barc1, stab 9
U HF D/E 2.8 2.6 100% 100% 0.3@5 0.5@15 25 0.3@25 5 0.3@15 0.5@10 10 1.9@10 0.5@20 20 60 60 0.25 0.25 1 0.9@1 1@20 1 40 50 40 50 38.2 53.8 38.2 53.8 0
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