Specific Process Knowledge/Characterization/XPS/ISS: Difference between revisions
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== Ion Scattering Spectroscopy on XPS Nexsa == | == Ion Scattering Spectroscopy on XPS Nexsa == | ||
Latest revision as of 11:38, 28 June 2023
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Unless otherwise stated, the content of this page was created by the dry etch group at DTU Nanolab
Ion Scattering Spectroscopy on XPS Nexsa
This page is intended to have a lot of material on the applications of ISS. So far, however, we have only very limited experience in using this. Therefore, until we have something to present here you are referred to the comparison page. There, you will find a table with articles and application notes on all the options available on the XPS Nexsa. Please note that Ion Scattering Spectroscopy is also referred to as LEIS.