Specific Process Knowledge/Characterization/XPS/ISS: Difference between revisions
No edit summary |
No edit summary |
||
| (4 intermediate revisions by the same user not shown) | |||
| Line 1: | Line 1: | ||
'''Feedback to this page: | |||
[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/XPS/ISS click here]''' | |||
<!--Checked for updates on 28/6-2023 - ok/jmli --> | |||
{{contentbydryetch}} | |||
== Ion Scattering Spectroscopy on XPS Nexsa == | == Ion Scattering Spectroscopy on XPS Nexsa == | ||
This page is intended to have a lot of material on the applications of ISS. So far, however, we have only very limited experience in using this. Therefore, until we have something to present here you are referred to the [[Specific Process Knowledge/Characterization/XPS/NexsaOverview|comparison page]]. There, you will find a table with articles and application notes on all the options available on the XPS Nexsa. Please note that Ion Scattering Spectroscopy is also referred to as [https://en.wikipedia.org/wiki/Low-energy_ion_scattering LEIS]. | This page is intended to have a lot of material on the applications of ISS. So far, however, we have only very limited experience in using this. Therefore, until we have something to present here you are referred to the [[Specific Process Knowledge/Characterization/XPS/NexsaOverview|comparison page]]. There, you will find a table with articles and application notes on all the options available on the XPS Nexsa. Please note that Ion Scattering Spectroscopy is also referred to as [https://en.wikipedia.org/wiki/Low-energy_ion_scattering LEIS]. | ||
* [[Specific Process Knowledge/Characterization/XPS/ISS/Notes| Notes on ISS | |||
]] | |||
Latest revision as of 11:38, 28 June 2023
Feedback to this page: click here
Unless otherwise stated, the content of this page was created by the dry etch group at DTU Nanolab
Ion Scattering Spectroscopy on XPS Nexsa
This page is intended to have a lot of material on the applications of ISS. So far, however, we have only very limited experience in using this. Therefore, until we have something to present here you are referred to the comparison page. There, you will find a table with articles and application notes on all the options available on the XPS Nexsa. Please note that Ion Scattering Spectroscopy is also referred to as LEIS.