|
|
| (6 intermediate revisions by 3 users not shown) |
| Line 1: |
Line 1: |
| | {{cc-nanolab}} |
|
| |
|
| '''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Sputter_coater click here]''' | | '''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Sputter_coater click here]''' |
| | |
|
| |
|
| [[Category: Equipment|Thin film]] | | [[Category: Equipment|Thin film]] |
| [[Category: Thin Film Deposition]] | | [[Category: Thin Film Deposition]] |
|
| |
|
|
| |
| <!-- = The Hummer Sputter coater =
| |
|
| |
| [[image:Hummer.jpg|300x300px|right|thumb|The Hummer sputter coater located in service area Cx1]]
| |
|
| |
| The Hummer sputter coater is used to sputter a thin gold layer on different small samples (up to 100 mm wafers).
| |
|
| |
| One of the most effective ways to counter the problems with charging on non-conducting samples during SEM investigations is to apply a conducting coating to the surface. The Hummer sputter coater is an instrument that allows you to coat small samples with a gold layer. When securely grounded, i.e. connected electrically with a sample holder using aluminium tape or clamps the gold layer will effectively eliminate all charging problems in the SEM.
| |
|
| |
| The Hummer sputter coater is located in servie area Cx1 in the clearoom.
| |
|
| |
| '''The user manual and contact information can be found in LabManager:'''
| |
|
| |
| [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=143 Hummer sputter coater]
| |
|
| |
| ==Process knowledge==
| |
| *[[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Gold|Deposition of gold]]
| |
|
| |
| ==Overview of the performance of the Hummer sputter coater and some process related parameters==
| |
|
| |
| {| border="2" cellspacing="0" cellpadding="10"
| |
| |-
| |
| !style="background:silver; color:black;" align="left"|Purpose
| |
| |style="background:LightGrey; color:black"| ||style="background:WhiteSmoke; color:black"|
| |
| *Gold sputter coating of different samples mainly before SEM characterization (see purpose)
| |
| |-
| |
| !style="background:silver; color:black" align="left" valign="top" rowspan="2"|Performance
| |
| |style="background:LightGrey; color:black"|Film thickness||style="background:WhiteSmoke; color:black"|
| |
| *10 Å - ?
| |
| |-
| |
| |style="background:LightGrey; color:black"|Deposition rate
| |
| |style="background:WhiteSmoke; color:black"|
| |
| *Not measured
| |
| |-
| |
| !style="background:silver; color:black" align="left" valign="top" rowspan="2"|Process parameter range
| |
| |style="background:LightGrey; color:black"|Process Temperature
| |
| |style="background:WhiteSmoke; color:black"|
| |
| *Room temperature
| |
| |-
| |
| |style="background:LightGrey; color:black"|Process pressure
| |
| |style="background:WhiteSmoke; color:black"|
| |
| *150 mTorr
| |
| |-
| |
| !style="background:silver; color:black" align="left" valign="top" rowspan="3"|Substrates
| |
| |style="background:LightGrey; color:black"|Batch size
| |
| |style="background:WhiteSmoke; color:black"|
| |
| *One 100 mm wafer
| |
| *Several smaller samples
| |
| |-
| |
| | style="background:LightGrey; color:black"|Allowed materials
| |
| |style="background:WhiteSmoke; color:black"|
| |
| *All materials allowed in the cleanroom
| |
| |-
| |
| |-
| |
| |}
| |
|
| |
|
| |
| = The Balzer Sputter coater =
| |
|
| |
| [[image:20140117_145654.jpg|300x300px|right|thumb|The Hummer sputter located coater in the 346 basement]]
| |
|
| |
| The Balzer sputter coater is used to sputter a thin gold layer on different small samples (smaller than 100 mm wafers).
| |
|
| |
| One of the most effective ways to counter the problems with charging on non-conducting samples during SEM investigations is to apply a conducting coating to the surface. The Hummer sputter coater is an instrument that allows you to coat small samples with a gold layer. When securely grounded, i.e. connected electrically with a sample holder using aluminium tape or clamps the gold layer will effectively eliminate all charging problems in the SEM.
| |
|
| |
| The Balzer sputter coater is located in the 346 basement, room 907 (next to the SEM Jeol) .
| |
|
| |
| '''The user manual and contact information can be found in LabManager:'''
| |
|
| |
| [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=303 Balzer sputter coater]
| |
|
| |
| ==Process knowledge==
| |
| *[[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Gold|Deposition of gold]]
| |
|
| |
| ==Overview of the performance of the Hummer sputter coater and some process related parameters==
| |
|
| |
| {| border="2" cellspacing="0" cellpadding="10"
| |
| |-
| |
| !style="background:silver; color:black;" align="left"|Purpose
| |
| |style="background:LightGrey; color:black"| ||style="background:WhiteSmoke; color:black"|
| |
| *Gold sputter coating of different samples mainly before SEM characterization (see purpose)
| |
| |-
| |
| !style="background:silver; color:black" align="left" valign="top" rowspan="2"|Performance
| |
| |style="background:LightGrey; color:black"|Film thickness||style="background:WhiteSmoke; color:black"|
| |
| *10 Å - > 25 nm
| |
| |-
| |
| |style="background:LightGrey; color:black"|Deposition rate
| |
| |style="background:WhiteSmoke; color:black"|
| |
| *Not measured
| |
| |-
| |
| !style="background:silver; color:black" align="left" valign="top" rowspan="2"|Process parameter range
| |
| |style="background:LightGrey; color:black"|Process Temperature
| |
| |style="background:WhiteSmoke; color:black"|
| |
| *Room temperature
| |
| |-
| |
| |style="background:LightGrey; color:black"|Process pressure
| |
| |style="background:WhiteSmoke; color:black"|
| |
| *5*10<sup> -2</sup> mbar
| |
| |-
| |
| !style="background:silver; color:black" align="left" valign="top" rowspan="3"|Substrates
| |
| |style="background:LightGrey; color:black"|Batch size
| |
| |style="background:WhiteSmoke; color:black"|
| |
| *One sample smaller than a 100 mm wafer
| |
| *Several smaller samples
| |
| |-
| |
| | style="background:LightGrey; color:black"|Allowed materials
| |
| |style="background:WhiteSmoke; color:black"|
| |
| *All materials allowed in the cleanroom
| |
| *Samples from outside the cleanroom, including biological samples
| |
| |-
| |
| |-
| |
| |}
| |
|
| |
| -->
| |
|
| |
|
| = The Sputter coater 03 (Cressington) = | | = The Sputter coater 03 (Cressington) = |
| Line 146: |
Line 34: |
| ==Process knowledge== | | ==Process knowledge== |
|
| |
|
| *[[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Gold|Deposition of go ld]] | | *[[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Gold|Deposition of Au]] |
| | |
| | *[[Specific_Process_Knowledge/Thin film deposition/Deposition of Tungsten/Sputtering of W in Sputter Coater 3|Deposition of W]] |
|
| |
|
| ==Overview of the performance of the Sputter coater 03 (Cressington) and some process related parameters== | | ==Overview of the performance of the Sputter coater 03 (Cressington) and some process related parameters== |
| Line 188: |
Line 78: |
| |- | | |- |
| |} | | |} |
| | | <br> |
| | <br> |
| = The Sputter coater 04 (Agar Scientific) = | | = The Sputter coater 04 (Agar Scientific) = |
|
| |
|
| Line 205: |
Line 96: |
| Argon is used as a sputter gas to generate a plasma in the sputter chamber and to vent the chamber. | | Argon is used as a sputter gas to generate a plasma in the sputter chamber and to vent the chamber. |
|
| |
|
| The Sputter coater 04 (Agar Scientific) is located in the cleanroom Cx1. | | The Sputter coater 04 (Agar Scientific) is located in the cleanroom Cx1 |
|
| |
|
|
| |
|
| Line 215: |
Line 106: |
| ==Process knowledge== | | ==Process knowledge== |
|
| |
|
| *[[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Gold|Deposition of go ld]] | | *[[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Gold|Deposition of gold ]] |
|
| |
|
| ==Overview of the performance of the Sputter coater 04 (Agar Scientific) and some process related parameters== | | ==Overview of the performance of the Sputter coater 04 (Agar Scientific) and some process related parameters== |
