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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/LabAdviser/Courses click here]'''  
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses click here]'''  


'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''


=Courses=
=Courses=


We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside. Below you can see the courses that are presently running. The "Cleanroom introduction Course" is mandatory for all users that need to enter the cleanroom facility on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.
We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside along with training for our other facilities. Below you can see the courses that are presently running. The introduction Courses is mandatory for all users that need to use our facilities on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.


{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"  
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"  
|-style="background:Black; color:white"
!style="background:Black; color:white" width="3%" align ="center"|Course
!width="50pt"|Course
!style="background:Black; color:white" width="5%" align ="center"|Mandatory...
!width="200pt"|Intro course
!style="background:Black; color:white" width="10%" align ="center"|Short Course Decription
!width="200pt"|TPT Lithography
|-
!width="200pt"|TPT Mask designing
|-style="background:LightGrey; color:black" valign="center"
!width="200pt"|TPT SEM
![https://www.nanolab.dtu.dk/use-nanolab/introduction-course Cleanroom introduction course]
!width="200pt"|TPT Dry Etch
|for working inside the cleanroom
!width="200pt"|TPT Thin Film
|See the homepage
!width="200pt"|Ph.d. course no. 10868 "Methods in micro and nanofabrication"
|-
|-
|-style="background:WhiteSmoke; color:black" valign="center"
![https://www.nanolab.dtu.dk/use-nanolab/other Other Nanolabs facilities introduction course]
|for working in other Nanolab facilities
|See the homepage
|-
|-style="background:LightGrey; color:black" valign="center"
![https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography#Lithography_Tool_Package_Training Lithography TPT]
|for working with [[Specific_Process_Knowledge/Lithography|lithography]]
|The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
|-
|-style="background:WhiteSmoke; color:black" valign="center"
![[/Mask Design|Mask Design]]
|no
|The course is recommended all users who intend to design their own masks for lithography.
|-
|-style="background:LightGrey; color:black" valign="center"
![[/TPT SEM|TPT SEM]]
|for getting access to SEMs at DTU Nanolab
|The course includes theory about SEM, as well as training in instrument operation. The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM in building 314 and 346 at DTU Nanolab and for SEM in building 375.
|-
|-style="background:WhiteSmoke; color:black" valign="center"
![[/TPT Dry Etch|TPT Dry Etch]]
|for getting access to dry etch equipment
|The course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom. The course is for all users who intend to perform any kind of dry etching in the cleanroom, and is a prerequisite for training in any of the dry etch equipment.
|-
|-style="background:LightGrey; color:black" valign="center"
![[/TPT Thin Film|TPT Thin Film]]
|for getting access to thin film deposition/growth equipment
|This is a theoretical course introducing the thin film growth and deposition techniques available at DTU Nanolab. The course consists of two lectures. Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training.
|-
|-style="background:WhiteSmoke; color:black" valign="center"
![https://kurser.dtu.dk/course/10868 Ph.d. course: 10868 Methods in micro and nano fabrication]
|for ph.d. students at Nanolab
|This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom. The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab. The TPT courses are a main part of the course. The course gives you 5 ECTS points.
|-
|}
<br clear="all" />
<!--
 
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
!style="background:Black; color:white" width="5%" align ="center"|Course
!style="background:Black; color:white" width="8%" align ="center"|Intro course
!style="background:Black; color:white" width="10%" align ="center"|TPT Lithography
!style="background:Black; color:white" width="10%" align ="center"|Mask Designing
!style="background:Black; color:white" width="10%" align ="center"|TPT SEM
!style="background:Black; color:white" width="10%" align ="center"|TPT Dry Etch
!style="background:Black; color:white" width="10%" align ="center"|TPT Thin Film
!style="background:Black; color:white" width="10%" align ="center"|Ph.d. course no. 10868 "Methods in micro and nanofabrication"


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black" valign="top"
!Mandatory ...
!Mandatory ...
|for working inside the cleanroom
|for working inside the cleanroom
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|for ph.d. students at Nanolab
|for ph.d. students at Nanolab
|-
|-
 
|-style="background:LightGrey; color:black" valign="top"
|-
!Short Course Description
|-style="background:LightGrey; color:black"
!Short Course description
|
|
|The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
|The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
Line 38: Line 86:
|the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom. The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment.
|the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom. The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment.
|This is a theoretical course introducing the deposition and growth techniques available at DTU NAnolab. The Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training.  
|This is a theoretical course introducing the deposition and growth techniques available at DTU NAnolab. The Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training.  
|This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom. The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab. The TPT courses are a main part of the course. The course gives you 5 ECTS points
|This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom.  
 
|-
|-


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black" valign="top"
!How to sign up
!Schedule and How to sign up
|See home page
|See home page
|
|
Line 61: Line 108:
|
|
'''Theoretical part'''
'''Theoretical part'''
* A 3-hour lecture. The next lectures will be held Monday the 9th of September 2019 from 9:00 to 12:00. Sign up here: https://danchip.doodle.com/poll/udmcihbbgudyynfy.
* A 3-hour lecture. The next lectures will be held Monday the 9th of September 2019 from 9:00 to 12:00. Sign up here: [https://danchip.doodle.com/poll/udmcihbbgudyynfy SEM lecture]


'''Practical part'''
'''Practical part'''
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|
|
'''Theoretical part'''
'''Theoretical part'''
* A 3-hour lecture. The lecture is on videos. the videos can be found on YouTube, see link below. You can also find the slides with notes below. It can be helpful to print out the lecture slide for your notes and questions while watching the videos. After seeing the videos you must attend a Question&Evaluation session (1-1½ hour), max. 3 persons per session, Please sign up via: [https://doodle.com/poll/awkny9e952arxbxm Dry Etch TPT Lecture doodle]. The Question&Evaluation session takes place in room: 347-078
* 3-hour lecture videos.
* After seeing the videos you must attend a Question&Evaluation session (1-1½ hour), max. 3 persons per session, Please sign up via: [https://doodle.com/poll/awkny9e952arxbxm Dry Etch TPT Lecture doodle].  
*The Question&Evaluation session takes place in room: 347-078


'''Practical part'''
'''Practical part'''
* 1½ hour video explaining the equipment software.
* A 2 hour training session, max. 3 persons per session will be planed after the Question&Evaluation session.
* A 2 hour training session, max. 3 persons per session will be planed after the Question&Evaluation session.
|
|
<b>Theoretical part</b>
<b>Theoretical part</b>
'''1<sup>st</sup> lecture (2 hours):'''
'''1<sup>st</sup> lecture (2 hours):'''
*An introduction to thin films
*An introduction to thin films
*Material properties
*Material properties
*Overview of different thin film techniques at DTU Nanolab – 1<sup>st</sup> part:
*Thermal oxidation
**Thermal oxidation
*Electroplating
**Electroplating
 
<i>Sign up here: [https://danchip.doodle.com/poll/k4pdm2n4bpseww5e Thinfilm lecture part1]</i>  


<i>Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e</i>
<!-- The date will come after the summer vaction-->


'''2<sup>nd</sup> lecture (3 hours):'''
'''2<sup>nd</sup> lecture (3 hours):'''
*Vacuum basics
*Vacuum basics
*Overview of different thin film techniques at DTU Nanolab – 2<sup>nd</sup>  part:
*PVD (physical vapour deposition)
*PVD (physical vapour deposition)
**E-beam evaporation
**Thermal evaporation
**Sputtering
*CVD (chemical vapour depostion)
*CVD (chemical vapour depostion)
**LPCVD (low pressure chemical vapour deposition)
**PECVD (plasma enhanced chemical vapour deposition)
*ALD (atomic layer deposition)
*ALD (atomic layer deposition)


<i>Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf</i>
<i>Sign up here: [https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf Thinfilm lecture part2]</i>


|
|
*The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab.
*The TPT courses are a main part of the course.
*The course gives you 5 ECTS points
|-
|-


|-
|-
|-style="background:LightGray; color:black"
|-style="background:LightGray; color:black" valign="top"
!Link to course page - info and preparation material.
!Link to course page - info and preparation material.
|[http://www.nanolab.dtu.dk/english/education/courses/introduction-course introduction course information on the Nanolab homepage]
|[http://www.nanolab.dtu.dk/english/education/courses/introduction-course Introduction course information on the Nanolab homepage]
|
|[[/TPT Lithography|TPT Lithography]]
|
|[[/Mask Design|Mask Design]]
|
|[[/TPT SEM|TPT SEM]]
|
|[[/TPT Dry Etch|TPT Dry Etch]]
|
|[[/TPT Thin Film|TPT Thin Film]]
|
|[https://kurser.dtu.dk/course/10868 10868 Methods in micro and nano fabrication]
|
|-
|-


|}
|}
<br clear="all" />
<br clear="all" />
 
-->
 
<!--
==The Cleanroom Introduction Course==
==The Cleanroom Introduction Course==
For information regarding the Introduction Course, please take a look at the DTU Danchip homepage, a direct link is given here: [http://www.danchip.dtu.dk/english/education/courses/introduction-course]
For information regarding the Introduction Course, please take a look at the DTU Danchip homepage, a direct link is given here: [http://www.danchip.dtu.dk/english/education/courses/introduction-course]


 
-->
==The Lithography TPT==
<!--
==The Lithography TPT ==


DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.  
DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.  
Line 145: Line 190:
|
|
<!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>-->
<!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>-->
<!--
'''Theoretical part'''
'''Theoretical part'''
* Lecture videos that can be viewed at one's leisure.  
* Lecture videos that can be viewed at one's leisure.  
Line 203: Line 249:


|}
|}
 
-->
<br clear="all" />
<!--


===Material for preparations and further information===
===Material for preparations and further information===
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*Automatic Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=359 Spin Coater: Gamma UV]
*Automatic Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=359 Spin Coater: Gamma UV]
<!--*Manual Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=331 Spin Coater: Manual Standard Resists] -->
<!--*Manual Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=331 Spin Coater: Manual Standard Resists] -->
<!--
*UV Mask Aligner: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=339 Aligner: MA6 - 2] or [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=44 KS Aligner]
*UV Mask Aligner: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=339 Aligner: MA6 - 2] or [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=44 KS Aligner]
*Automatic Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=329 Developer: TMAH UV-lithography]
*Automatic Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=329 Developer: TMAH UV-lithography]
<!--*Manual Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=324 Developer: TMAH Manual] -->
<!--*Manual Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=324 Developer: TMAH Manual] -->


 
<!--
'''<big>Process Flows</big>'''
'''<big>Process Flows</big>'''
*[[:Media:Process_Flow_TPT first print.pdf|TPT first print process flow]]
*[[:Media:Process_Flow_TPT first print.pdf|TPT first print process flow]]
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|}
|}
-->
<!--


<br clear="all" />


== The Mask Design TPT ==
== The Mask Design TPT ==
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<br clear="all" />
<br clear="all" />
===Material for the Mask Design course===
===Material for the Mask Design course===
{| style="color: black;" width="90%"  
{| style="color: black;" width="90%"  
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<br clear="all" />
<br clear="all" />
-->
<!--


==The Dry Etch TPT  ==
==The Dry Etch TPT  ==
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-->
-->
<!--
| style="width: 20%"|
| style="width: 20%"|


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<br clear="all" />
<br clear="all" />


-->
<!--
==The SEM TPT ==
==The SEM TPT ==


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<!-- =[[image:Under_construction.png|200px]]=  -->
<!-- =[[image:Under_construction.png|200px]]=  -->
 
<!--
==Thin Film TPT ==
==Thin Film TPT ==


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<i>Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e</i>  
<i>Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e</i>  
<!-- The date will come after the summer vaction-->  
<!-- The date will come after the summer vaction-->  
 
<!--
'''2<sup>nd</sup> lecture (3 hours):'''
'''2<sup>nd</sup> lecture (3 hours):'''
*Vacuum basics
*Vacuum basics
Line 624: Line 680:
<i>Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf</i>
<i>Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf</i>
<!--The date will come after the summer vaction</i>-->
<!--The date will come after the summer vaction</i>-->
 
<!--
<b>Practical part</b>
<b>Practical part</b>
* None
* None
Line 674: Line 730:
*Lecture slide show [[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2019.pptx]]
*Lecture slide show [[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2019.pptx]]


-->
<!--
== PhD course (10868 Methods in micro and nano fabrication) ==
== PhD course (10868 Methods in micro and nano fabrication) ==


Line 688: Line 746:


The course gives you 5 ECTS points
The course gives you 5 ECTS points
-->
=Links to training videos=
DTU Nanolab has a YouTube channel where we have gathered all our training videos: [https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ]
We have a number of playlists and some single videos for equipment. You can get an overview here with links to the playlists/videos on You Tube
==Safety and behavior==
*Nanolab introduction course: Safety in the Cleanroom [https://www.youtube.com/watch?v=vq5v4xSqH6Q]
*Safety at DTU Nanolab [https://www.youtube.com/watch?v=mKGJfU57vbE]
*Behaviour in the cleanroom at DTU Nanolab [https://www.youtube.com/watch?v=yCVr53mk7rw]
*Playlist: Craftsmen in the cleanroom/håndværkere i renrummet. [https://www.youtube.com/watch?v=D-0T9X9FFBQ&list=PLjWVU97LayHDKnUd0GrKXdqDhRZuI3iwW]
==Labmanager and Labadviser==
*Playlist: DTU Nanolab systems (Labmanager and Labadviser)[https://www.youtube.com/watch?v=jC5soGfyrZc&list=PLjWVU97LayHA_ZKxvmNfTg1Bp53GX07ER]
==Wet chemistry==
*Training in fume hoods part 1 - Intro and Getting Started [https://www.youtube.com/watch?v=DRPHtBAqpU0]
*Training in fume hoods part 2 - Working With Acids, Bases and Solvents [https://www.youtube.com/watch?v=sqqktgLklSs]
*Training in fume hoods part 3 – Wet benches and errors [https://www.youtube.com/watch?v=bvK1ONO1lwM]
*Using Quick Dump Rinse Baths [https://www.youtube.com/watch?v=edMt18Uwq9o&list=PLjWVU97LayHCS7pcUsx1qt7vroSdHciXV]
*Native Silicon Dioxide Removal [https://www.youtube.com/watch?v=4JD-fSWlZac]
==Lithography==
* Playlist: Lithography TPT lecture videos [https://www.youtube.com/playlist?list=PLjWVU97LayHCp7x9OujmVlZWLAnK4CDFR]
* Playlist: Lithography TPT tool training videos (equipment) [https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHCX4sz2AH_YiPbNRmkrBYe5] (spin coater, mask aligner, developer)
* E-beam lithography at DTU Nanolab [https://www.youtube.com/watch?v=2bFUO201DS4]
* JEOL 9500 EBL Training [https://youtu.be/-wZpUNAq8dA?si=UCWm9rL5SoJE9t1I]
* Playlist: MLA [https://www.youtube.com/watch?v=GyTQNmbev2c&list=PLjWVU97LayHAiCabstMfAUeeWyQoQI_cV]
* Manual spin coater Labspin Training [https://www.youtube.com/watch?v=_neUkDsQhsM]
*Developer: TMAH Manual [https://www.youtube.com/watch?v=btinNzYnLnY&t=2s]
==Thin Film deposition and oxidation==
*Playlist: E-beam evaporator (Temescal) [https://www.youtube.com/watch?v=XNvnv4R8a5o&list=PLjWVU97LayHCQWuQyHwddJnpsEYfQp0wf]
*Lesker dual chamber sputter system at DTU Nanolab [https://www.youtube.com/watch?v=1WHv36coRUc]
*Antistiction treatment [https://www.youtube.com/watch?v=5NrPWXVybXg]
* Furnace training: Oxidation furnace [https://www.youtube.com/watch?v=Hi-1zN1RVqc]
==Dry Etch==
*Playlist: Dry Etch TPT - hands-on videos [https://www.youtube.com/watch?v=ovNM4A4E8Q0&list=PLjWVU97LayHC9cl0cuB65m-FlIScBd5t9]
*Playlist: Dry Etch TPT - Lecture videos [https://www.youtube.com/watch?v=6k6QUyDKQQc&list=PLjWVU97LayHBu0XwMGHss5CdEhka6B72U]
==Characterization==
*Playlist: SEM Training videos for Zeiss Supra SEMs in building 346 [https://www.youtube.com/watch?v=JuFZUsbSHvQ&list=PLjWVU97LayHAIltgr7pUoeIkwiPuP4Qsj]
*Playlist: AFM Icon Nanoscope software training part I/II/III [https://www.youtube.com/watch?v=i6JXopjBiy4&list=PLjWVU97LayHC9xeoG2uv8IaHuY7t-q0Tj]
*Ellipsometer training [https://www.youtube.com/watch?v=EC-oyRhKr0A]
*Playlist: XPS [https://www.youtube.com/playlist?list=PLjWVU97LayHBtOkPCSv8QA-sD4Dbz1jrb]
==Backend tools==
* Disco Dicing saw - blade exchange [https://www.youtube.com/watch?v=0pMraXlfqh8]

Latest revision as of 08:06, 25 September 2024

Feedback to this page: click here

Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.

Courses

We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside along with training for our other facilities. Below you can see the courses that are presently running. The introduction Courses is mandatory for all users that need to use our facilities on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.

Course Mandatory... Short Course Decription
Cleanroom introduction course for working inside the cleanroom See the homepage
Other Nanolabs facilities introduction course for working in other Nanolab facilities See the homepage
Lithography TPT for working with lithography The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
Mask Design no The course is recommended all users who intend to design their own masks for lithography.
TPT SEM for getting access to SEMs at DTU Nanolab The course includes theory about SEM, as well as training in instrument operation. The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM in building 314 and 346 at DTU Nanolab and for SEM in building 375.
TPT Dry Etch for getting access to dry etch equipment The course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom. The course is for all users who intend to perform any kind of dry etching in the cleanroom, and is a prerequisite for training in any of the dry etch equipment.
TPT Thin Film for getting access to thin film deposition/growth equipment This is a theoretical course introducing the thin film growth and deposition techniques available at DTU Nanolab. The course consists of two lectures. Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training.
Ph.d. course: 10868 Methods in micro and nano fabrication for ph.d. students at Nanolab This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom. The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab. The TPT courses are a main part of the course. The course gives you 5 ECTS points.



Links to training videos

DTU Nanolab has a YouTube channel where we have gathered all our training videos: [1]

We have a number of playlists and some single videos for equipment. You can get an overview here with links to the playlists/videos on You Tube

Safety and behavior

  • Nanolab introduction course: Safety in the Cleanroom [2]
  • Safety at DTU Nanolab [3]
  • Behaviour in the cleanroom at DTU Nanolab [4]
  • Playlist: Craftsmen in the cleanroom/håndværkere i renrummet. [5]

Labmanager and Labadviser

  • Playlist: DTU Nanolab systems (Labmanager and Labadviser)[6]

Wet chemistry

  • Training in fume hoods part 1 - Intro and Getting Started [7]
  • Training in fume hoods part 2 - Working With Acids, Bases and Solvents [8]
  • Training in fume hoods part 3 – Wet benches and errors [9]
  • Using Quick Dump Rinse Baths [10]
  • Native Silicon Dioxide Removal [11]

Lithography

  • Playlist: Lithography TPT lecture videos [12]
  • Playlist: Lithography TPT tool training videos (equipment) [13] (spin coater, mask aligner, developer)
  • E-beam lithography at DTU Nanolab [14]
  • JEOL 9500 EBL Training [15]
  • Playlist: MLA [16]
  • Manual spin coater Labspin Training [17]
  • Developer: TMAH Manual [18]

Thin Film deposition and oxidation

  • Playlist: E-beam evaporator (Temescal) [19]
  • Lesker dual chamber sputter system at DTU Nanolab [20]
  • Antistiction treatment [21]
  • Furnace training: Oxidation furnace [22]

Dry Etch

  • Playlist: Dry Etch TPT - hands-on videos [23]
  • Playlist: Dry Etch TPT - Lecture videos [24]

Characterization

  • Playlist: SEM Training videos for Zeiss Supra SEMs in building 346 [25]
  • Playlist: AFM Icon Nanoscope software training part I/II/III [26]
  • Ellipsometer training [27]
  • Playlist: XPS [28]

Backend tools

  • Disco Dicing saw - blade exchange [29]
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