Specific Process Knowledge/Characterization/Optical microscope: Difference between revisions

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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Optical_microscope click here]'''  
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Optical_microscope click here]'''
 
''This page is written by DTU Nanolab  internal''


[[Category: Equipment|Characterization Optical mi]]
[[Category: Equipment|Characterization Optical mi]]
[[Category: Characterization|Optical mi]]
[[Category: Characterization|Optical mi]]


{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
|-
|-style="background:white; color:black; vertical-align:middle; text-align:center;"
|
!Nikon SMZ 1000
!Noco IR
!Leica INM 100
!Zeiss Jenatech
!Nikon Eclipse L200 #1
!Nikon Eclipse L200 #2
!Nikon Eclipse L200N #3
!Nikon Eclipse L200N #4
!Nikon ME 600
!Leica S8 APO
!Zeiss Axiotron
|-


{| border="1" cellspacing="0" cellpadding="3"
!
! Zeiss Jenatech (strain)
! Nikon SMZ 1500
! Leica S8 APO
! Leitz Medilux
! Zeiss Axiotron 2
! Zeiss Jenatech (particles measurements)
! Noco IR microscope
! Nikon SMZ 1000
! Nikon ME 600
! Nikon Eclipse L200
! Nikon Eclipse L200 (2)
! Nikon ECLIPSE L200N 3
! Nikon ECLIPSE L200N 4
|-
|-
|-style="background:white; color:black; vertical-align:middle; text-align:center;"
|
|
|[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|left]]
|[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
[[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|left]]
|[[image:Noco IR microscope.jpg|100x100px|thumb|center]][[image:Noco IR microscope_1.jpg|100x100px|thumb|center]]
|[[image:Nikon SMZ 1500.jpg|100x100px|thumb|left]]
|[[image:LeicaINM100.jpg|100x100px|thumb|center]]
|[[image:Leica S8 APO.jpg|100x100px|thumb|left]]
|[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|center]][[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|center]]
|[[image:Leitz Medilux.jpg|100x100px|thumb|left]]
|[[image:Nikon Eclipse L200.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|center]]
|[[image:Zeiss Axiotron.jpg|100x100px|thumb|left]]
|[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|center]]
[[image:Zeiss Axiotron_1.jpg|100x100px|thumb|left]]
|[[image:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|center]]
|[[image:Zeiss Jenatech particle measurement_2.jpg|100x100px|thumb|left]]
|[[image:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|center]]
[[image:Zeiss Jenatech particle measurement_1.jpg|100x100px|thumb|left]]
|[[image:Nikon ME 600.jpg|100x100px|thumb|center]][[image:Nikon ME 600_1.jpg|100x100px|thumb|center]]
|[[image:Noco IR microscope.jpg|100x100px|thumb|left]]
|[[image:Leica S8 APO.jpg|100x100px|thumb|center]]
[[image:Noco IR microscope_1.jpg|100x100px|thumb|left]]
|[[image:Zeiss Axiotron.jpg|100x100px|thumb|center]][[image:Zeiss Axiotron_1.jpg|100x100px|thumb|center]]
|[[image:Nikon SMZ 1000.jpg|100x100px|thumb|left]]
|-
||[[image:Nikon ME 600.jpg|100x100px|thumb|left]]
 
[[image:Nikon ME 600_1.jpg|100x100px|thumb|left]]
|-
|[[image:Nikon Eclipse L200.jpg|100x100px|thumb|left]]
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
[[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|left]]
!Location
|[[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|left]]
|346-901
[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|left]]
|346-901
|[[File:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|left]]
|346-901
|[[File:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|left]]
|cleanroom A1
|-
|cleanroom D3
|'''Location'''
|cleanroom F3
|Check LabManager
|cleanroom E4
|Check LabManager
|cleanroom E5
|Check LabManager
|cleanroom F1
|Check LabManager
|cleanroom Cx1
|Check LabManager
|cleanroom D3
|Check LabManager
|-
|Check LabManager
 
|Check LabManager
|-
|Check LabManager
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
|Check LabManager
!Responsible group
|Check LabManager
|Wet chemistry
|Check LabManager
|Wet chemistry
|Check LabManager
|Wet chemistry
|-
|Lithography
|'''Special features'''
|Lithography
|Wollastron prism
|Lithography
|Stereoscopic microscope
|Lithography
|Stereoscopic microscope
|Lithography
|Lithography
|Lithography
|Lithography
|-


|No
|-
|No
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
|No
!Objectives
|Infra red (IR) camera
|Zoom 0.8x - 8x
|Stereoscopic microscope
|
|Wollastron prism
*2.5x
|Motorized stage
*10x
*20x
*50x
|
*2.5x
*5x
*10x
*20x
*50x
|
*5x
*10x
*20x
*50x
*100x
|
*2.5x
*5x
*10x
*20x
*50x
|
*2.5x
*5x
*10x
*20x
*50x
*100x
|
*2.5x
*5x
*10x
*20x
*50x
*100x
|
*2.5x
*5x
*10x
*20x
*50x
*100x
|
*5x
*10x
*20x
*50x
*100x
|Zoom 1x - 8x
|
*5x
*10x
*20x
*50x
|-


[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|auto scan guide]]
|No
|No
|No
|-
|-
|'''Ocular magnification'''
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
!Ocular
|10x
|10x
|10x
|No
|No
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|No
|10x
|10x
|10x
|10x
Line 91: Line 148:
|10x
|10x
|-
|-
|'''Objective magnification'''
 
|2.5x, 5x, 10x, 20x, 50x
|Zoom 100x
|Zoom 80x
|2.5x, 5x, 10x, 20x, 50x
|5x, 10x, 20x, 50x
|5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 20x, 50x
|Zoom 100x
|5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 10x, 20x, 50x
|2.5x, 5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 10x, 20x, 50x, 100x
|-
|-
|'''Bright field'''
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
|Yes
!Special features
|No
|Stereoscopic microscope
|No
|IR imaging
|Yes
|
|Yes
|
|Yes
|
|Yes
*Motorized stage
|No
*'''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Auto scan guide]]'''
|Yes
|
|Yes
|
|Yes
|
|Yes
|
|Yes
|Stereoscopic microscope
|
|-
|-
|'''Dark field'''
 
|Yes
|No
|No
|No
|Yes
|Yes
|No
|No
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|-
|'''Polarizer'''
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
|Yes
!Contrast mechanisms
|No
|
|No
*Brightfield
|No
|
|No
*Polarizer
|Yes
*Brightfield
|No
|
|No
*Brightfield
|Yes
*Darkfield
|No
|
|No
*Polarizer
|No
*Brightfield
|No
|
*Brightfield
*Darkfield
|
*Brightfield
*Darkfield
|
*Polarizer
*Brightfield
*Darkfield
|
*Polarizer
*Brightfield
*Darkfield
|
*Polarizer
*Brightfield
*Darkfield
|
*Brightfield
|
*Brightfield
*Darkfield
|-
|-
|'''Episcopic light (reflected light)'''
 
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|-
|'''Diascopic light (transmitted light)'''
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
|No
!Illumination modes
|Yes
|
|No
*Episcopic
|Yes
|
|Yes
*Episcopic
|No
*Diascopic
|Yes
|
|No
*Episcopic
|No
*Diascopic
|Yes
|
|Yes
*Episcopic
|Yes
*Diascopic
|Yes
|
*Episcopic
*Diascopic
|
*Episcopic
*Diascopic
|
*Episcopic
*Diascopic
|
*Episcopic
*Diascopic
|
*Episcopic
|
*Episcopic
|
*Episcopic
*Diascopic
|-
 
|-
|-
|'''View with eye'''
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
|Yes
!Camera
|Yes
|None
|Yes
|IR camera
|Yes
|DS-Fi2
|Yes
|None
|Yes
|DS-Fi1
|Yes
|DS-Fi1
|Yes
|
|Yes
*DS-Fi2
|Yes
*C-mount, 0.7x relay
|Yes
|
|Yes
*DS-Fi2
|Yes
*C-mount, 0.7x relay
|DS-Fi2
|None
|Infinity X
|-
|-
|'''View on screen (camera)'''
 
|Yes
|No
|No
|Yes
|Yes
|No
|Yes (IR)
|No
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|-
|'''Measurement option'''
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
|No
!Analysis software
|No
|None
|No
|None
|No
|NIS-D
|Yes
|None
|No
|NIS-BR
|No
|NIS-D
|No
|NIS-D
|No
|NIS-D
|Yes
|NIS-D
|Yes
|None
|Yes
|DeltaPix
|Yes
|-
|-
|}
|}


<br clear="all" />


It is possible to make an automated scanning of a full wafer on the Nikon Eclipse L200 with motorized stage '''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Nikon Eclipse L200 auto scan guide]]'''
There are also two optical microscopes in building 451, a stereo microscope and a transmission microscope, that were both previously located in Packlab. Please ask staff / the BioMic group for details.

Latest revision as of 11:35, 7 November 2023

Feedback to this page: click here

This page is written by DTU Nanolab internal

Nikon SMZ 1000 Noco IR Leica INM 100 Zeiss Jenatech Nikon Eclipse L200 #1 Nikon Eclipse L200 #2 Nikon Eclipse L200N #3 Nikon Eclipse L200N #4 Nikon ME 600 Leica S8 APO Zeiss Axiotron
Location 346-901 346-901 346-901 cleanroom A1 cleanroom D3 cleanroom F3 cleanroom E4 cleanroom E5 cleanroom F1 cleanroom Cx1 cleanroom D3
Responsible group Wet chemistry Wet chemistry Wet chemistry Lithography Lithography Lithography Lithography Lithography Lithography Lithography Lithography
Objectives Zoom 0.8x - 8x
  • 2.5x
  • 10x
  • 20x
  • 50x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
 Zoom 1x - 8x
  • 5x
  • 10x
  • 20x
  • 50x
Ocular 10x 10x 10x 10x 10x 10x 10x 10x 10x 10x 10x
Special features Stereoscopic microscope IR imaging Stereoscopic microscope
Contrast mechanisms
  • Brightfield
  • Polarizer
  • Brightfield
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Brightfield
  • Darkfield
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Darkfield
  • Brightfield
  • Brightfield
  • Darkfield
Illumination modes
  • Episcopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Episcopic
  • Episcopic
  • Diascopic
Camera None IR camera DS-Fi2 None DS-Fi1 DS-Fi1
  • DS-Fi2
  • C-mount, 0.7x relay
  • DS-Fi2
  • C-mount, 0.7x relay
 DS-Fi2 None Infinity X
Analysis software None None NIS-D None NIS-BR NIS-D NIS-D NIS-D NIS-D None DeltaPix


There are also two optical microscopes in building 451, a stereo microscope and a transmission microscope, that were both previously located in Packlab. Please ask staff / the BioMic group for details.

Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Optical_microscope&oldid=48209"