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| '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/LabAdviser/Courses click here]'''
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| | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses click here]''' |
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| =Courses=
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| We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside. Below you can see the courses that are presently running. The "Cleanroom introduction Course" is mandatory for all users that need to enter the cleanroom facility on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.
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| ==The Cleanroom Introduction Course== | | = Tool Package Training (TPT) = |
| For information regarding the Introduction Course, please take a look at the DTU Danchip homepage, a direct link is given here: [http://www.danchip.dtu.dk/english/user-information/courses/introduction-course] | | For selected equipment groups, we have created online introductory courses called Tool Package Training (TPT) that provide a comprehensive overview of both the theoretical principles behind the processes and the equipment used. These courses also include video demonstrations showcasing the operation of the equipment available in our cleanroom facilities. The completion of the respective TPTs are mandatory for all academic users before hands-on training on specific equipment can be requested. While we strongly recommend commercial users to take the online courses as well, only the video demonstrations showcasing the operation of the equipment are mandatory. |
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| ==The Lithography TPT==
| | {| border="1" cellspacing="1" cellpadding="3" style="text-align:left;" |
| | | ! style="background:Black; color:white" width="3%" align="center" |Course |
| DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.
| | ! style="background:Black; color:white" width="5%" align="center" |Requirement |
| | | ! style="background:Black; color:white" width="10%" align="center" |Description |
| The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
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| !colspan="2"|Lithography Tool Package Training
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| !Schedule
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| <!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>-->
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| '''Theoretical part'''
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| * The lecture has been replaced by videos that can be viewed at one's leisure.
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| * A 1 hour "questions and exercises" session once or twice a month will be planned as needed (typically Fridays 09:30-10:30).
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| * '''Sign up via [https://doodle.com/poll/metywuzqziwps6w3 Q&E session Doodle]'''
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| '''Practical part'''
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| * A 4-5 hour training session 2-3 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 14:00).
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| * '''Sign up via [https://doodle.com/poll/yd2q9tbzm86by2ct Training session Doodle]'''
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| !Location
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| '''Theoretical part'''
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| * The location of the "questions and exercises" session will be specified after signing up for the course.
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| '''Practical part'''
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| * The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
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| !Qualified Prerequisites
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| * Cleanroom safety course at DTU Danchip
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| * Admission to the cleanroom must be obtained before the training session
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| !Preparations
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| '''Before the "questions and exercises" session'''
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| * Read [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography] (Available online from DTU campus).
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| * Watch the [http://podcast.llab.dtu.dk/index.php?id=302 lecture videos] (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos.
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| '''Before training session'''
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| * Watch the [http://podcast.llab.dtu.dk/feeds/dtu-danchip/ training videos] of spin coating (automatic), exposure (operation + alignment), and development (automatic).
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| * Study the equipment manuals. The manuals are available in [http://labmanager.danchip.dtu.dk LabManager].
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| * Study the [[LabAdviser/Courses#Material_for_preparations_and_further_information|TPT process flows]] (first print + alignment).
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| '''Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below.'''
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| !Course Responsible
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| The Lithography Group at DTU Danchip [mailto:lithography@danchip.dtu.dk lithography@danchip.dtu.dk].
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| Sign up for the course using Doodle (links under schedule).
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| !Learning Objectives | |
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| * Describe fundamental parts of lithographic processing in a cleanroom, design of process flows
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| * Authorization to use spin coater, mask aligner, and developer at DTU Danchip
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| * Calculate relevant process parameters
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| * Analyze and apply your results of lithographic processing
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| <br clear="all" />
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| ===Material for preparations and further information===
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| {| style="color: black;" width="90%"
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| '''<big>Literature</big>'''
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| *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Franssila, 2010, Chapter 9: Optical Lithography]
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| *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography]
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| *[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals]
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| *[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals]
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| '''<big>Lecture videos</big>'''
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| *[http://podcast.llab.dtu.dk/index.php?id=302 Lecture videos] (7 videos, 2:41 hours in total)
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| '''<big>Slides from Lecture</big>'''
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| *[[:Media:Litho_Tool_Package_-_Introduction.pdf|TPT slides: Introduction]]
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| *[[:Media:Litho_Tool_Package_-_Spin_coating.pdf|TPT slides: Spin Coating]]
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| *[[:Media:Litho_Tool_Package_-_Exposure.pdf|TPT slides: UV Exposure]]
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| *[[:Media:Litho_Tool_Package_-_Development.pdf|TPT slides: Development]]
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| *[[:Media:Litho_Tool_Package_-_Post_processing.pdf|TPT slides: Post-processing]]
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| *[[:Media:Litho_Tool_Package_-_Process_effects_and_examples.pdf|TPT slides: Process Effects and Examples]]
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| '''<big>Training videos</big>'''
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.055_Spin_Coater_GAMMA_UV-720p.mp4 Training Video: Automatic Spin Coater]
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| <!--*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.057_Manual_Spin_Coater_V2-720p.mp4 Training Video: Manual Spin Coater] -->
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part1_operation-720p.mp4 Training Video: UV Mask Aligner Part I (Operation)]
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part2_aligning-720p.mp4 Training Video: UV Mask Aligner Part II (Alignment)]
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.050_Developer_TMAH_UV-Lithography-720p.mp4 Training Video: Automatic Puddle Developer]
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| <!--*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.049_Developer_Manual-720p.mp4 Training Video: Manual Puddle Developer] -->
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| '''<big>Manuals</big>'''
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| *Automatic Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=359 Spin Coater: Gamma UV]
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| <!--*Manual Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=331 Spin Coater: Manual Standard Resists] -->
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| *UV Mask Aligner: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=339 Aligner: MA6 - 2] or [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=44 KS Aligner]
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| *Automatic Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=329 Developer: TMAH UV-lithography]
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| <!--*Manual Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=324 Developer: TMAH Manual] -->
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| '''<big>Process Flows</big>'''
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| *[[:Media:Process_Flow_TPT first print.pdf|TPT first print process flow]]
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| *[[:Media:Process_Flow_TPT alignment.pdf|TPT alignment process flow]]
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| |}
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| <br clear="all" />
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| == Mask Design ==
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| <!--
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| DTU Danchip offers a Tool Package Training in Mask Design.
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| The course is for all users who intend to design their own masks for lithography.
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| {|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
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| !colspan="2"|Mask Design Training
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| !Schedule
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| * Self-study using screen cast videoes demonstrating the use of either CleWin og L-edit.
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| * An exercise where you are guided through the design of a mask.
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| * An optional ½ hour Q&A session with an expert on mask layout. You can make an appointment after finishing the exercise.
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| !Location
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| * Anywhere you like. DTU network access required.
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| !Qualified Prerequisites
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| * Basic knowledge about micro-lithography
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| * Access to a computer where you can install Clewin or L-edit
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| ** Danchip provide free access to Clewin 5 use through a network license.
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| ** If you want to use L-edit you will need a valid license of your own
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| * Basic knowledge about micro-fabrication techniques
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| !Preparations
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| None
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| !Course Responsible
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| Customer support at DTU Danchip.
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| If you have questions you can contact us by e-mailing [mailto:danchipsupport@danchip.dtu.dk danchipsupport@danchip.dtu.dk].
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| !Learning Objectives
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| * Get acquainted with either Clewin 5 or L-edit mask design programs
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| * construct basic mask structures (rectangles, polygons, circles etc.)
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| * Be able to manipulate shapes in different ways (merge, intersect, XOR, subtract, invert, move, scale, rotate, mirror, grow/shrink, duplicate, align etc.)
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| * use mask layers for a process
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| * organize a hierarchical mask design
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| * choose mask polarity and orientation for different resist types and Front/Back-side alignment
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| * discuss tolerances related to mask design/process flows
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| * distinguish between critical/non-critical process/mask steps
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| * design appropriate test structures for a process
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| * select appropriate alignment marks for a process
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| * make a chip/wafer layout usable for dicing
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| * export the layout to cif or gds files with appropriate layer names
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| * make a mask order
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| |}
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| ===Material for preparations and further information===
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| '''<big>Literature</big>'''
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| * No extra Literature at the moment
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| '''<big>Pre hands-on training videos</big>'''<br>
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/TPThands-on_IntroAndWafer_extra-720p.mp4 TPT hands-on intro 6min6s]
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| Screen cast videos for the DRIE, ICP metal and III-V ICP:
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Overview_HiRes-720p.mp4 Overview 3min25s]
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=19b8e1bfcd514c0e01eee7df416a0449&cHash=94480d4d38ce36a2a7621cdfab1054b2 Running processes]
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=ac1c07ec933f7f138ec1788569cd568e&cHash=e73d3b0cc4fd5f8763c0c42d96bc7adc Recipes]
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=ef3a91e929cce443fb2388bae35acf41&cHash=7d104e10f1da36ec01097059d6ee441b The Bosch Processes]
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Automatic_Processing_DRIE-720p.mp4 Automatic processing at the DRIE-Pegasus 14min56s]
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| Screen cast videos for the ASE and AOE:
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=3c9e59310178de0c548d437712f077c2&cHash=e8c7fe4f4ff14672c970a94ec093cb8e Intro]
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=3ec3324cdd5df30e38c4215e138c0f3b&cHash=fee573a639b0f5b6cfd1cd058b8376ec Load and Transfer]
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=5dc5bdbcc2842364c6bcb23735cd42e0&cHash=f046044c1603f61fd6af4e0b0264955b Recipe Editor]
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=372bc3286dcee3303214c268e14e5663&cHash=ae70bb52ca1c611c9fc7602bcd613ec5 The Bosch Process]
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=b4deb2d0030f3141f41a4497375bf861&cHash=a75fab158fec382198b74336cba7bdc4 Run a Process]
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=b995b7088690f218f73c24a6bd6361ad&cHash=c6076806edcff2f12036b4e41cbee14d Removing a Wafer from the Load Lock]
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=742052c10f9e77778ffab73561b9e840&cHash=44832011bb363b1162900338c834c785 The Process Log]
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| -->
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| ==The Dry Etch TPT ==
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| DTU Danchip offers a Tool Package Training in Dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.
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| The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.
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| | !Lithography TPT |
| | |for working with [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Lithography Lithography Equipment] |
| | |This online course presents the theory on lithographic processes and equipment, as well as training in equipment operation in the cleanroom. The course is a prerequisite for hands-on training on all lithography equipment. Find more information on the [https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography#Lithography_Tool_Package_Training Lithography TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/lithography-tool-training here]. |
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| |-style="background:White; color:black; text-align:center" | | |- style="background:WhiteSmoke; color:black" valign="center" |
| !colspan="2"|Dry Etch Tool Package Training | | !Thin Film TPT |
| | |for getting access to [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition Thin Film Deposition] & [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thermal_Process Thermal Growth Equipment] |
| | |This online course introduces the theory for thin film growth and deposition techniques available at DTU Nanolab. The course is a prerequisite for hands-on training on most of the thin film equipment in the cleanroom. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_Thin_Film Thin Film TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/thin-film-training here]. |
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| | !Dry Etch TPT |
| | |for getting access to [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Etch Dry Etch Equipment] |
| | |This online course presents the theory on dry etching and equipment, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the dry etching equipment in the cleanroom. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_Dry_Etch Dry Etch TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here] |
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| !Schedule | | |- style="background:WhiteSmoke; color:black" valign="center" |
| | | | !SEM TPT |
| '''Theoretical part'''
| | |for getting access to SEMs in [https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy 346] and [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/314/Microscopy_314-307 314/307] |
| * A 3-hour lecture. The next 3 hour lecture is on the '''21st of September''' from 9:00 to approximately 12. Sign up via: [https://doodle.com/poll/8nhebimzqy2cy2p8 Dry Etch TPT Lecture doodle]
| | |This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the SEMs in building 314/307, and 346/347 at DTU Nanolab. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here]. |
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| '''Practical part'''
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| * A 2-3 hour training session, max. 3 persons per session will be planed after the lecture
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| !Location
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| '''Theoretical part'''
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| * The location of the lecture will be notified after you have signed up
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| '''Practical part'''
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| * The training session takes place inside the cleanroom. The meeting point will be in The gowning area
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| !Qualified Prerequisites
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| * Cleanroom safety course at DTU Danchip
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| * Admission to the cleanroom must be obtained before the training session
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| !Preparations
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| '''Before the lecture'''
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| *Watch the video:[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Introduction_to_Dry_Etch_Equipment-1080p.mp4 Introduction to Dry Etch Equipment]
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| '''Before training session'''
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| * Watch the training video: TPT hands-on intro
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| * Watch the screen cast video's for the ASE/AOE software:See below
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| * Watch the screen cast video's for the DRIE/ICP meat and III-V ICP: See below
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| !Course Responsible
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| The Dry Etch Group at DTU Danchip.
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| If you have questions you can contact us by e-mailing [mailto:dryetch@danchip.dtu.dk dryetch@danchip.dtu.dk].
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| !Learning Objectives
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| *Know why and when to use dry etching
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| *Use the dry etchers without harming the machines
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| *Select the right instrument to use for his/her dry etch processing
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| *Select an appropriate etch recipe for his/her dry etch processing
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| *Spot when the recipe needs to be tuned for his/her needs and
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| *Suggest relevant tuning parameters
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| <br clear="all" />
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| ===Material for preparations and further information===
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| {| style="color: black;" width="90%"
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| | colspan="3" |
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| |- | | |- |
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| '''<big>Literature</big>'''
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| * No extra Literature at the moment
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|
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|
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| '''<big>Pre Lecture video</big>'''
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Introduction_to_Dry_Etch_Equipment-1080p.mp4 Introduction to Dry Etch Equipment 5min37s]
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| '''<big>Slides from Lecture</big>'''
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| <!-- *Lecture slide show [[Media:TPT Dry etching 20170223.pptx]]
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| *Lecture slides with explanatory text included [[Media:TPT Dry etching with notes 20170223.pdf]] -->
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| *Lecture slide show [[Media:TPT Dry etching Aug2017.pptx]]
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| *Lecture slides with explanatory text included [[Media:TPT Dry etching Aug2017.pdf]]
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| '''<big>Pre hands-on training videos</big>'''<br>
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/TPThands-on_IntroAndWafer_extra-720p.mp4 TPT hands-on intro 6min6s]
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| Screen cast videos for the DRIE, ICP metal and III-V ICP:
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Overview_HiRes-720p.mp4 Overview 3min25s]
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=19b8e1bfcd514c0e01eee7df416a0449&cHash=94480d4d38ce36a2a7621cdfab1054b2 Running processes]
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=ac1c07ec933f7f138ec1788569cd568e&cHash=e73d3b0cc4fd5f8763c0c42d96bc7adc Recipes]
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=ef3a91e929cce443fb2388bae35acf41&cHash=7d104e10f1da36ec01097059d6ee441b The Bosch Processes]
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Automatic_Processing_DRIE-720p.mp4 Automatic processing at the DRIE-Pegasus 14min56s]
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|
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| Screen cast videos for the ASE and AOE:
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=3c9e59310178de0c548d437712f077c2&cHash=e8c7fe4f4ff14672c970a94ec093cb8e Intro]
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=3ec3324cdd5df30e38c4215e138c0f3b&cHash=fee573a639b0f5b6cfd1cd058b8376ec Load and Transfer]
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=5dc5bdbcc2842364c6bcb23735cd42e0&cHash=f046044c1603f61fd6af4e0b0264955b Recipe Editor]
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=372bc3286dcee3303214c268e14e5663&cHash=ae70bb52ca1c611c9fc7602bcd613ec5 The Bosch Process]
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=b4deb2d0030f3141f41a4497375bf861&cHash=a75fab158fec382198b74336cba7bdc4 Run a Process]
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| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=b995b7088690f218f73c24a6bd6361ad&cHash=c6076806edcff2f12036b4e41cbee14d Removing a Wafer from the Load Lock]
| |
| *[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=742052c10f9e77778ffab73561b9e840&cHash=44832011bb363b1162900338c834c785 The Process Log]
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| |} | | |} |
| | <br> |
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| <br clear="all" />
| | = Equipment Tutorials = |
| | | For selected equipment, we have created online courses called exxplaining the operation (hardware and software) of our equipment. These tutorials are mandatory for all users before hands-on training on specific equipment can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]. |
| ==The SEM TPT ==
| |
| | |
| DTU Danchip offers a Tool Package Training in Scanning electron microscope (SEM); the course includes theory on SEM, as well as training in instrument operation.
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| The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Danchip.
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|
| {|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;" | | {| border="1" cellspacing="1" cellpadding="3" style="text-align:left;" |
| | ! style="background:Black; color:white" width="3%" align="center" |Course |
| | ! style="background:Black; color:white" width="5%" align="center" |Requirement |
| | ! style="background:Black; color:white" width="10%" align="center" |Description |
| |- | | |- |
| | | |- style="background:LightGrey; color:black" valign="center" |
| | !E-beam Lithography |
| | |for getting access to [[Specific Process Knowledge/Lithography/EBeamLithography | E-beam Lithography Tools]] |
| | |This online tutorial will be part of the E-beam TPT and is currently under prepration. <!-- ADDED WHEN TPT IS READY: It will include theory on electron beam lithography and equipment, as well as training in preparation of exposure files and equipment operation.!--> The course is a prerequisite for hands-on training on the electron beam tool. Find more information about the training in the [[LabAdviser/Courses/TPT Ebeam|TPT E-beam]]. |
| |- | | |- |
| |-style="background:White; color:black; text-align:center" | | |- style="background:WhiteSmoke; color:black" valign="center" |
| !colspan="2"|SEM Tool Package Training | | !Ellipsometer VASE |
| | |for getting access to the [[Specific Process Knowledge/Characterization/Optical characterization#Ellipsometer VASE and Ellipsometer M-2000V|Ellipsometers]] |
| | |This online course consists of two short online tutorials |
| | * [https://www.jawoollam.com/resources/ellipsometry-tutorial/what-is-ellipsometry Tutorial ''by Woollam''] |
| | * [https://www.youtube.com/watch?v=EC-oyRhKr0A|Ellipsometer Ellipsometer operation ''by DTU Nanolab''] |
| |- | | |- |
| | | |- style="background:LightGrey; color:black" valign="center" |
| | ! Atomic Force Microscopy |
| | | for getting access to the [[Specific Process Knowledge/Characterization/AFM:_Atomic_Force_Microscopy | AFM equipment]] |
| | |This online course consists of three short training videos regarding equipment operation. |
| | * [https://www.youtube.com/watch?v=i6JXopjBiy4&list=PLjWVU97LayHC9xeoG2uv8IaHuY7t-q0Tj AFM Icon-PT Operation] |
| |- | | |- |
| !Schedule
| | |- style="background:WhiteSmoke; color:black" valign="center" |
| | | | ! Temescal E-beam evaporator |
| '''Theoretical part'''
| | | for getting access to the E-beam Evaporators [[Specific Process Knowledge/Thin film deposition/Temescal | (Temescal)]] or [[Specific Process Knowledge/Thin film deposition/10-pocket e-beam evaporator | (10-Pockets)]] |
| * A 3-hour lecture. The next two 3 hour lectures are on the '''14th and 28th of April''' from 9:00 to approximately 12.00.
| | |This online course consists of four short training videos regarding equipment operation. |
| | | * [https://www.youtube.com/playlist?list=PLjWVU97LayHCQWuQyHwddJnpsEYfQp0wf Temescal Operation] |
| '''Practical part'''
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| * A 2-hour training session, max. 3 persons per session will be planed after the lecture
| |
| * A 2-hour one-on-one hands-on session which will request the participant to pass a “driving test” on the SEM. In this session, the participant will have the opportunity to study their own sample | |
| |- | | |- |
| | | |- style="background:LightGrey; color:black" valign="center" |
| | ! Lesker Dual Chamber Sputter System |
| | | for getting access to the [[Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system | Sputter-System Metal-Oxide(PC1) Metal-Nitride (PC3)]] |
| | |This online course consists of three short training videos regarding equipment operation for PC1 (Oxide) and PC3 (Nitride)). |
| | * [https://www.youtube.com/watch?v=1WHv36coRUc PC1 (Oxide) and PC3 (Nitride) Operation] |
| |- | | |- |
| !Location
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| '''Theoretical part'''
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| * The location of the lecture will be notified after you have signed up
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| '''Practical part'''
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| * The training session takes place building 346 room 907(basement). The meeting point will be at the SEM Supra 1
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| |- | | |- |
| | |- style="background:WhiteSmoke; color:black" valign="center" |
| | ! XPS |
| | | for getting access to the [[Specific Process Knowledge/Characterization/XPS | XPS]] |
| | |If you already a user at DTU Nanolab and have access to LabManager, please fill the access request form following the link below: |
| | *[http://labmanager.dtu.dk/function.php?module=Request&view=edit&rt=2 Access request form for XPS training] |
| | Else, please contact the Fabrication Support group. |
|
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|
| | This online course presents the theory behind XPS analysis, as well as training in equipment operation in the cleanroom. |
| | * "Theory behind XPS" by ''Technical University of Munich'' (pages 1-16): [[File:Electron Spectroscopy of surfaces.pdf]] |
| | * Youtube video by ''Kent L. Rhodes (McCrone Group)'' hosted by ''Hooke College of Applied Sciences'': [https://www.youtube.com/watch?v=nGQxmOcs2rg "Using XPS for Industrial Problem Solving"] |
| | * Equipment operation by DTU Nanolab: |
| | : [https://www.youtube.com/playlist?list=PLjWVU97LayHBtOkPCSv8QA-sD4Dbz1jrb XPS Operation] |
| |- | | |- |
| !Qualified Prerequisites
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| *
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| !Preparations
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| '''Before the lecture'''
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| *Read “Scanning Electron Microscopy Primer” by Bob Hafner and some notes that lists some differences between the SEMs described in the primer and the SEMs at Danchip. You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Learning material, or the primer can be found [http://www.charfac.umn.edu/sem_primer.pdf here]
| |
|
| |
| '''Before the first group training session'''
| |
| * Watch the training videos: You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Training videos (will be the Link to the video later)
| |
| * Watch the training videos: You can find it on the cleanroom drive: [U:\DCH\CleanroomDrive\_TPT\TPT SEM\Training videos] (will be the Link to the video later)
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|
| |
| '''Before the one-on-one hands-on'''
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| * Look at the presentation [[Media:Operating_SEM_Supra_1_final.pptx]]
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| * Read the user manual for SEM Supra 1 Click [http://labmanager.dtu.dk/d4Show.php?id=2180&mach=275 here]
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| !Course Responsible
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| The SEM Group at DTU Danchip (SEM@danchip.dtu.dk).
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| Sign up for the course by e-mailing to [mailto:sem@danchip.dtu.dk sem@danchip.dtu.dk].
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| !Learning Objectives
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| *Prepare samples and safely operate SEM
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| *Understand possibilities and limitations of SEM
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| *Explain SEM electron optics and detectors
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| *Optimize and analyse SEM images
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| |} | | |} |
| | | <!--also available |
| <br clear="all" />
| | Oxidation Furnace: |
| | | https://www.youtube.com/watch?v=Hi-1zN1RVqc |
| ===Material for preparations and further information=== | | RCA: |
| | | https://www.youtube.com/watch?v=U81QbZsCX9U&list=PLjWVU97LayHDW8Q1Lxk7RzgAp7nNN0WFF&index=4 |
| '''<big>Slides from Lecture</big>'''
| | !--> |
| *Lecture slide show [[Media:Danchip_SEM_lecture.pptx]]
| | <br> |
| | <br clear="all"> |
