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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/LabAdviser/Courses click here]'''  
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses click here]'''
 
'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''


=Courses=
=Courses=


We are building up a number of courses to educate our users in using the cleanroom facility. Below you can see the courses that are presently running. The "Cleanroom introduction Course" is mandatory for all users that need to enter the cleanroom facility on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use the facility.
We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside along with training for our other facilities. Below you can see the courses that are presently running. The introduction Courses is mandatory for all users that need to use our facilities on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.
 
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
!style="background:Black; color:white" width="3%" align ="center"|Course
!style="background:Black; color:white" width="5%" align ="center"|Mandatory...
!style="background:Black; color:white" width="10%" align ="center"|Short Course Decription
|-
|-style="background:LightGrey; color:black" valign="center"
![https://www.nanolab.dtu.dk/use-nanolab/introduction-course Cleanroom introduction course]
|for working inside the cleanroom
|See the homepage
|-
|-
|-style="background:WhiteSmoke; color:black" valign="center"
![https://www.nanolab.dtu.dk/use-nanolab/other Other Nanolabs facilities introduction course]
|for working in other Nanolab facilities
|See the homepage
|-
|-style="background:LightGrey; color:black" valign="center"
![https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography#Lithography_Tool_Package_Training Lithography TPT]
|for working with [[Specific_Process_Knowledge/Lithography|lithography]]
|The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
|-
|-style="background:WhiteSmoke; color:black" valign="center"
![[/Mask Design|Mask Design]]
|no
|The course is recommended all users who intend to design their own masks for lithography.
|-
|-style="background:LightGrey; color:black" valign="center"
![[/TPT SEM|TPT SEM]]
|for getting access to SEMs at DTU Nanolab
|The course includes theory about SEM, as well as training in instrument operation. The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM in building 314 and 346 at DTU Nanolab and for SEM in building 375.
|-
|-style="background:WhiteSmoke; color:black" valign="center"
![[/TPT Dry Etch|TPT Dry Etch]]
|for getting access to dry etch equipment
|The course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom. The course is for all users who intend to perform any kind of dry etching in the cleanroom, and is a prerequisite for training in any of the dry etch equipment.
|-
|-style="background:LightGrey; color:black" valign="center"
![[/TPT Thin Film|TPT Thin Film]]
|for getting access to thin film deposition/growth equipment
|This is a theoretical course introducing the thin film growth and deposition techniques available at DTU Nanolab. The course consists of two lectures. Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training.
|-
|-style="background:WhiteSmoke; color:black" valign="center"
![https://kurser.dtu.dk/course/10868 Ph.d. course: 10868 Methods in micro and nano fabrication]
|for ph.d. students at Nanolab
|This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom. The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab. The TPT courses are a main part of the course. The course gives you 5 ECTS points.
|-
|}
<br clear="all" />
<!--
 
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
!style="background:Black; color:white" width="5%" align ="center"|Course
!style="background:Black; color:white" width="8%" align ="center"|Intro course
!style="background:Black; color:white" width="10%" align ="center"|TPT Lithography
!style="background:Black; color:white" width="10%" align ="center"|Mask Designing
!style="background:Black; color:white" width="10%" align ="center"|TPT SEM
!style="background:Black; color:white" width="10%" align ="center"|TPT Dry Etch
!style="background:Black; color:white" width="10%" align ="center"|TPT Thin Film
!style="background:Black; color:white" width="10%" align ="center"|Ph.d. course no. 10868 "Methods in micro and nanofabrication"
 
|-
|-style="background:WhiteSmoke; color:black" valign="top"
!Mandatory ...
|for working inside the cleanroom
|for working with lithography
|no
|for getting access to SEMs at Nanolab building 346 and 314/307
|for getting access to dry etch equipment
|for getting access to thinfilm deposition/growth equipment
|for ph.d. students at Nanolab
|-
|-style="background:LightGrey; color:black" valign="top"
!Short Course Description
|
|The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
|The course is recommended all users who intend to design their own masks for lithography.
| the course includes theory on SEM, as well as training in instrument operation. The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Nanolab (building 346/314/307).
|the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom. The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment.
|This is a theoretical course introducing the deposition and growth techniques available at DTU NAnolab. The Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training.
|This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom.
|-
 
|-
|-style="background:WhiteSmoke; color:black" valign="top"
!Schedule and How to sign up
|See home page
|
'''Theoretical part'''
* Lecture videos that can be viewed at one's leisure.
* A 1 hour "questions and exercises" session 2 times a month (typically Fridays 09:30-10:30).
* '''Sign up via [https://doodle.com/poll/metywuzqziwps6w3 Q&E session Doodle]'''
'''Practical part'''
* A 3-4 hour training session 2 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 12:30 or 10:00 - 13:30).
* '''Sign up via [https://doodle.com/poll/yd2q9tbzm86by2ct Training session Doodle]'''
|
* Self-study using screen cast videoes demonstrating the use of either CleWin og L-edit.
* An exercise where you are guided through the design of a mask.
* All materials are provided on the TPT Mask design page, see link below .
* An optional ½ hour Q&A session with an expert on mask layout. You can make an appointment after finishing the exercise.
|
'''Theoretical part'''
* A 3-hour lecture. The next lectures will be held Monday the 9th of September 2019 from 9:00 to 12:00. Sign up here: [https://danchip.doodle.com/poll/udmcihbbgudyynfy SEM lecture]
 
'''Practical part'''
* A 2-hour training session, max. 3 persons per session will be planed after the lecture
* A 2-hour one-on-one hands-on session which will request the participant to pass a “driving test” on the SEM. In this session, the participant will have the opportunity to study their own sample


|
'''Theoretical part'''
* 3-hour lecture videos.
* After seeing the videos you must attend a Question&Evaluation session (1-1½ hour), max. 3 persons per session, Please sign up via: [https://doodle.com/poll/awkny9e952arxbxm Dry Etch TPT Lecture doodle].
*The Question&Evaluation session takes place in room: 347-078
'''Practical part'''
* 1½ hour video explaining the equipment software.
* A 2 hour training session, max. 3 persons per session will be planed after the Question&Evaluation session.
|
<b>Theoretical part</b>
'''1<sup>st</sup> lecture (2 hours):'''
*An introduction to thin films
*Material properties
*Thermal oxidation
*Electroplating
<i>Sign up here: [https://danchip.doodle.com/poll/k4pdm2n4bpseww5e Thinfilm lecture part1]</i>
'''2<sup>nd</sup> lecture (3 hours):'''
*Vacuum basics
*PVD (physical vapour deposition)
*CVD (chemical vapour depostion)
*ALD (atomic layer deposition)
<i>Sign up here: [https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf Thinfilm lecture part2]</i>
|
*The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab.
*The TPT courses are a main part of the course.
*The course gives you 5 ECTS points
|-
|-
|-style="background:LightGray; color:black" valign="top"
!Link to course page - info and preparation material.
|[http://www.nanolab.dtu.dk/english/education/courses/introduction-course Introduction course information on the Nanolab homepage]
|[[/TPT Lithography|TPT Lithography]]
|[[/Mask Design|Mask Design]]
|[[/TPT SEM|TPT SEM]]
|[[/TPT Dry Etch|TPT Dry Etch]]
|[[/TPT Thin Film|TPT Thin Film]]
|[https://kurser.dtu.dk/course/10868 10868 Methods in micro and nano fabrication]
|-
|}
<br clear="all" />
-->
<!--
==The Cleanroom Introduction Course==
==The Cleanroom Introduction Course==
For information regarding the Introduction Course, please take a look at the DTU Danchip homepage, a direct link is given here: [http://www.danchip.dtu.dk/english/education/courses/introduction-course]
-->
<!--
==The Lithography TPT ==
DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.
The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
|-
|-
|-style="background:White; color:black; text-align:center"
!colspan="2"|Lithography Tool Package Training
|-
|-
!Schedule
|
<!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>-->
<!--
'''Theoretical part'''
* Lecture videos that can be viewed at one's leisure.
* A 1 hour "questions and exercises" session 2 times a month (typically Fridays 09:30-10:30).
* '''Sign up via [https://doodle.com/poll/metywuzqziwps6w3 Q&E session Doodle]'''
'''Practical part'''
* A 3-4 hour training session 2 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 12:30 or 10:00 - 13:30).
* '''Sign up via [https://doodle.com/poll/yd2q9tbzm86by2ct Training session Doodle]'''
|-
|-
!Location
|
'''Theoretical part'''
* The location of the "questions and exercises" session is room 121A in building 345C.
'''Practical part'''
* The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
|-
|-
!Qualified Prerequisites
|
* Cleanroom safety course at DTU Danchip
* Admission to the cleanroom must be obtained before the training session
* Theoretical part must be completed before the training session.
|-
|-
!Preparations
|
'''Before the "questions and exercises" session'''
* Read [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography] (Available online from DTU campus).
* Watch the [https://www.youtube.com/watch?v=hMgpRSOokxE&list=PLjWVU97LayHCHDueZ8qdT1LXJLGr4wLOa lecture videos] (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos.
'''Before training session'''
* Complete the theoretical part (Q&E)
* Watch the [https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHCX4sz2AH_YiPbNRmkrBYe5 training videos] of spin coating (automatic), exposure (operation + alignment), and development (automatic).
* Study the equipment manuals. The manuals are available in [http://labmanager.danchip.dtu.dk LabManager].
* Study the [[LabAdviser/Courses#Material_for_preparations_and_further_information|TPT process flows]] (first print + alignment).
'''Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below.'''
|-
|-
!Course Responsible
|
The Lithography Group at DTU Danchip [mailto:lithography@danchip.dtu.dk lithography@danchip.dtu.dk].
Sign up for the course using Doodle (links under schedule).
|-
|-
!Learning Objectives
|
* Describe fundamental parts of lithographic processing in a cleanroom, design of process flows
* Authorization to use spin coater, mask aligner, and developer at DTU Danchip
* Calculate relevant process parameters
* Analyze and apply your results of lithographic processing
|-
|}
-->
<!--
===Material for preparations and further information===
{| style="color: black;" width="90%"
| colspan="3" |
|-
| style="width: 20%"|
'''<big>Literature</big>'''
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf  Franssila, 2010, Chapter 9: Optical Lithography]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography]
*[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals]
*[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals]
'''<big>Lecture videos</big>'''
<br/>7 videos, 2:41 hours in total
*[https://www.youtube.com/watch?v=hMgpRSOokxE&list=PLjWVU97LayHCHDueZ8qdT1LXJLGr4wLOa On YouTube]
*[http://podcast.llab.dtu.dk/index.php?id=302 On DTU Podcasts]
'''<big>Lecture slides</big>'''
*[[:Media:Litho_Tool_Package_-_Introduction.pdf|TPT slides: Introduction]]
*[[:Media:Litho_Tool_Package_-_Spin_coating.pdf‎|TPT slides: Spin Coating]]
*[[:Media:Litho_Tool_Package_-_Exposure.pdf|TPT slides: UV Exposure]]
*[[:Media:Litho_Tool_Package_-_Development.pdf‎|TPT slides: Development]]
*[[:Media:Litho_Tool_Package_-_Post_processing.pdf‎|TPT slides: Post-processing]]
*[[:Media:Litho_Tool_Package_-_Process_effects_and_examples.pdf|TPT slides: Process Effects and Examples]]
| style="width: 20%"|
'''<big>Training videos</big>'''
<br/>On YouTube:
*[https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHCX4sz2AH_YiPbNRmkrBYe5 Lithography TPT training videos]
*[https://www.youtube.com/watch?v=_neUkDsQhsM Training Video: Manual spin coater Labspin]
On DTU Podcasts:
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.055_Spin_Coater_GAMMA_UV-720p.mp4 Training Video: Automatic Spin Coater]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part1_operation-720p.mp4 Training Video: UV Mask Aligner Part I (Operation)]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part2_aligning-720p.mp4 Training Video: UV Mask Aligner Part II (Alignment)]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.050_Developer_TMAH_UV-Lithography-720p.mp4 Training Video: Automatic Puddle Developer]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.049_Developer_Manual-720p.mp4 Training Video: Manual Puddle Developer]
'''<big>Manuals</big>'''
*Automatic Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=359 Spin Coater: Gamma UV]
<!--*Manual Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=331 Spin Coater: Manual Standard Resists] -->
<!--
*UV Mask Aligner: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=339 Aligner: MA6 - 2] or [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=44 KS Aligner]
*Automatic Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=329 Developer: TMAH UV-lithography]
<!--*Manual Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=324 Developer: TMAH Manual] -->
<!--
'''<big>Process Flows</big>'''
*[[:Media:Process_Flow_TPT first print.pdf|TPT first print process flow]]
*[[:Media:Process_Flow_TPT alignment.pdf|TPT alignment process flow]]
| style="width: 20%"|
|}
-->
<!--
== The Mask Design TPT ==
DTU Danchip offers a Tool Package Training in Mask Design.
The course is for all users who intend to design their own masks for lithography.
For instructions please download the exercise for the design program you want to learn:
* [[media:TPT- Mask Design - Exercises for Clewin v1.pdf|Exercise for Clewin 5 ]]
* [[media:TPT - Mask Design - Exercises for L-edit v1.pdf |Exercise for L-Edit]]
{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
|-
|-
|-style="background:White; color:black; text-align:center"
!colspan="2"|Mask Design Training
|-
|-
!Schedule
|
* Self-study using screen cast videoes demonstrating the use of either CleWin og L-edit.
* An exercise where you are guided through the design of a mask.
* All materials are provided below.
* An optional ½ hour Q&A session with an expert on mask layout. You can make an appointment after finishing the exercise.
|-
|-
!Location
|
* Anywhere you like. DTU network access required.
|-
|-
!Qualified Prerequisites
|
* Basic knowledge about micro-lithography
* Access to a computer where you can install Clewin or L-edit
** Danchip provide free access to use Clewin 5 through a network license.
** If you want to use L-edit you will need a valid license of your own
* Basic knowledge about micro-fabrication techniques
|-
|-
!Preparations
|
None
|-
|-
!Course Responsible
|
Customer support at DTU Danchip.
If you have questions you can contact us by e-mailing [mailto:danchipsupport@danchip.dtu.dk danchipsupport@danchip.dtu.dk].
|-
|-
!Learning Objectives
|
* Get acquainted with either Clewin 5 or L-edit mask design programs
* construct and manipulate basic shapes (rectangles, polygons, circles etc.)
* use mask layers and hierarchical mask design
* choose mask polarity and orientation for different resist types and Front/Back-side alignment
* select and design appropriate test structures and alignment marks for a process
* make a chip/wafer layout usable for dicing
* export the layout to cif or gds files with appropriate layer names
* make a mask order
|-
|}
<br clear="all" />
===Material for the Mask Design course===
{| style="color: black;" width="90%"
| colspan="3" |
|-
| style="width: 20%" valign="top"|
'''<big>Literature</big>'''
* [[media:Beginners guide to mask design using Clewin v1.4.pdf|Beginners guide to Clewin v1.4]]
* [[media:L-Edit User Guide.pdf |L-Edit User Guide]]
* [[Media:CleWin5UserGuide.pdf| Clewin 5 User Guide]]
* [[Specific Process Knowledge/Pattern Design#CleWin| How to install CleWin]]
| style="width: 20%" valign="top"|
'''<big>Training videos</big>'''<br>
* [https://www.youtube.com/watch?v=2EzB3RS0W80&list=PLgxIvEm0RUtfr_hTfjUHTNrIANxph3hDn Clewin 5]
* [https://www.youtube.com/watch?v=Ejtpzxd4ZzQ&list=PLZtOmgn4lTS4GXkBxXzulI7BR3KxOutm9 L-Edit (5 videos)]
| style="width: 20%" valign="top"|
'''<big>Exercises</big>'''<br>
* [[media:TPT- Mask Design - Exercises for Clewin v1.pdf|Exercise for Clewin 5 ]]
* [[media:Exercise_Pressure_sensor.cif‎|Mask layout file for Clewin Exercise]] (Right click and Use "save link as...")
* [[media:TPT - Mask Design - Exercises for L-edit v1.pdf |Exercise for L-Edit]]
|}
<br clear="all" />
-->
<!--
==The Dry Etch TPT  ==
DTU Nanolab offers a Tool Package Training in dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.
The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.
{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
|-
|-
|-style="background:White; color:black; text-align:center"
!colspan="2"|Dry Etch Tool Package Training
|-
|-
!Schedule
|
'''Theoretical part'''
* A 3-hour lecture. The lecture is on videos. the videos can be found on YouTube, see link below. You can also find the slides with notes below. It can be helpful to print out the lecture slide for your notes and questions while watching the videos. After seeing the videos you must attend a Question&Evaluation session (1-1½ hour), max. 3 persons per session, Please sign up via: [https://doodle.com/poll/awkny9e952arxbxm Dry Etch TPT Lecture doodle]. The Question&Evaluation session takes place in room: 347-078
'''Practical part'''
* A 2 hour training session, max. 3 persons per session will be planed after the Question&Evaluation session.
|-
|-
!Location
|
'''Theoretical part  (the question&evaluation session)'''
* Room: 347-R078
'''Practical part'''
* The training session takes place inside the cleanroom. The meeting point will be in The gowning area.
|-
|-
!Qualified Prerequisites
|
* Cleanroom safety course at DTU Nanolab
* Admission to the cleanroom must be obtained before the training session
|-
|-
!Preparations
|
'''Before the Question&Evaluation session'''
*Watch the lecture videos, see link to the videos below.
*If you are not familiar with dry etching we advice you to read through the "Lecture slides with explanatory text included" [[:File:TPT Dry etching April2018 with notes.pdf]] before watching the videos.
'''Before training session'''
* Watch the training video: TPT hands-on intro
* Watch the screen cast video's for the ASE/AOE software
* Watch the screen cast video's for the DRIE/ICP metal and III-V ICP<br>
These are on YouTube and you can find a link to the videos below
|-
|-
!Course Responsible
|
'''The Dry Etch Group at DTU Nanolab'''
*Jonas Michael-Lindhard
*Berit Herstrøm
If you have questions you can contact us by e-mailing [mailto:dryetch@danchip.dtu.dk dryetch@danchip.dtu.dk].
|-
|-
!Learning Objectives
|
*Know why and when to use dry etching
*Use the dry etchers without harming the machines
*Select the right instrument to use for his/her dry etch processing
*Select an appropriate etch recipe for his/her dry etch processing
*Spot when the recipe needs to be tuned for his/her needs and
*Suggest relevant tuning parameters
|-
|}
<br clear="all" />
===Material for preparations and further information===
{| style="color: black;" width="90%"
| colspan="2" |
|-
| style="width: 20%" valign="top"|
'''<big>Literature</big>'''
* No extra Literature at the moment
'''<big>Slides from Lecture</big>'''
*Lecture powerpoint slide show [[:File:TPT Dry etching April2018.pptx]]
*Lecture slides with explanatory text included [[:File:TPT Dry etching April2018 with notes.pdf]]
| style="width: 20%" valign="top"|
'''<big>Lecture videos  </big>'''<br>
(Watch before the question and evaluation session)<br>
*The 9 lecture videos can be found on YouTube here: [https://www.youtube.com/playlist?list=PLjWVU97LayHBu0XwMGHss5CdEhka6B72U Lecture videos]
'''<big>Pre hands-on training videos </big>'''<br>
(Watch before the hands-on training)
*The 13 pre hands-on training vidoes can be found on You Tube here:[https://www.youtube.com/playlist?list=PLjWVU97LayHC9cl0cuB65m-FlIScBd5t9 Pre hands-on training videos]<br>
<!--
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/TPThands-on_IntroAndWafer_extra-720p.mp4 TPT hands-on intro 6min6s]
Screen cast videos for the DRIE, ICP metal and III-V ICP:
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Overview_HiRes-720p.mp4 Overview 3min25s]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=19b8e1bfcd514c0e01eee7df416a0449&cHash=94480d4d38ce36a2a7621cdfab1054b2 Running processes]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=ac1c07ec933f7f138ec1788569cd568e&cHash=e73d3b0cc4fd5f8763c0c42d96bc7adc Recipes]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=ef3a91e929cce443fb2388bae35acf41&cHash=7d104e10f1da36ec01097059d6ee441b The Bosch Processes]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Automatic_Processing_DRIE-720p.mp4 Automatic processing at the DRIE-Pegasus 14min56s]
Screen cast videos for the ASE and AOE:
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=3c9e59310178de0c548d437712f077c2&cHash=e8c7fe4f4ff14672c970a94ec093cb8e Intro]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=3ec3324cdd5df30e38c4215e138c0f3b&cHash=fee573a639b0f5b6cfd1cd058b8376ec Load and Transfer]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=5dc5bdbcc2842364c6bcb23735cd42e0&cHash=f046044c1603f61fd6af4e0b0264955b Recipe Editor]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=372bc3286dcee3303214c268e14e5663&cHash=ae70bb52ca1c611c9fc7602bcd613ec5 The Bosch Process]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=b4deb2d0030f3141f41a4497375bf861&cHash=a75fab158fec382198b74336cba7bdc4 Run a Process]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=b995b7088690f218f73c24a6bd6361ad&cHash=c6076806edcff2f12036b4e41cbee14d Removing a Wafer from the Load Lock]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=742052c10f9e77778ffab73561b9e840&cHash=44832011bb363b1162900338c834c785 The Process Log]
-->
<!--
| style="width: 20%"|
|}
<br clear="all" />
-->
<!--
==The SEM TPT ==
DTU Nanolab offers a Tool Package Training in Scanning electron microscope (SEM); the course includes theory on SEM, as well as training in instrument operation.
The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Danchip.
{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
|-
|-
|-style="background:White; color:black; text-align:center"
!colspan="2"|SEM Tool Package Training
|-
|-
!Schedule
|
'''Theoretical part'''
* A 3-hour lecture. The next lectures will be held Monday the 9th of September 2019 from 9:00 to 12:00. Sign up here: https://danchip.doodle.com/poll/udmcihbbgudyynfy.
'''Practical part'''
* A 2-hour training session, max. 3 persons per session will be planed after the lecture
* A 2-hour one-on-one hands-on session which will request the participant to pass a “driving test” on the SEM. In this session, the participant will have the opportunity to study their own sample
|-
|-
!Location
|
'''Theoretical part'''
* The location of the lecture will be notified after you have signed up
'''Practical part'''
* The training session takes place building 346 room 907(basement). The meeting point will be at the SEM Supra 1
|-
|-
!Qualified Prerequisites
|
*
|-
|-
!Preparations
|
'''Before the lecture'''
*Read “Scanning Electron Microscopy Primer” by Bob Hafner and some notes that lists some differences between the SEMs described in the primer and the SEMs at Danchip. You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Learning material, or the primer can be found [http://www.charfac.umn.edu/sem_primer.pdf here]
'''Before the first group training session'''
* Watch the training videos: You can find them on YouTube: https://www.youtube.com/playlist?list=PLjWVU97LayHAIltgr7pUoeIkwiPuP4Qsj
'''Before the one-on-one hands-on'''
* Look at the presentation [[Media:Operating_SEM_Supra_1_final.pptx]]
* Read the user manual for SEM Supra 1 Click [http://labmanager.dtu.dk/d4Show.php?id=2180&mach=275 here]
|-
|-
!Course Responsible
|
The SEM Group at DTU Danchip (SEM@danchip.dtu.dk).
Sign up for the course by e-mailing to [mailto:sem@danchip.dtu.dk sem@danchip.dtu.dk].
|-
|-
!Learning Objectives
|
*Prepare samples and safely operate SEM
*Understand possibilities and limitations of SEM
*Explain SEM electron optics and detectors
*Optimize and analyse SEM images
|-
|}
<br clear="all" />
===Slides from the lecture===
*Lecture slide show [[Media:Danchip_SEM_lecture_January2019_LabAdviser.pptx]]
<br clear="all" />
<!-- =[[image:Under_construction.png|200px]]=  -->
<!--
==Thin Film TPT ==
DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.
Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training.
{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
|-
|-
|-style="background:White; color:black; text-align:center"
!colspan="2"|Thin film tool package training (TPT)
|-
|-
!Schedule
|
<b>Theoretical part</b>
'''1<sup>st</sup> lecture (2 hours):'''
*An introduction to thin films
*Material properties
*Overview of different thin film techniques at DTU Nanolab – 1<sup>st</sup> part:
**Thermal oxidation
**Electroplating
<i>Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e</i>
<!-- The date will come after the summer vaction-->
<!--
'''2<sup>nd</sup> lecture (3 hours):'''
*Vacuum basics
*Overview of different thin film techniques at DTU Nanolab – 2<sup>nd</sup>  part:
*PVD (physical vapour deposition)
**E-beam evaporation
**Thermal evaporation
**Sputtering
*CVD (chemical vapour depostion)
**LPCVD (low pressure chemical vapour deposition)
**PECVD (plasma enhanced chemical vapour deposition)
*ALD (atomic layer deposition)
<i>Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf</i>
<!--The date will come after the summer vaction</i>-->
<!--
<b>Practical part</b>
* None
|-
|-
!Location
|
'''Theoretical part'''
* The location of the lectures will be notified in the doodles
|-
|-
!Qualified prerequisites
|
* None
|-
|-
!Preparations
|
* None
|-
|-
!Course responsible
|
*The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
|-
|-
!Learning goals
|
*Be aware of relevant material properties for thin films made in the cleanroom
*Understand importance of correct process pressure (for vacuum processes)
*Understand different thin film techniques
*Compare and be able to select appropriate thin film technique
|-
|}
<br clear="all" />
===Slides from the lectures===
<big>Slides from lecture 1</big>
*Lecture slide show [[Media:1_DTU_Nanolab_Thin_Film_TPT_final_May2019.pptx]]
<big>Slides from lecture 2</big>
*Lecture slide show [[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2019.pptx]]
-->
<!--
== PhD course (10868 Methods in micro and nano fabrication) ==
DTU Nanolab offers a PhD course: [https://kurser.dtu.dk/course/10868 | 10868 Methods in micro and nano fabrication]
This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The
objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication.
To attend the course you MUST have a PhD project (or similar) that require you to work in
the DTU Nanolab cleanroom.
The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab.
The TPT courses presented above is a main part of the course.
The course gives you 5 ECTS points
-->
=Links to training videos=
DTU Nanolab has a YouTube channel where we have gathered all our training videos: [https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ]
We have a number of playlists and some single videos for equipment. You can get an overview here with links to the playlists/videos on You Tube
==Safety and behavior==
*Nanolab introduction course: Safety in the Cleanroom [https://www.youtube.com/watch?v=vq5v4xSqH6Q]
*Safety at DTU Nanolab [https://www.youtube.com/watch?v=mKGJfU57vbE]
*Behaviour in the cleanroom at DTU Nanolab [https://www.youtube.com/watch?v=yCVr53mk7rw]
*Playlist: Craftsmen in the cleanroom/håndværkere i renrummet. [https://www.youtube.com/watch?v=D-0T9X9FFBQ&list=PLjWVU97LayHDKnUd0GrKXdqDhRZuI3iwW]
==Labmanager and Labadviser==
*Playlist: DTU Nanolab systems (Labmanager and Labadviser)[https://www.youtube.com/watch?v=jC5soGfyrZc&list=PLjWVU97LayHA_ZKxvmNfTg1Bp53GX07ER]
==Wet chemistry==
*Training in fume hoods part 1 - Intro and Getting Started [https://www.youtube.com/watch?v=DRPHtBAqpU0]
*Training in fume hoods part 2 - Working With Acids, Bases and Solvents [https://www.youtube.com/watch?v=sqqktgLklSs]
*Training in fume hoods part 3 – Wet benches and errors [https://www.youtube.com/watch?v=bvK1ONO1lwM]
*Using Quick Dump Rinse Baths [https://www.youtube.com/watch?v=edMt18Uwq9o&list=PLjWVU97LayHCS7pcUsx1qt7vroSdHciXV]
*Native Silicon Dioxide Removal [https://www.youtube.com/watch?v=4JD-fSWlZac]
==Lithography==
* Playlist: Lithography TPT lecture videos [https://www.youtube.com/playlist?list=PLjWVU97LayHCp7x9OujmVlZWLAnK4CDFR]
* Playlist: Lithography TPT tool training videos (equipment) [https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHCX4sz2AH_YiPbNRmkrBYe5] (spin coater, mask aligner, developer)
* E-beam lithography at DTU Nanolab [https://www.youtube.com/watch?v=2bFUO201DS4]
* JEOL 9500 EBL Training [https://youtu.be/-wZpUNAq8dA?si=UCWm9rL5SoJE9t1I]
* Playlist: MLA [https://www.youtube.com/watch?v=GyTQNmbev2c&list=PLjWVU97LayHAiCabstMfAUeeWyQoQI_cV]
* Manual spin coater Labspin Training [https://www.youtube.com/watch?v=_neUkDsQhsM]
*Developer: TMAH Manual [https://www.youtube.com/watch?v=btinNzYnLnY&t=2s]
==Thin Film deposition and oxidation==
*Playlist: E-beam evaporator (Temescal) [https://www.youtube.com/watch?v=XNvnv4R8a5o&list=PLjWVU97LayHCQWuQyHwddJnpsEYfQp0wf]
*Lesker dual chamber sputter system at DTU Nanolab [https://www.youtube.com/watch?v=1WHv36coRUc]
*Antistiction treatment [https://www.youtube.com/watch?v=5NrPWXVybXg]
* Furnace training: Oxidation furnace [https://www.youtube.com/watch?v=Hi-1zN1RVqc]


==The Lithography TPT==
==Dry Etch==
*Playlist: Dry Etch TPT - hands-on videos [https://www.youtube.com/watch?v=ovNM4A4E8Q0&list=PLjWVU97LayHC9cl0cuB65m-FlIScBd5t9]
*Playlist: Dry Etch TPT - Lecture videos [https://www.youtube.com/watch?v=6k6QUyDKQQc&list=PLjWVU97LayHBu0XwMGHss5CdEhka6B72U]


==The Dry Etch TPT==
==Characterization==
*Playlist: SEM Training videos for Zeiss Supra SEMs in building 346 [https://www.youtube.com/watch?v=JuFZUsbSHvQ&list=PLjWVU97LayHAIltgr7pUoeIkwiPuP4Qsj]
*Playlist: AFM Icon Nanoscope software training part I/II/III [https://www.youtube.com/watch?v=i6JXopjBiy4&list=PLjWVU97LayHC9xeoG2uv8IaHuY7t-q0Tj]
*Ellipsometer training [https://www.youtube.com/watch?v=EC-oyRhKr0A]
*Playlist: XPS [https://www.youtube.com/playlist?list=PLjWVU97LayHBtOkPCSv8QA-sD4Dbz1jrb]


==The SEM TPT
==Backend tools==
* Disco Dicing saw - blade exchange [https://www.youtube.com/watch?v=0pMraXlfqh8]

Latest revision as of 08:06, 25 September 2024

Feedback to this page: click here

Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.

Courses

We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside along with training for our other facilities. Below you can see the courses that are presently running. The introduction Courses is mandatory for all users that need to use our facilities on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.

Course Mandatory... Short Course Decription
Cleanroom introduction course for working inside the cleanroom See the homepage
Other Nanolabs facilities introduction course for working in other Nanolab facilities See the homepage
Lithography TPT for working with lithography The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
Mask Design no The course is recommended all users who intend to design their own masks for lithography.
TPT SEM for getting access to SEMs at DTU Nanolab The course includes theory about SEM, as well as training in instrument operation. The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM in building 314 and 346 at DTU Nanolab and for SEM in building 375.
TPT Dry Etch for getting access to dry etch equipment The course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom. The course is for all users who intend to perform any kind of dry etching in the cleanroom, and is a prerequisite for training in any of the dry etch equipment.
TPT Thin Film for getting access to thin film deposition/growth equipment This is a theoretical course introducing the thin film growth and deposition techniques available at DTU Nanolab. The course consists of two lectures. Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training.
Ph.d. course: 10868 Methods in micro and nano fabrication for ph.d. students at Nanolab This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom. The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab. The TPT courses are a main part of the course. The course gives you 5 ECTS points.



Links to training videos

DTU Nanolab has a YouTube channel where we have gathered all our training videos: [1]

We have a number of playlists and some single videos for equipment. You can get an overview here with links to the playlists/videos on You Tube

Safety and behavior

  • Nanolab introduction course: Safety in the Cleanroom [2]
  • Safety at DTU Nanolab [3]
  • Behaviour in the cleanroom at DTU Nanolab [4]
  • Playlist: Craftsmen in the cleanroom/håndværkere i renrummet. [5]

Labmanager and Labadviser

  • Playlist: DTU Nanolab systems (Labmanager and Labadviser)[6]

Wet chemistry

  • Training in fume hoods part 1 - Intro and Getting Started [7]
  • Training in fume hoods part 2 - Working With Acids, Bases and Solvents [8]
  • Training in fume hoods part 3 – Wet benches and errors [9]
  • Using Quick Dump Rinse Baths [10]
  • Native Silicon Dioxide Removal [11]

Lithography

  • Playlist: Lithography TPT lecture videos [12]
  • Playlist: Lithography TPT tool training videos (equipment) [13] (spin coater, mask aligner, developer)
  • E-beam lithography at DTU Nanolab [14]
  • JEOL 9500 EBL Training [15]
  • Playlist: MLA [16]
  • Manual spin coater Labspin Training [17]
  • Developer: TMAH Manual [18]

Thin Film deposition and oxidation

  • Playlist: E-beam evaporator (Temescal) [19]
  • Lesker dual chamber sputter system at DTU Nanolab [20]
  • Antistiction treatment [21]
  • Furnace training: Oxidation furnace [22]

Dry Etch

  • Playlist: Dry Etch TPT - hands-on videos [23]
  • Playlist: Dry Etch TPT - Lecture videos [24]

Characterization

  • Playlist: SEM Training videos for Zeiss Supra SEMs in building 346 [25]
  • Playlist: AFM Icon Nanoscope software training part I/II/III [26]
  • Ellipsometer training [27]
  • Playlist: XPS [28]

Backend tools

  • Disco Dicing saw - blade exchange [29]
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=LabAdviser/Courses&oldid=50092"