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LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition/EMT Procces flow: Difference between revisions

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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Technology_Research/Fabrication_of_Hyperbolic_Metamaterials_using_Atomic_Layer_Deposition/EMT_Procces_flow click here]'''
<i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br>
All images and photos on this page belongs to <b>DTU Nanolab</b> and <b>DTU Electro</b> (previous DTU Fotonik).<br></i>
=Fabrication of Hyperbolic Metamaterials by ALD: Aluminum Oxide/Titanium Oxide Multilayers for EMT Application=
The fabrication and characterization described below were conducted in <b>2013-2016 by Evgeniy Shkondin, DTU Nanolab</b>.<br>
====Procces flow description====
====Procces flow description====


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|XPS inspection for elemental trace analysis
|XPS inspection for elemental trace analysis
|XPS can be used in depth profile mode. Ar<sup>+</sup> ions erodes the surface of multilayers, allowing the inspection of each layer.
|XPS can be used in depth profile mode. Ar<sup>+</sup> ions erodes the surface of multilayers, allowing the inspection of each layer.
||Equipment used: [[Specific_Process_Knowledge/Characterization/XPS#XPS-ThermoScientific|XPS-ThermoScientific]]. Results of depth profiling presented: [[Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/ALD_multilayers#Investigation_of_chemical_composition_in_multilayers_system| XPS results]] .
||Equipment used: [[Specific_Process_Knowledge/Characterization/XPS/K-Alpha|XPS K-Alpha]]. Results of depth profiling presented: [[Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/ALD_multilayers#Investigation_of_chemical_composition_in_multilayers_system| XPS results]] .
  |[[image:XPS_depth_Al_10_AL.jpg|250x350px|center]]
  |[[image:XPS_depth_Al_10_AL.jpg|250x350px|center]]
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