Specific Process Knowledge/Lithography/Coaters/labspin05: Difference between revisions
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|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Spin coating of epoxy based resists | *Spin coating of epoxy-based resists | ||
**SU-8 series | **SU-8 series | ||
**SU-8 3000 series | **SU-8 3000 series | ||
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**mr-DWL series | **mr-DWL series | ||
*Spin coating of other resists | *Spin coating of other resists | ||
*EBR of round substartes | |||
|- | |- | ||
!style="background:silver; color:black;" align="center" width="60"|Resist | !style="background:silver; color:black;" align="center" width="60"|Resist | ||