Specific Process Knowledge/Characterization/Dektak 150

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Dektak150 (Stylus Profiler)

Stylus profiler:Dektak150, currently located in building 451, room 913 (as of 2023).

The stylus profiler Dektak150 is intended for profile measurements on samples outside the cleanroom. The Dektak150 is especially well suited for measuring soft samples as it can be adjusted to apply lower force than the other stylus profilers at Nanolab.

The user manual, technical information and contact information can be found in LabManager.

The computer is not connected to the network but data can be saved on a dedicated USB and transfered to a computer on the network.

We have currently no verified information about the measurement accuracy/uncertainity for this profilometer, but only for the Dektak XTA.

Performance and Process Parameters

Purpose	Profiler for measuring micro structures|	Single line profiles Surface roughness on a line scan
Location	Building 347, room 080	North-East corner of the building, in the basement When you enter the building from the East, you enter directly into the basement.
Performance	Scan range x y	Line scan x: 50 µm to 55 mm in a single scan
	Scan range z	50 Å to 1 mm
	Resolution x y	Theoretically down to 0.003 µm (in practice the resolution is limited by the tip size)
	Resolution z	1Å (@65kÅ), 10Å (@655 kÅ), 80 Å (@5240 kÅ), 160 Å (@1mm)
	Maximum sample thickness	100 mm
Hardware settings	Tip radius	5 µm 45o cone 0.2 µm 45o cone on request
Substrates	Substrate size	Up to 6"
	Substrate materials allowed	In principle all materials