Jump to content

Specific Process Knowledge/Lithography/Baking: Difference between revisions

Thes (talk | contribs)
No edit summary
Thes (talk | contribs)
No edit summary
 
Line 189: Line 189:


|
|
Spincoater: Gamma ebeam & UV:<br />  https://labmanager.dtu.dk/view_binary.php?fileId=4431
Spincoater: Gamma ebeam & UV:<br />  https://labmanager.dtu.dk/view_binary.php?type=data&mach=417


Spincoater: Gamma UV:<br />  https://labmanager.dtu.dk/view_binary.php?fileId=4432
Spincoater: Gamma UV:<br />  https://labmanager.dtu.dk/view_binary.php?type=data&mach=359


Developer: TMAH UV-lithography:<br /> https://labmanager.dtu.dk/view_binary.php?fileId=4434
Developer: TMAH UV-lithography:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=329


Spincoater: Süss stepper:<br /> https://labmanager.dtu.dk/view_binary.php?fileId=4433
Spincoater: Süss stepper:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=279


Developer: Stepper:<br /> http://labmanager.dtu.dk/view_binary.php?fileId=4435
Developer: Stepper:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=328