Specific Process Knowledge/Lithography/Baking: Difference between revisions
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Spincoater: Gamma ebeam & UV:<br /> https://labmanager.dtu.dk/view_binary.php? | Spincoater: Gamma ebeam & UV:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=417 | ||
Spincoater: Gamma UV:<br /> https://labmanager.dtu.dk/view_binary.php? | Spincoater: Gamma UV:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=359 | ||
Developer: TMAH UV-lithography:<br /> https://labmanager.dtu.dk/view_binary.php? | Developer: TMAH UV-lithography:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=329 | ||
Spincoater: Süss stepper:<br /> https://labmanager.dtu.dk/view_binary.php? | Spincoater: Süss stepper:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=279 | ||
Developer: Stepper:<br /> | Developer: Stepper:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=328 | ||