Specific Process Knowledge/Lithography/Baking: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page% | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Lithography/Baking click here]''' | ||
[[Category: Equipment|baking]] | [[Category: Equipment|baking]] | ||
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Spincoater: Gamma ebeam & UV:<br /> | Spincoater: Gamma ebeam & UV:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=417 | ||
Spincoater: Gamma UV:<br /> | Spincoater: Gamma UV:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=359 | ||
Developer: TMAH UV-lithography:<br /> | Developer: TMAH UV-lithography:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=329 | ||
Spincoater: Süss stepper:<br /> | Spincoater: Süss stepper:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=279 | ||
Developer: Stepper:<br /> | Developer: Stepper:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=328 | ||
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The user manual, and contact information can be found in LabManager: | The user manual, and contact information can be found in LabManager: | ||
[ | [https://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=336 Hotplate: 90-110C] - '''requires login''' | ||
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The user manual, and contact information can be found in LabManager: | The user manual, and contact information can be found in LabManager: | ||
[ | [https://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=122 Hotplate 1 (SU8)] - '''requires login''' | ||
[ | [https://labmanagerp.dtu.dk/function.php?module=Machine&view=view&mach=124 Hotplate 2 (SU8)] - '''requires login''' | ||
[ | [https://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=453 Hotplate 3 (SU8)] - '''requires login''' | ||
[ | [https://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=454 Hotplate 4 (SU8)] - '''requires login''' | ||
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'''Information about the Süss MicroTec Gamma tools can be found in labadviser:''' | '''Information about the Süss MicroTec Gamma tools can be found in labadviser:''' | ||
*[ | *[https://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_Gamma_UV Spin Coater: Gamma UV] | ||
*[ | *[https://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_Gamma_E-beam_and_UV Spin Coater: Gamma e-beam & UV] | ||
*[ | *[https://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Development#Developer_TMAH_UV-lithography Developer TMAH UV-lithography] | ||
*[ | *[https://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/DUVStepperLithography#S.C3.9CSS_Spinner-Stepper Spin Coater: Süss Stepper] | ||
*[ | *[https://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/DUVStepperLithography#Developer_TMAH_Stepper Developer: TMAH Stepper] | ||
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The user manual, and contact information can be found in LabManager: | The user manual, and contact information can be found in LabManager: | ||
[ | [https://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=119 Oven: 110C - 250C] - '''requires login''' | ||
<br clear="all" /> | <br clear="all" /> | ||
{{:Specific Process Knowledge/Lithography/Pretreatment/Oven_250C}} | {{:Specific Process Knowledge/Lithography/Pretreatment/Oven_250C}} | ||