Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions
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'''All links to Kemibrug (SDS) and Labmanager Including APV requires login. | '''All links to Kemibrug (SDS) and Labmanager Including APV requires login. | ||
'''All measurements on this page has been made by Nanolab staff. | '''All measurements on this page has been made by Nanolab staff. | ||
[[Category: Equipment|Etch Wet Aluminium Etch]] | [[Category: Equipment|Etch Wet Aluminium Etch]] | ||
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|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!Batch size | !Batch size | ||
|1-25 wafers at a time | |1-25 wafers at a time | ||
|1-25 wafers at a time | |1-25 wafers at a time | ||
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