Specific Process Knowledge/Thermal Process/Resist Pyrolysis Furnace: Difference between revisions

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	===<span style="color:Red">EXPIRED!		===<span style="color:Red">EXPIRED!
	~~The Resist Pyrolysis~~ furnace ~~has been~~ removed from the cleanroom August 2019. Use the Multipurpose Anneal furnace instead.</span>===		This page contains information about an old resist pyrolysis furnace that was removed from the cleanroom August 2019. Use the new Resist Pyrolysis furnace (former Multipurpose Anneal furnace) instead.</span>===