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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Optical_microscope click here]'''  
{{cc-nanolab}}
 
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Optical_microscope click here]'''  


[[Category: Equipment|Characterization Optical mi]]
[[Category: Equipment|Characterization Optical mi]]
[[Category: Characterization|Optical mi]]
[[Category: Characterization|Optical mi]]


{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
|-
|-style="background:white; color:black; vertical-align:middle; text-align:center;"
|


{| border="1" cellspacing="0" cellpadding="3"
!Noco IR
!  
!Leica<br>INM 100
! Zeiss Jenatech (strain)
!Zeiss<br>Jenatech
! Nikon SMZ 1500
!Nikon Eclipse<br>L200 #1
! Leica S8 APO
!Nikon Eclipse<br>L200 #2
! Leitz Medilux
!Nikon Eclipse<br>L200N #3
! Zeiss Axiotron 2
!Nikon Eclipse<br>L200N #4
! Zeiss Jenatech (particles measurements)
!Nikon<br>ME 600
! Noco IR microscope
!Leica<br>S8 APO
! Nikon SMZ 1000
!Zeiss<br>Axiotron
! Nikon ME 600
!Olympus<br>MX63
! Nikon Eclipse L200
! Nikon Eclipse L200 (2)
! Nikon ECLIPSE L200N 3
! Nikon ECLIPSE L200N 4
|-
|-
|-
|-style="background:white; color:black; vertical-align:middle; text-align:center;"
|
|
|[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|left]]
|[[image:Noco IR microscope.jpg|100x100px|thumb|center]][[image:Noco IR microscope_1.jpg|100x100px|thumb|center]]
[[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|left]]
|[[image:LeicaINM100.jpg|100x100px|thumb|center]]
|[[image:Nikon SMZ 1500.jpg|100x100px|thumb|left]]
|[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|center]][[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|center]]
|[[image:Leica S8 APO.jpg|100x100px|thumb|left]]
|[[image:Nikon Eclipse L200.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|center]]
|[[image:Leitz Medilux.jpg|100x100px|thumb|left]]
|[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|center]]
|[[image:Zeiss Axiotron.jpg|100x100px|thumb|left]]
|[[image:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|center]]
[[image:Zeiss Axiotron_1.jpg|100x100px|thumb|left]]
|[[image:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|center]]
|[[image:Zeiss Jenatech particle measurement_2.jpg|100x100px|thumb|left]]
|[[image:Nikon ME 600.jpg|100x100px|thumb|center]][[image:Nikon ME 600_1.jpg|100x100px|thumb|center]]
[[image:Zeiss Jenatech particle measurement_1.jpg|100x100px|thumb|left]]
|[[image:Leica S8 APO.jpg|100x100px|thumb|center]]
|[[image:Noco IR microscope.jpg|100x100px|thumb|left]]
|[[image:Zeiss Axiotron.jpg|100x100px|thumb|center]][[image:Zeiss Axiotron_1.jpg|100x100px|thumb|center]]
[[image:Noco IR microscope_1.jpg|100x100px|thumb|left]]
|[[File:View front right .jpg|100x100px|thumb|center]]
|[[image:Nikon SMZ 1000.jpg|100x100px|thumb|left]]
|-
||[[image:Nikon ME 600.jpg|100x100px|thumb|left]]
 
[[image:Nikon ME 600_1.jpg|100x100px|thumb|left]]
|-
|[[image:Nikon Eclipse L200.jpg|100x100px|thumb|left]]
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
[[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|left]]
!Location
|[[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|left]]
[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|left]]
|[[File:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|left]]
|[[File:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|left]]
|-  
|'''Location'''
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|-  
|'''Special features'''
|Wollastron prism
|Stereoscopic microscope
|Stereoscopic microscope


|No
|346-901
|No
|346-901
|No
|cleanroom<br>D-3
|Infra red (IR) camera
|cleanroom<br>D-3
|Stereoscopic microscope
|cleanroom<br>A-1
|Wollastron prism
|cleanroom<br>D-3
|Motorized stage
|cleanroom<br>E-5
|cleanroom<br>F-1
|cleanroom<br>Cx1
|cleanroom<br>F-3
|cleanroom<br>E-4
|-
 
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
!Responsible<br>group
|Wet chemistry
|Wet chemistry
|Lithography
|Lithography
|Lithography
|Lithography
|Lithography
|Lithography
|Lithography
|Lithography
|Lithography
|-
 
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
!Objectives
|
*2.5x
*10x
*20x
*50x
|
*2.5x
*5x
*10x
*20x
*50x
|
*5x
*10x
*20x
*50x
*100x
|
*2.5x
*5x
*10x
*20x
*50x
|
*2.5x
*5x
*10x
*20x
*50x
*100x
|
*2.5x
*5x
*10x
*20x
*50x
*100x
|
*2.5x
*5x
*10x
*20x
*50x
*100x
|
*5x
*10x
*20x
*50x
*100x
|Zoom 1x - 8x
|
*5x
*10x
*20x
*50x
|
*1.25x
*5xBD
*10xBD
*20xBD
*50xBD
*100xBD
|-


[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|auto scan guide]]
|No
|No
|No
|-
|-
|'''Ocular magnification'''
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
!Ocular
|10x
|10x
|10x
|No
|No
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|No
|10x
|10x
|10x
|10x
Line 91: Line 156:
|10x
|10x
|-
|-
|'''Objective magnification'''
 
|2.5x, 5x, 10x, 20x, 50x
|-
|Zoom 100x
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
|Zoom 80x
!Special<br>features
|2.5x, 5x, 10x, 20x, 50x
|IR imaging
|5x, 10x, 20x, 50x
|
|5x, 10x, 20x, 50x, 100x
|
|2.5x, 5x, 20x, 50x
|
|Zoom 100x
 
|5x, 10x, 20x, 50x, 100x
 
|2.5x, 5x, 10x, 20x, 50x, 100x
<!--
|2.5x, 5x, 10x, 20x, 50x
*Motorized stage
|2.5x, 5x, 10x, 20x, 50x, 100x
*'''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Auto scan guide]]'''
|2.5x, 5x, 10x, 20x, 50x, 100x
-->
|
|
|
|
|Stereoscopic
|
|
|-
|-
|'''Bright field'''
|Yes
|No
|No
|Yes
|Yes
|Yes
|Yes
|No
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|-
|'''Dark field'''
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
|Yes
!Contrast<br>mechanisms
|No
|
|No
*Polarizer
|No
*Brightfield
|Yes
|
|Yes
*Brightfield
|No
*Darkfield
|No
|
|Yes
*Polarizer
|Yes
*Brightfield
|Yes
|
|Yes
*Brightfield
|Yes
*Darkfield
|
*Brightfield
*Darkfield
|
*Polarizer
*Brightfield
*Darkfield
|
*Polarizer
*Brightfield
*Darkfield
|
*Polarizer
*Brightfield
*Darkfield
|
*Brightfield
|
*Brightfield
*Darkfield
|
*Polarizer
*Brightfield
*Darkfield
|-
|-
|'''Polarizer'''
 
|Yes
|No
|No
|No
|No
|Yes
|No
|No
|Yes
|No
|No
|No
|No
|-
|-
|'''Episcopic light (reflected light)'''
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
|Yes
!Illumination<br>modes
|Yes
|
|Yes
*Episcopic
|Yes
*Diascopic
|Yes
|
|Yes
*Episcopic
|Yes
*Diascopic
|Yes
|
|Yes
*Episcopic
|Yes
*Diascopic
|Yes
|
|Yes
*Episcopic
|Yes
*Diascopic
|
*Episcopic
*Diascopic
|
*Episcopic
*Diascopic
|
*Episcopic
*Diascopic
|
*Episcopic
|
*Episcopic
|
*Episcopic
*Diascopic
|
*Episcopic
*Diascopic
|-
|-
|'''Diascopic light (transmitted light)'''
 
|No
|Yes
|No
|Yes
|Yes
|No
|Yes
|No
|No
|Yes
|Yes
|Yes
|Yes
|-
|-
|'''View with eye'''
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
|Yes
!Camera
|Yes
|IR camera
|Yes
|DS-Fi2
|Yes
|None
|Yes
|DS-Fi1
|Yes
|DS-Fi1
|Yes
|
|Yes
*DS-Fi2
|Yes
*C-mount,<br>0.7x relay
|Yes
|
|Yes
*DS-Fi2
|Yes
*C-mount,<br>0.7x relay
|Yes
|DS-Fi2
|None
|Infinity X
|
*DP23-CU
*C-mount
|-
|-
|'''View on screen (camera)'''
 
|Yes
|No
|No
|Yes
|Yes
|No
|Yes (IR)
|No
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|-
|'''Measurement option'''
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
|No
!Analysis<br>software
|No
|None
|No
|NIS-D
|No
|None
|Yes
|NIS-BR
|No
|NIS-D
|No
|NIS-D
|No
|NIS-D
|No
|NIS-D
|Yes
|None
|Yes
|DeltaPix
|Yes
|PRECiV Core
|Yes
|-
|-
|}
|}


<br clear="all" />


It is possible to make an automated scanning of a full wafer on the Nikon Eclipse L200 with motorized stage (located in D-3) '''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Nikon Eclipse L200 auto scan guide]]'''
There are also two optical microscopes in building 451, a stereo microscope and a transmission microscope, that were both previously located in Packlab. Please ask staff / the BioMic group for details.

Latest revision as of 09:52, 1 April 2026

The content on this page, including all images and pictures, was created by DTU Nanolab staff, unless otherwise stated.

Feedback to this page: click here

Noco IR Leica
INM 100 		Zeiss
Jenatech 		Nikon Eclipse
L200 #1 		Nikon Eclipse
L200 #2 		Nikon Eclipse
L200N #3 		Nikon Eclipse
L200N #4 		Nikon
ME 600 		Leica
S8 APO 		Zeiss
Axiotron 		Olympus
MX63
Location 346-901 346-901 cleanroom
D-3 		cleanroom
D-3 		cleanroom
A-1 		cleanroom
D-3 		cleanroom
E-5 		cleanroom
F-1 		cleanroom
Cx1 		cleanroom
F-3 		cleanroom
E-4
Responsible
group 		Wet chemistry Wet chemistry Lithography Lithography Lithography Lithography Lithography Lithography Lithography Lithography Lithography
Objectives
  • 2.5x
  • 10x
  • 20x
  • 50x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
 Zoom 1x - 8x
  • 5x
  • 10x
  • 20x
  • 50x
  • 1.25x
  • 5xBD
  • 10xBD
  • 20xBD
  • 50xBD
  • 100xBD
Ocular 10x 10x 10x 10x 10x 10x 10x 10x 10x 10x 10x
Special
features 		IR imaging


Stereoscopic
Contrast
mechanisms
  • Polarizer
  • Brightfield
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Brightfield
  • Darkfield
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Darkfield
  • Brightfield
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Darkfield
Illumination
modes
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Episcopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
Camera IR camera DS-Fi2 None DS-Fi1 DS-Fi1
  • DS-Fi2
  • C-mount,
    0.7x relay
  • DS-Fi2
  • C-mount,
    0.7x relay
 DS-Fi2 None Infinity X
  • DP23-CU
  • C-mount
Analysis
software 		None NIS-D None NIS-BR NIS-D NIS-D NIS-D NIS-D None DeltaPix PRECiV Core


There are also two optical microscopes in building 451, a stereo microscope and a transmission microscope, that were both previously located in Packlab. Please ask staff / the BioMic group for details.

Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Optical_microscope&oldid=55363"