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Specific Process Knowledge/Lithography/UVExposure: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Line 76: Line 76:
|style="background:LightGrey; color:black"|Alignment accuracy
|style="background:LightGrey; color:black"|Alignment accuracy
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*TSA ±2µm
*TSA: ±2 µm
*BSA ±5µm
*BSA: ±5 µm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*TSA ±1µm
*TSA: ±1 µm
*BSA ±2µm
*BSA: ±2 µm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
±2µm<br>(±1µm possible)
±2 µm<br>(±1 µm possible)
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*TSA ±0.5µm
*TSA: ± 0.5 µm
*BSA ±1µm
*BSA: ± 1 µm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*TSA ±0.5µm
*TSA: ± 0.5 µm
*BSA ±1µm
*BSA: ± 1 µm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
±1µm
±1 µm
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