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=The SEM Tool Package Training =
=The SEM Tool Package Training =


DTU Nanolab offers a Tool Package Training (TPT) course in Scanning Electron Microscopy (SEM). This course is mandatory for academic users who want to perform SEM imaging at Nanolab unless you will only use the [[Specific Process Knowledge/Characterization/SEM_Tabletop_1|Hitachi TM3030 tabletop SEM]]. The course includes theory on scanning electron microscopy (including some reading and online lectures) followed by by quizzes for each section, as well as training videos for equipment operation. After completing the online course, a practical group training can be arranged.  
DTU Nanolab offers a Tool Package Training (TPT) course in Scanning Electron Microscopy (SEM). This course is mandatory for academic users who want to perform SEM imaging at Nanolab unless you will only use the [[Specific Process Knowledge/Characterization/SEM_Tabletop_1|Hitachi TM3030 tabletop SEM]]. The course includes theory on scanning electron microscopy (including some reading and online lectures) followed by by quizzes for each section, as well as training videos for equipment operation. After completing the online course, practical training can be arranged.  


The SEMs at DTU Nanolab are located in building 314/307, 346, and 375. Different SEMs are used for different applications, and the practical training requirements differ from building to building and from SEM to SEM. The main SEM and TEM building is 314/307, which is open for all users from academia and industry. The SEM in building 375 is owned by DTU Offshore and the SEMs in building 346 are reserved for users who work with fabrication at Nanolab, i.e., in the cleanroom or the other labs in buildings 346 and 347.  
The SEMs at DTU Nanolab are located in building 314/307 and 346. Different SEMs are used for different applications, and the practical training requirements differ from building to building and from SEM to SEM. The main SEM and TEM building is 314/307, which is open for all users from academia and industry. The SEMs in building 346 are reserved for users who work with fabrication at Nanolab, i.e., in the cleanroom or the other labs in buildings 346 and 347.  
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==Course Plan (Building 314/307 and 375)==
==Course Plan (Building 314/307)==
To gain access to the microscopes in building 314, 307 or 375, please register [https://www.nanolab.dtu.dk/access/characterization/electron-microscopy-equipment here] and sign up for the theoretical online course (SEM TPT) in DTU Learn [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here].  
SEMs for all users from academia and industry; main SEM facility at DTU Nanolab. To gain access to the microscopes in building 314/307, please register [https://www.nanolab.dtu.dk/access/characterization/electron-microscopy-equipment here] and sign up for the theoretical online course (SEM TPT) in DTU Learn [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here].  


You will receive an invitation to a meeting at 314 to discuss your project and requirements. The structure of the hands-on training depends heavily on the type of sample, type of characterization, i.e., which SEM, detectors, and sample preparation technique will be used, as well as previous user experience. <br>
You will receive an invitation to a meeting at 314 to discuss your project and requirements. The structure of the hands-on training depends heavily on the type of sample, type of characterization, i.e., which SEM, detectors, and sample preparation technique will be used, as well as previous user experience. <br>
# Register to gain access to building 314 ([https://www.nanolab.dtu.dk/access/characterization/electron-microscopy-equipment here])
# Apply for access to SEMs in building 314/307 ([https://www.nanolab.dtu.dk/access/characterization/electron-microscopy-equipment here])
# Meeting at 314 to discuss your project
# Register for SEM TPT in DTU Learn ([https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here])
# Register for SEM TPT in DTU Learn ([https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here])
# Meeting at 314 to discuss your project
# SEM TPT: Online reading & lecture videos (theory)  
# SEM TPT: Online reading & lecture videos (theory)
# SEM TPT: Quiz
# SEM TPT: Quizzes for each section
# Introduction course for Nanolab facility (NOT Cleanroom) in DTU Learn
# Safety course for access to building 314
# Introduction course for access to building 314/307 in DTU Learn
# Individual hands-on training  
# Individual hands-on training
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'''Commercial Users:'''
 
The theoretical part of the SEM TPT (3. and 4.) is not mandatory for commercial users, though we strongly recommend it for new users. <BR>


==Course Plan (Building 346) ==
==Course Plan (Building 346) ==


To gain access to the SEMS in building 346 you need to have access to the cleanroom (please sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/introduction-course here]) or access to the basement in 346 (please sign up [https://www.nanolab.dtu.dk/access/other-facilities/form-sign-up-other-facilities here]). Please sign up for the theoretical online course (SEM TPT) in DTU Learn [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here]. [[File:SEM TPT.png|How to get access to SEM in building 346|alt=graphical description of SEM TPT layout (building 346)|thumb]]
SEM related to fabrication carried out at DTU Nanolab. To gain access to the SEMS in building 346 you need to have access to the cleanroom (please sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/introduction-course here]) or access to the basement in 346 (please sign up [https://www.nanolab.dtu.dk/access/other-facilities/form-sign-up-other-facilities here]). Please sign up for the theoretical online course (SEM TPT) in DTU Learn [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here]. [[File:SEM TPT.png|How to get access to SEM in building 346 ''(click on the picture to enlarge)''|alt=graphical description of SEM TPT layout (building 346)|thumb]]
# Register gain access to building 346 (basment 346 or cleanroom)  
# Register to gain access to building 346 (basement 346 or cleanroom)  
# Register for SEM TPT in DTU Learn ([https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here])
# Register for SEM TPT in DTU Learn ([https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here])
# Online reading & lecture videos (theory)
# SEM TPT: Online reading & lecture videos (theory)  
# Quizzes for each section
# SEM TPT: Quiz
# Online training videos (equipment operation)
# Online training videos on equipment operation
# Read SEM Supra 1 (or SEM Supra 3) manual
# Read SEM Supra 1 manual
# Group hands-on training (SEM Supra 1 in basement 346)*
# Group hands-on training on SEM Supra 1 (basement 346) requested via [mailto:sem@nanolab.dtu.dk sem@nanolab.dtu.dk] (*)
# Individual hands-on training (''commonly'' SEM Supra 1 in basement 346 or SEM Supra 3 in cleanroom)  
# Individual hands-on training on SEM Supra 1 (basement 346) or SEM Supra 3 (cleanroom) requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]
 
(*) If a group hands-on training session is timely available, company users are expected to join the group session, else two individual hands-on training sessions can be arranged. ''Individual hands-on training can be requested via training@nanolab.dtu.dk.''


As an alternative to watching the lecture videos online, an in-person lecture is offered on an irregular basis, mostly in combination with PhD courses or 3-week courses. You can contact the [mailto:sem@nanolab.dtu.dk SEM group] to inquire for a date or check the course page in DTU Learn.


''Individual hands-on training can be requested after completion of the theoretical course via [mailto:sem@nanolab.dtu.dk sem@nanolab.dtu.dk].''
(*) If a group hands-on training session not available in a timely manner, two individual hands-on training sessions can be arranged. <br>
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<br>'''Commercial Users:'''  
'''Commercial Users:''' The theoretical part of the SEM TPT (3. and 4.) is not mandatory for commercial users, though we strongly recommend it for new SEM operators. All users must watch the online training videos explaining the equipment operation (5.) specific to our Zeiss SEMs and read the manual (6.) of the relevant SEM prior to the hands-on training. If you do not think a group training (7.) is appropriate for your company, please contact the [mailto:sem@nanolab.dtu.dk 346 SEM group] to arrange two individual trainings.
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'''Qualifying Prerequisites'''
* Cleanroom safety course (sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/introduction-course here]),  '''or'''
* Intro building 346 (sign up [https://www.nanolab.dtu.dk/access/other-facilities/form-sign-up-other-facilities here], choose option: ''"Basement, polisher lapper/155 and dicer/157"'')<br>
===Material for preparations and further information===


The theoretical part of the SEM TPT (3. and 4.) is not mandatory for commercial users, though we strongly recommend it for new users. All users must watch the online training videos explaining the equipment operation (5.) of our SEMs and read the manual of the respective SEM prior to the hands-on training.
''Please watch before the first hands-on training (10 videos, total duration < 30 min):''
* Zeiss SEM Equipment Operation (in DTU Learn) [https://learn.inside.dtu.dk/d2l/le/content/56927/Home Zeiss Supra SEM videos]
* Zeiss SEM Equipment Operation (Identical to the above, playlist on Youtube if you prefer) [https://www.youtube.com/watch?v=JuFZUsbSHvQ&list=PLjWVU97LayHAIltgr7pUoeIkwiPuP4Qsj Zeiss Supra SEM videos on Youtube]




'''Qualifying Prerequisites (building 346)'''
''Please read the SEM manuals before the second hands-on training:''
* Cleanroom safety course (sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/introduction-course here]), '''or'''
* [https://labmanager.dtu.dk/d4mb/show.php?dokId=2180&mach=275 SEM Supra 1 manual] ''(outside cleanroom: 346/904)''
* Intro building 346 (sign up [https://www.nanolab.dtu.dk/access/other-facilities/form-sign-up-other-facilities here], choose option: "Basement, polisher lapper/155 and dicer/157")
* [https://labmanager.dtu.dk/d4mb/show.php?dokId=3389&mach=327 SEM Supra 2 manual]
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* [https://labmanager.dtu.dk/d4mb/show.php?dokId=4260&mach=361 SEM Supra 3 manual]
* [https://labmanager.dtu.dk/d4mb/show.php?dokId=20052&mach=512 SEM Gemini 1 manual]
* [https://labmanager.dtu.dk/d4mb/show.php?dokId=4950&mach=416 SEM Tabletop 1 manual] ''(outside cleanroom: 346/151)''
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==General course info==
==General course info==
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If you have questions you can contact us via [mailto:sem@nanolab.dtu.dk SEM@nanolab.dtu.dk].
If you have questions you can contact us via [mailto:sem@nanolab.dtu.dk SEM@nanolab.dtu.dk].
==Pre hands-on training videos for building 346==
''(watch before the first hands-on training)''
* 10 hands-on training vidoes (total duration < 30 min) can be found on YouTube: [https://www.youtube.com/playlist?list=PLjWVU97LayHAIltgr7pUoeIkwiPuP4Qsj Equipment operation training videos]
'''SEM Manuals (346)''' ''(Read before the second hands-on training)''
* [https://labmanager.dtu.dk/d4mb/show.php?dokId=2180&mach=275 SEM Supra 1 manual ''(outside cleanroom: 346/904)'']
* [https://labmanager.dtu.dk/d4mb/show.php?dokId=3389&mach=327 SEM Supra 2 manual]
* [https://labmanager.dtu.dk/d4mb/show.php?dokId=4260&mach=361 SEM Supra 3 manual]
* [https://labmanager.dtu.dk/d4mb/show.php?dokId=20052&mach=512 SEM Gemini 1 manual]
* [https://labmanager.dtu.dk/d4mb/show.php?dokId=4950&mach=416 SEM Tabletop 1 manual ''(outside cleanroom: 346/151)'']
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