LabAdviser/314/Microscopy 314-307/FIB/Hydra: Difference between revisions
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[[Category:314]] | [[Category:314]] | ||
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=Helios 5 Hydra UX DualBeam= | =Helios 5 Hydra UX DualBeam= | ||
The Helios 5 Hydra UX DualBeam consists of two independent charged particle sources: 1- electrons, 2- plasma ions (choose from Xe, Ar, O or N). FEG-SEM with versatile characterization capabilities. At the time being, this microscope SEM provides highest resolution among all operational SEMs at DTU Nanolab, when operated for high resolution imaging (i.e. using low kV , in-lens detector, and in immersion mode | The Helios 5 Hydra UX DualBeam consists of two independent charged particle sources: 1- electrons, 2- plasma ions (choose from Xe, Ar, O or N). FEG-SEM with versatile characterization capabilities. At the time being, this microscope SEM provides highest resolution among all operational SEMs at DTU Nanolab, when operated for high resolution imaging (i.e. using low kV , in-lens detector, and in immersion mode). This microscope is equipped with the following detectors: ETD (secondary electrons), ABS/CBS (backscatter electrons), ICE (secondary ions and electrons) etc. | ||
The plasma focused ion beam (PFIB) with inductively coupled plasma source supporting four ion species (Xe, Ar, O, N) provides the possibility of characterization of microstructures by imaging and serial sectioning via sputtering. The microscope is equipped with a nano manipulator for high quality TEM sample preparation and can with the AutoTEM software do automated lift-out procedures with high precision. | The plasma focused ion beam (PFIB) with inductively coupled plasma source supporting four ion species (Xe, Ar, O, N) provides the possibility of characterization of microstructures by imaging and serial sectioning via sputtering. The microscope is equipped with a nano manipulator for high quality TEM sample preparation and can with the AutoTEM software do automated lift-out procedures with high precision. | ||
The combination of PFIB sputtering capabilities, and 2-dimentional imaging facilitates 3-dimentional | The combination of PFIB sputtering capabilities, and 2-dimentional imaging facilitates 3-dimentional imaging. | ||
With the Maps software, it is possible to make automated mapping of large areas for a higher resolution of the image. | With the Maps software, it is possible to make automated mapping of large areas for a higher resolution of the image. | ||
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- Thermo Scientific EasyLift™ NanoManipulator for precise in situ sample manipulation | - Thermo Scientific EasyLift™ NanoManipulator for precise in situ sample manipulation | ||
- Everhart-Thornley | - Everhart-Thornley detector (ETD) | ||
- | - Charged particle detector (ICE) near the end of the ion column for detection of secondary ions (SI) and electrons (SE) | ||
- In-chamber Nav-Cam Sample Navigation Camera | - In-chamber Nav-Cam Sample Navigation Camera | ||
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** STEM3+ detector | ** STEM3+ detector | ||
** ABS/CBS | ** ABS/CBS | ||
=Equipment performance and process related parameters= | =Equipment performance and process related parameters= | ||
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=Process information= | =Process information= | ||
= | =Tips= | ||
Support PC can be accessed from the microscope PC using the remote desktop app (See Windows taskbar). | Support PC can be accessed from the microscope PC using the remote desktop app (See Windows taskbar). | ||
Alternatively switch input on the left monitor. HDMI is support PC. DP is microscope PC. | Alternatively switch input on the left monitor. HDMI is support PC. DP is microscope PC. | ||