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[[Category: Equipment |Etch DRIE]]
[[Category: Equipment |Etch DRIE]]
[[Category: Etch (Dry) Equipment|DRIE]]
[[Category: Etch (Dry) Equipment|DRIE]]
<!--Checked for updates on 28/6-2023 - ok/jmli -->
<!--Checked for updates on 4/9-2025 - ok/jmli -->
{{contentbydryetch}}


=== Past configurations ===
=== Past configurations ===
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{{Template:Peg2configheader1
{{Template:Peg2configheader1
|TableHeader= 6: Currently valid from June 13 2022 onwards
|TableHeader= 6: Currently valid June 13 2022 to May 17 2023
}}
}}
{{Template:Peg2configcontent1
{{Template:Peg2configcontent1
|ItemName= Available gasses and gas chemistry
|ItemName= Available gasses and gas chemistry
|ItemConfiguration= '''Available gasses:'''
|ItemConfiguration= '''Available gasses:'''
* SF<sub>6</sub>-1: 1200 sccm
* SF<sub>6</sub>: 50 sccm
* SF<sub>6</sub>-2: 50 sccm
* O<sub>2</sub>: 50 sccm
* O<sub>2</sub>: 50 sccm
* Ar: 283  
* Ar: 283  
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|ItemConfiguration= The users and supervisors of Pegasus-2 must carefully read the 4 papers listed in the comments in order to have a correct understanding of the etch process and experimental procedure and how it relates to the Bosch etch performance.  
|ItemConfiguration= The users and supervisors of Pegasus-2 must carefully read the 4 papers listed in the comments in order to have a correct understanding of the etch process and experimental procedure and how it relates to the Bosch etch performance.  
|ItemComment= See the papers in the [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2#Publications_on_the_CORE_process |section below]].
|ItemComment= See the papers in the [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2#Publications_on_the_CORE_process |section below]].
}}
}}
|}
|}
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: 2021 Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 39(3), [032201]
: 2021 Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 39(3), [032201]
: https://doi.org/10.1116/6.0000922
: https://doi.org/10.1116/6.0000922
=== Access to Pegasus 2 configuration templates ===
'''Pegasus 2 configuration table version 1'''
* '''Table header''': [[Template:Peg2configheader1]]
* '''Table content''': [[Template:Peg2configcontent1]]
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