Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@ | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher click here]''' | ||
<!--Page reviewed by jmli 9/8-2022 --> | |||
<!--Checked for updates on 4/9-2025 - ok/jmli --> | |||
[[Category: Equipment |Etch ICP Metal]] | [[Category: Equipment |Etch ICP Metal]] | ||
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== The ICP Metal Etcher == | == The ICP Metal Etcher == | ||
[[Image:ICP-Metal-Etcher.jpg |300x300px|thumb|The SPTS ICP Metal Etcher in the | [[Image:ICP-Metal-Etcher.jpg |300x300px|thumb|The SPTS ICP Metal Etcher in the DTU Nanolab cleanroom B-1]] | ||
Name: PRO ICP <br> | Name: PRO ICP <br> | ||
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'''The user manual, user APV and contact information can be found in LabManager:''' | '''The user manual, user APV and contact information can be found in LabManager:''' | ||
Equipment info in [http://labmanager | Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=266 LabManager] | ||
==Process information== | ==Process information== | ||
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*[[Specific Process Knowledge/Etch/ICP Metal Etcher/silicon nitride|Etch of silicon nitride]] | *[[Specific Process Knowledge/Etch/ICP Metal Etcher/silicon nitride|Etch of silicon nitride]] | ||
*[[Specific Process Knowledge/Etch/Titanium Oxide/ICP metal|Etch of Titanium Oxide]] | *[[Specific Process Knowledge/Etch/Titanium Oxide/ICP metal|Etch of Titanium Oxide]] | ||
*[[Specific Process Knowledge/Etch/Aluminum Oxide/Al2O3 Etch with ICP Metal| | *[[Specific Process Knowledge/Etch/Titanium Nitride/ICP metal|Etch of Titanium Nitride]] | ||
*[[Specific Process Knowledge/Etch/Aluminum Oxide/Al2O3 Etch with ICP Metal|Al<sub>2</sub>O<sub>3</sub> Etch]] | |||
'''End point detection''' | |||
*[[/Examples of End point detection|Examples of End point detection]] | |||
==An overview of the performance of the ICP Metal Etcher and some process related parameters== | ==An overview of the performance of the ICP Metal Etcher and some process related parameters== | ||