Jump to content

Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions

Reet (talk | contribs)
Eves (talk | contribs)
No edit summary
 
(2 intermediate revisions by one other user not shown)
Line 321: Line 321:
!style="background:silver; color:black;" align="left"|Purpose  
!style="background:silver; color:black;" align="left"|Purpose  
|style="background:LightGrey; color:black"|Deposition of various materials ||style="background:WhiteSmoke; color:black"|
|style="background:LightGrey; color:black"|Deposition of various materials ||style="background:WhiteSmoke; color:black"|
* Sputtering of metals including:
* Metals including alloys and magnetic materials
* alloys and magnetic metals
* Dielectrica including silica and alumina.  
* semiconductors including silicon
* Semiconductors including silicon
* dielectrica including silica and alumina.  
* See tables above and ask staff if there is a material you would like to deposit which you do not see listed.
* See tables above and ask staff if there is a material you would like to deposit which you do not see listed.
|-
|-
Line 372: Line 371:
|-  
|-  
|}
|}
==Maximum Power Calculation==
* <math>PD</math> - Power density (fundamental constant given by a supplier)
* <math>P(W)</math> - Power (W) from power supply
* <math>A(inch^2)</math> - Area of the target
------------------------------------------------------------------------------------------------------------
<math> PD=\frac{P(W)}{A(inch^2)}</math>  &#8658;    <math>P(W)=PD\cdot A(inch^2)=PD\cdot\frac{\pi d^2}{4}</math>
<ul>
<li><p> <b><span style="color: green">d=2" (2-inch target)</span></b> <math>P(W)=3.14\cdot PD</math>  </p></li>
<li><p> <b><span style="color: green">d=3" (3-inch target)</span></b> <math>P(W)=7.065\cdot PD</math>  </p></li>
<li><p> <b><span style="color: green">d=4" (4-inch target)</span></b> <math>P(W)=12.56\cdot PD</math>  </p></li>
<li><p> <b><span style="color: green">d=6" (6-inch target)</span></b> <math>P(W)=28.26\cdot PD</math>  </p></li>
</ul>
--------------------------------------------------
Value of the <math>PD</math> is material dependent and can be found on KJLC homepage