Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions
No edit summary |
|||
| (4 intermediate revisions by one other user not shown) | |||
| Line 321: | Line 321: | ||
!style="background:silver; color:black;" align="left"|Purpose | !style="background:silver; color:black;" align="left"|Purpose | ||
|style="background:LightGrey; color:black"|Deposition of various materials ||style="background:WhiteSmoke; color:black"| | |style="background:LightGrey; color:black"|Deposition of various materials ||style="background:WhiteSmoke; color:black"| | ||
* | * Metals including alloys and magnetic materials | ||
* Dielectrica including silica and alumina. | |||
* Semiconductors including silicon | |||
* See tables above and ask staff if there is a material you would like to deposit which you do not see listed. | |||
|- | |- | ||
!style="background:silver; color:black" align="left" valign="top" rowspan="2"|Performance | !style="background:silver; color:black" align="left" valign="top" rowspan="2"|Performance | ||
| Line 360: | Line 363: | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Silicon wafers | *Silicon wafers | ||
*and almost any other | *and almost any other as long as it does not degas. | ||
*See cross-contamination sheet [https://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=244] | |||
|- | |- | ||
| style="background:LightGrey; color:black"|Material allowed on the substrate | | style="background:LightGrey; color:black"|Material allowed on the substrate | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*almost any | *almost any as long as it does not degas. | ||
|- | |- | ||
|} | |} | ||
==Maximum Power Calculation== | |||
* <math>PD</math> - Power density (fundamental constant given by a supplier) | |||
* <math>P(W)</math> - Power (W) from power supply | |||
* <math>A(inch^2)</math> - Area of the target | |||
------------------------------------------------------------------------------------------------------------ | |||
<math> PD=\frac{P(W)}{A(inch^2)}</math> ⇒ <math>P(W)=PD\cdot A(inch^2)=PD\cdot\frac{\pi d^2}{4}</math> | |||
<ul> | |||
<li><p> <b><span style="color: green">d=2" (2-inch target)</span></b> <math>P(W)=3.14\cdot PD</math> </p></li> | |||
<li><p> <b><span style="color: green">d=3" (3-inch target)</span></b> <math>P(W)=7.065\cdot PD</math> </p></li> | |||
<li><p> <b><span style="color: green">d=4" (4-inch target)</span></b> <math>P(W)=12.56\cdot PD</math> </p></li> | |||
<li><p> <b><span style="color: green">d=6" (6-inch target)</span></b> <math>P(W)=28.26\cdot PD</math> </p></li> | |||
</ul> | |||
-------------------------------------------------- | |||
Value of the <math>PD</math> is material dependent and can be found on KJLC homepage | |||