Specific Process Knowledge/Characterization/Tencor P17: Difference between revisions
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= Tencor P17 (Stylus Profiler) = | = Tencor P17 (Stylus Profiler) = | ||
[[image:KLA-Tencor P17 profiler.jpg|275x275px|right|thumb|Front of the P17 profiler located in cleanroom F-2.]] | |||
The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the [[Specific Process Knowledge/Characterization/Dektak XTA|Dektak XTA]] profiling surfaces with structures in the micro- and submicrometer range as well as for measuring [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress]]. Both of these tools are inside the cleanroom. | The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the [[Specific Process Knowledge/Characterization/Dektak XTA|Dektak XTA]] profiling surfaces with structures in the micro- and submicrometer range as well as for measuring [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress]]. Both of these tools are inside the cleanroom. | ||
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===Performance and Process Parameters=== | ===Performance and Process Parameters=== | ||
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*All materials that do not stick to the tip or leave residues on the chuck. | *All materials that do not stick to the tip or leave residues on the chuck. | ||
*For very soft materials we recommend the | *For very soft materials we recommend the [[Specific Process Knowledge/Characterization/Topographic measurement#Comparison of Stylus Profilers, Optical Profilers and AFMs at Nanolab| Dektak 150]]. | ||
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== Apex Software for Data Analysis == | == Apex Software for Data Analysis == | ||
The Tencor-KLA P17 stylus profiler comes with advanced data analysis software called APEX. We have an extra license for the software on a computer in the basement of building 346. The computer is located at the back of room 904 between the XRD Powder and the AFM. At the moment remote access is not possible, but you are able to access your files on the M-drive from the computer. Let us know if you would like us to find a solution for remote access and/or would like us to move the analysis computer to a room with daylight, as we are not sure how many of you would actually like to use the software. | The Tencor-KLA P17 stylus profiler comes with advanced data analysis software called APEX. We have an extra license for the software on a computer in the basement of building 346. The computer is located at the back of room 904 between the XRD Powder and the AFM. At the moment remote access is not possible, but you are able to access your files on the M-drive from the computer. Let us know if you would like us to find a solution for remote access and/or would like us to move the analysis computer to a room with daylight, as we are not sure how many of you would actually like to use the software. | ||