Specific Process Knowledge/Lithography/LiftOff: Difference between revisions
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NMP (Remover 1165) | Lift-off bath with NMP (Remover 1165) | ||
Rinse bath with diluted IPA | |||
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User defined | User defined | ||
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*NMP (Remover 1165) | *NMP (Remover 1165) | ||
*Rinse in IPA | *Rinse in diluted IPA | ||
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!style="background:silver; color:black" valign="center" rowspan="2"|Process parameters | !style="background:silver; color:black" valign="center" rowspan="2"|Process parameters | ||