LabAdviser/Courses: Difference between revisions
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= Tool Package Training (TPT) = | = Tool Package Training (TPT) = | ||
For selected equipment groups, we | For selected equipment groups, we have created online introductory courses called Tool Package Training (TPT) that provide a comprehensive overview of both the theoretical principles behind the processes and the equipment used. These courses also include video demonstrations showcasing the operation of the equipment available in our cleanroom facilities. The completion of the respective TPTs are mandatory for all academic users before hands-on training on specific equipment can be requested. While we strongly recommend commercial users to take the online courses as well, only the video demonstrations showcasing the operation of the equipment are mandatory. | ||
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!SEM TPT | !SEM TPT | ||
|for getting access to SEMs in [https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy 346] and [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/314/Microscopy_314-307 314/307] | |for getting access to SEMs in [https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy 346] and [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/314/Microscopy_314-307 314/307] | ||
|This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the SEMs in building 314/307, and 346 at DTU Nanolab. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here]. | |This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the SEMs in building 314/307, and 346/347 at DTU Nanolab. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here]. | ||
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!E-beam Lithography | !E-beam Lithography | ||
|for getting access to [[Specific Process Knowledge/Lithography/EBeamLithography | E-beam Lithography Tools]] | |for getting access to [[Specific Process Knowledge/Lithography/EBeamLithography | E-beam Lithography Tools]] | ||
|This online tutorial will be part of the E-beam TPT and is currently under prepration. <!-- ADDED WHEN TPT IS READY: It will include theory on electron beam lithography and equipment, as well as training in preparation of exposure files and equipment operation.!--> The course is a prerequisite for hands-on training on the electron beam tool. Find more information in the [[LabAdviser/Courses/TPT Ebeam|E-beam | |This online tutorial will be part of the E-beam TPT and is currently under prepration. <!-- ADDED WHEN TPT IS READY: It will include theory on electron beam lithography and equipment, as well as training in preparation of exposure files and equipment operation.!--> The course is a prerequisite for hands-on training on the electron beam tool. Find more information about the training in the [[LabAdviser/Courses/TPT Ebeam|TPT E-beam]]. | ||
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!Ellipsometer | !Ellipsometer VASE | ||
|for getting access to the [[Specific Process Knowledge/Characterization/Optical characterization#Ellipsometer VASE and Ellipsometer M-2000V|Ellipsometers]] | |for getting access to the [[Specific Process Knowledge/Characterization/Optical characterization#Ellipsometer VASE and Ellipsometer M-2000V|Ellipsometers]] | ||
|This online course consists of two short online tutorials | |This online course consists of two short online tutorials | ||
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! | ! Atomic Force Microscopy | ||
| for getting access to the [[Specific Process Knowledge/Characterization/AFM:_Atomic_Force_Microscopy | AFM equipment]] | | for getting access to the [[Specific Process Knowledge/Characterization/AFM:_Atomic_Force_Microscopy | AFM equipment]] | ||
|This online course consists of three short training videos regarding equipment operation. | |This online course consists of three short training videos regarding equipment operation. | ||
* [https://www.youtube.com/watch?v=i6JXopjBiy4&list=PLjWVU97LayHC9xeoG2uv8IaHuY7t-q0Tj AFM Icon-PT Operation] | * [https://www.youtube.com/watch?v=i6JXopjBiy4&list=PLjWVU97LayHC9xeoG2uv8IaHuY7t-q0Tj AFM Icon-PT Operation] | ||
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! Temescal | ! Temescal E-beam evaporator | ||
| for getting access to the E-beam Evaporators [[Specific Process Knowledge/Thin film deposition/Temescal | (Temescal)]] or [[Specific Process Knowledge/Thin film deposition/10-pocket e-beam evaporator | (10-Pockets)]] | | for getting access to the E-beam Evaporators [[Specific Process Knowledge/Thin film deposition/Temescal | (Temescal)]] or [[Specific Process Knowledge/Thin film deposition/10-pocket e-beam evaporator | (10-Pockets)]] | ||
|This online course consists of four short training videos regarding equipment operation. | |This online course consists of four short training videos regarding equipment operation. | ||
* [https://www.youtube.com/playlist?list=PLjWVU97LayHCQWuQyHwddJnpsEYfQp0wf Temescal Operation] | * [https://www.youtube.com/playlist?list=PLjWVU97LayHCQWuQyHwddJnpsEYfQp0wf Temescal Operation] | ||
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! Lesker Dual Chamber Sputter System | |||
| for getting access to the [[Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system | Sputter-System Metal-Oxide(PC1) Metal-Nitride (PC3)]] | |||
|This online course consists of three short training videos regarding equipment operation for PC1 (Oxide) and PC3 (Nitride)). | |||
* [https://www.youtube.com/watch?v=1WHv36coRUc PC1 (Oxide) and PC3 (Nitride) Operation] | |||
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! XPS | |||
| for getting access to the [[Specific Process Knowledge/Characterization/XPS | XPS]] | |||
|If you already a user at DTU Nanolab and have access to LabManager, please fill the access request form following the link below: | |||
*[http://labmanager.dtu.dk/function.php?module=Request&view=edit&rt=2 Access request form for XPS training] | |||
Else, please contact the Fabrication Support group. | |||
This online course presents the theory behind XPS analysis, as well as training in equipment operation in the cleanroom. | |||
* "Theory behind XPS" by ''Technical University of Munich'' (pages 1-16): [[File:Electron Spectroscopy of surfaces.pdf]] | |||
* Youtube video by ''Kent L. Rhodes (McCrone Group)'' hosted by ''Hooke College of Applied Sciences'': [https://www.youtube.com/watch?v=nGQxmOcs2rg "Using XPS for Industrial Problem Solving"] | |||
* Equipment operation by DTU Nanolab: | |||
: [https://www.youtube.com/playlist?list=PLjWVU97LayHBtOkPCSv8QA-sD4Dbz1jrb XPS Operation] | |||
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Latest revision as of 15:45, 17 June 2025
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Tool Package Training (TPT)
For selected equipment groups, we have created online introductory courses called Tool Package Training (TPT) that provide a comprehensive overview of both the theoretical principles behind the processes and the equipment used. These courses also include video demonstrations showcasing the operation of the equipment available in our cleanroom facilities. The completion of the respective TPTs are mandatory for all academic users before hands-on training on specific equipment can be requested. While we strongly recommend commercial users to take the online courses as well, only the video demonstrations showcasing the operation of the equipment are mandatory.
| Course | Requirement | Description |
|---|---|---|
| Lithography TPT | for working with Lithography Equipment | This online course presents the theory on lithographic processes and equipment, as well as training in equipment operation in the cleanroom. The course is a prerequisite for hands-on training on all lithography equipment. Find more information on the Lithography TPT and sign up here. |
| Thin Film TPT | for getting access to Thin Film Deposition & Thermal Growth Equipment | This online course introduces the theory for thin film growth and deposition techniques available at DTU Nanolab. The course is a prerequisite for hands-on training on most of the thin film equipment in the cleanroom. Find more information on the Thin Film TPT and sign up here. |
| Dry Etch TPT | for getting access to Dry Etch Equipment | This online course presents the theory on dry etching and equipment, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the dry etching equipment in the cleanroom. Find more information on the Dry Etch TPT and sign up here |
| SEM TPT | for getting access to SEMs in 346 and 314/307 | This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the SEMs in building 314/307, and 346/347 at DTU Nanolab. Find more information on the SEM TPT and sign up here. |
Equipment Tutorials
For selected equipment, we have created online courses called exxplaining the operation (hardware and software) of our equipment. These tutorials are mandatory for all users before hands-on training on specific equipment can be requested via training@nanolab.dtu.dk.
| Course | Requirement | Description |
|---|---|---|
| E-beam Lithography | for getting access to E-beam Lithography Tools | This online tutorial will be part of the E-beam TPT and is currently under prepration. The course is a prerequisite for hands-on training on the electron beam tool. Find more information about the training in the TPT E-beam. |
| Ellipsometer VASE | for getting access to the Ellipsometers | This online course consists of two short online tutorials |
| Atomic Force Microscopy | for getting access to the AFM equipment | This online course consists of three short training videos regarding equipment operation. |
| Temescal E-beam evaporator | for getting access to the E-beam Evaporators (Temescal) or (10-Pockets) | This online course consists of four short training videos regarding equipment operation. |
| Lesker Dual Chamber Sputter System | for getting access to the Sputter-System Metal-Oxide(PC1) Metal-Nitride (PC3) | This online course consists of three short training videos regarding equipment operation for PC1 (Oxide) and PC3 (Nitride)). |
| XPS | for getting access to the XPS | If you already a user at DTU Nanolab and have access to LabManager, please fill the access request form following the link below:
Else, please contact the Fabrication Support group. This online course presents the theory behind XPS analysis, as well as training in equipment operation in the cleanroom.
|